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1. 发明申请

US20130083398A1 VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS 有权
标题翻译：可变波长干扰滤波器，光学滤波器，光学模块和电子设备
公开(公告)号：US20130083398A1
公开(公告)日：2013-04-04
申请号：US13602885
申请日：2012-09-04
申请人： Yasushi MATSUNO , Akira SANO
发明人： Yasushi MATSUNO , Akira SANO
IPC分类号： G02B26/00
CPC分类号： G01N21/658 , G01J3/26 , G01J3/502 , G02B26/001
摘要： A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is kv, and a spring constant of the air existing in the inter-reflecting film gap is kair, kv≧20×kair is satisfied.
摘要翻译：可变波长干涉滤光器包括固定基板，与固定基板接合的可移动基板，设置在固定基板上的固定反射膜，设置在可移动基板上的可移动反射膜，以及静电致动器，其适于通过使可移动基板朝向固定基板偏转来改变反射膜间隙的间隙量;释放空间，当静止反射膜和可移动反射膜之间的空气移动时，在固定基板和可动基板之间设置反射膜间隙的间隙量，并且假定可动基板的弹簧常数为kv，并且存在于反射膜间隙中的空气的弹簧常数是kair，kv≥20×kair。

2. 发明申请

US20120300208A1 OPTICAL FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER 有权
标题翻译：光学过滤器，光学过滤器模块和光学分析仪
公开(公告)号：US20120300208A1
公开(公告)日：2012-11-29
申请号：US13479931
申请日：2012-05-24
申请人： Akira SANO , Yasushi MATSUNO
发明人： Akira SANO , Yasushi MATSUNO
IPC分类号： G02B26/00 , G01J3/46
CPC分类号： G01J1/04 , G01J1/0488 , G01J3/26 , G01J2003/1247 , G02B26/001
摘要： An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential.
摘要翻译：光学滤波器包括固定基板，与固定基板相对的可移动基板，设置在固定基板的面对可移动基板的表面上的第一反射膜，设置在可移动基板上并与第一反射膜相对的第二反射膜间隙，形成为覆盖所述第一反射膜并延伸超过所述第一反射膜的外周的第一电极，以及设置在所述可动基板的面向所述固定基板的表面上并与所述第一反射膜的一部分相对的第二电极电极，第一电极由透光材料形成，第一电极和第二反射膜以相同的电位电连接。

3. 发明申请

US20120188646A1 VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE 审中-公开
标题翻译：可变波长干涉滤光片，光学模块和光学分析装置
公开(公告)号：US20120188646A1
公开(公告)日：2012-07-26
申请号：US13355835
申请日：2012-01-23
申请人： Akira SANO , Yasushi MATSUNO , Koji KITAHARA
发明人： Akira SANO , Yasushi MATSUNO , Koji KITAHARA
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G01J3/26 , G01J3/50 , G02B5/284
摘要： An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror.
摘要翻译：标准具包括第一基板，面对第一基板的第二基板，设置在第一基板的面向第二基板的表面上的固定反射镜，设置在第二基板上并经由镜面对置于固定反射镜的可动反射镜间隙，以及设置在面向第二基板的第一基板的表面上的第一电极。第一多层止动部分由第一电极的一部分与固定反射镜的外周边缘的至少一部分层叠而成。

4. 发明申请

US20120257280A1 TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS 有权
标题翻译： TUNABLE干涉滤光片，光学模块和电子设备
公开(公告)号：US20120257280A1
公开(公告)日：2012-10-11
申请号：US13442325
申请日：2012-04-09
申请人： Akira SANO , Yasushi MATSUNO
发明人： Akira SANO , Yasushi MATSUNO
IPC分类号： G02B5/28
CPC分类号： G02B26/001 , G01J3/26 , G02B5/28 , G02B5/284 , G02B5/285
摘要： A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface.
摘要翻译：可调谐干涉滤光器包括：第一和第二相对的基板; 设置在所述第一基板的第一反射膜固定面上的第一反射膜; 第二反射膜，设置在第二基板的第二反射膜固定面上，并与第一反射膜隔开间隔开; 以及第一电极，设置在面向第二基板的第一基板的第一电极表面上，其中第一电极表面与第二基板间隔开与第一反射膜固定表面不同的距离，其中，第一反射膜和第一电极堆叠在第一电极表面上，层叠部分与第二基板隔开比第一反射膜固定表面更大的距离。

