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    • 8. 发明授权
    • Thermal type flow rate sensor
    • 热式流量传感器
    • US5321382A
    • 1994-06-14
    • US910844
    • 1992-07-07
    • Masahito MizukoshiShinji OtaNorikazu HosokawaYasushi Kohno
    • Masahito MizukoshiShinji OtaNorikazu HosokawaYasushi Kohno
    • G01F1/68G01F1/684H01C1/08H01C3/04H01C3/12
    • G01F1/684G01F1/68
    • A thermal type flow rate sensor comprising a sensor chip having a rectangular shape. The sensor chip is supported between supporting pins through ribbon-like leads connected to opposite ends of the sensor chip. The ribbon-like leads serve to correctly locate the surface of the sensor chip with respect to flow of fluid. The surfaces of the sensor chip is formed with a thin film heater. A heater portion of the thin film heater comprises a plurality of straight portions and a plurality of turn portions connecting the straight portions to each other. Each turn portion is formed in a smoothly curved shape to avoid the concentration of electric currents and is disposed at an end portion of the sensor chip which has a comparatively low temperature. This structure is effective in preventing generation of cracks in the turn portions. In addition, the plurality of straight portions are alternatively inclined to effectively utilize the surface of the sensor chip to form a long heating portion.
    • 一种热式流量传感器,包括具有矩形形状的传感器芯片。 传感器芯片通过连接到传感器芯片的相对端的带状引线支撑在支撑引脚之间。 带状引线用于相对于流体流正确定位传感器芯片的表面。 传感器芯片的表面形成有薄膜加热器。 薄膜加热器的加热器部分包括多个直线部分和连接直线部分的多个转弯部分。 每个匝部形成为平滑弯曲的形状,以避免电流的集中,并且设置在具有较低温度的传感器芯片的端部。 该结构对于防止匝部产生裂纹是有效的。 此外,多个直线部分交替地倾斜以有效地利用传感器芯片的表面以形成长的加热部分。