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    • 10. 发明授权
    • Probe type shape measuring sensor, and NC processing equipment and shape measuring method using the sensor
    • 探头型形状测量传感器,数控加工设备和使用传感器的形状测量方法
    • US06539642B1
    • 2003-04-01
    • US09763747
    • 2001-02-27
    • Sei MoriyasuYutaka YamagataHitoshi OhmoriShinya Morita
    • Sei MoriyasuYutaka YamagataHitoshi OhmoriShinya Morita
    • G01B520
    • G01B21/20G01B11/007G01B11/2441
    • A probe head 10 and a laser interferometric displacement meter 20 are provided. The probe head supports a probe 2 that is capable of contacting a workpiece 1, that is free to move in the direction of the workpiece, and drives the probe towards the workpiece. The displacement meter measures the displacement of the probe with a high accuracy without contact. The probe head 10 is also provided with a probe shaft 12 with steps 11a, 11b at intermediate portions thereof and air bearings 14a, 14b that support the probe shaft on each side of the steps. The air bearings have a high stiffness in the radial direction, and the probe shaft is made to float by using compressed air, thus the resistance of the shaft to sliding is reduced. In addition, another compressed air is supplied to the location of the step and produces a driving force in the direction of the workpiece due to the difference of cross sectional areas on each side of the step, that provides a very small load within a predetermined range. Thereby, the measuring pressure can be adjusted to a constant very small load without reducing the stiffness of the bearings of the probe, and the measuring pressures can be varied freely. Therefore, a sub-micron accuracy of about 0.1 &mgr;m can be obtained, and the equipment can be made compact and is easily applied to on-machine measurements.
    • 提供探针头10和激光干涉位移计20。 探头支撑探头2,该探头2能够接触工件1,该工件可自由地沿工件的方向移动,并将探头驱动向工件。 位移仪可以高精度地测量探头的位移而不接触。 探针头10还设置有探针轴12,其中间部分具有台阶11a,11b,以及在台阶的每一侧支撑探针轴的空气轴承14a,14b。 空气轴承在径向上具有高刚度,并且通过使用压缩空气使探针轴浮动,从而减小了轴的滑动阻力。 此外,另一压缩空气被供给到台阶的位置,并且由于台阶两侧的横截面积的差异而在工件的方向上产生驱动力,其在预定范围内提供非常小的载荷 。 因此,可以将测量压力调整到恒定的非常小的负载,而不降低探针的轴承的刚度,并且测量压力可以自由变化。 因此,可以获得约0.1μm的亚微米精度,并且可以使设备紧凑并且容易地应用于机上测量。