5. 发明申请

US20100128076A1 DROPLET JET HEAD AND DROPLET JET APPARATUS 审中-公开
标题翻译： DROPLET喷气头和喷射喷嘴设备
公开(公告)号：US20100128076A1
公开(公告)日：2010-05-27
申请号：US12641882
申请日：2009-12-18
申请人： Yasushi MATSUNO , Masahiro FUJII , Akira SANO
发明人： Yasushi MATSUNO , Masahiro FUJII , Akira SANO
IPC分类号： B41J29/38
CPC分类号： B41J2/14314 , B41J2002/14411 , B41J2002/14491
摘要： A droplet jet head includes a nozzle substrate having a plurality of nozzle holes; a cavity substrate having recesses whose bottoms serve as diaphragms, and the recesses serving as ejection chambers; an electrode substrate having separate electrodes opposed to the diaphragms; a reservoir substrate having a recess serving as a common droplet chamber for supplying droplets to the ejection chambers, through holes for transferring the droplets from the common droplet chamber to the ejection chambers, and nozzle communicating holes for transferring the droplets from the ejection chambers to the nozzle holes; and a driver IC that supplies a driving signal to the separate electrodes. The cavity substrate has a first hole, and the reservoir substrate has a second hole. The first hole and the second hole communicate with each other to form a housing. The driver IC is housed in the housing.
摘要翻译：液滴喷头包括具有多个喷嘴孔的喷嘴基板; 具有凹部的空腔基板，其底部用作隔膜，所述凹部用作喷射室; 具有与隔膜相对的分离电极的电极基板; 储存器基板，其具有用作向喷射室供应液滴的共同液滴室的凹槽，通过用于将液滴从共同液滴室传送到喷射室的孔，以及用于将液滴从喷射室传送到喷嘴的喷嘴连通孔喷嘴孔; 以及向单独的电极提供驱动信号的驱动器IC。空腔基板具有第一孔，并且储存器基板具有第二孔。第一孔和第二孔彼此连通以形成壳体。驱动器IC安装在外壳中。

6. 发明申请

US20130027707A1 TUNABLE INTERFERENCE FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER 有权
标题翻译： TUNABLE干涉滤光片，光学滤光片和光学分析仪
公开(公告)号：US20130027707A1
公开(公告)日：2013-01-31
申请号：US13548578
申请日：2012-07-13
申请人： Tomonori MATSUSHITA , Yasushi MATSUNO
发明人： Tomonori MATSUSHITA , Yasushi MATSUNO
IPC分类号： G02B26/00 , G01N21/59
CPC分类号： G01J3/0291 , G01J3/0208 , G01J3/0264 , G01J3/027 , G01J3/10 , G01J3/26 , G01J3/2823 , G01J3/32 , G01J3/44 , G01J3/51 , G02B5/284 , G02B26/001
摘要： A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part.
摘要翻译：滤光器包括固定基板，与固定基板相对的可移动基板，设置在固定基板的面对可动基板的表面上的第一反射膜，设置在可移动基板上并与第一反射膜相对的第二反射膜间隙，设置在固定基板的面对可动基板的表面上的第一电极，设置在可移动基板上并与第一电极相对的第二电极，设置在固定和可移动基板的相对表面上的接合部分，衬底到可移动衬底，以及设置在至少一个相对表面中的槽部分，并且间隙经由槽部与过滤器的外部连通。

7. 发明申请

US20120132349A1 METHOD FOR PRODUCING TUNABLE INTERFERENCE FILTER 审中-公开
标题翻译：生产可控干扰滤波器的方法
公开(公告)号：US20120132349A1
公开(公告)日：2012-05-31
申请号：US13301161
申请日：2011-11-21
申请人： Yasushi MATSUNO , Koji KITAHARA , Hiroshi KOMATSU
发明人： Yasushi MATSUNO , Koji KITAHARA , Hiroshi KOMATSU
IPC分类号： B32B37/02 , B32B37/06 , B32B37/08 , B32B37/14
CPC分类号： G02B26/001
摘要： A method for producing a tunable interference filter including a first substrate, a second substrate, a first reflection coating, a second reflection coating, and a gap changing section having a first gap changing section and a second first gap changing section, the method comprising a first substrate production process of forming the first substrate and forming the first reflection coating and the first gap changing section on the first substrate, a second substrate production process of forming the second substrate and forming the second reflection coating and the second gap changing section on the second substrate, and a bonding process of bonding the first substrate and the second substrate in a state in which temperature of the first substrate is higher than temperature of the second substrate after the first substrate production process and the second substrate production process.
摘要翻译：一种用于制造可调谐干涉滤光器的方法，包括第一基底，第二基底，第一反射涂层，第二反射涂层和具有第一间隙变化部分和第二第一间隙变化部分的间隙变化部分，在所述第一基板上形成所述第一反射涂层和所述第一间隙变化部的第一基板制造工序，在所述第一基板上形成所述第二基板并形成所述第二反射涂层的第二基板制造工序和所述第二间隙变更部以及在第一基板制造工序和第二基板制造工序之后，第一基板的温度高于第二基板的温度的状态下，接合第一基板和第二基板的接合工序。

8. 发明申请

US20120147380A1 VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE 有权
标题翻译：可变波长干涉滤光片，光学模块和光学分析装置
公开(公告)号：US20120147380A1
公开(公告)日：2012-06-14
申请号：US13313661
申请日：2011-12-07
申请人： Tomonori MATSUSHITA , Yasushi MATSUNO
发明人： Tomonori MATSUSHITA , Yasushi MATSUNO
IPC分类号： G01J3/45 , G02B26/00 , G01N21/25 , G01N21/61 , G01N21/59
CPC分类号： G02B5/28 , G01J3/027 , G01J3/10 , G01J3/26 , G01J3/51 , G02B26/002
摘要： A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.
摘要翻译：波长可变干涉滤光器包括分别设置在第一和第二基板处的第一和第二电极，第二基板包括可移动部分，从第一和第二电极朝向第一和第二基板的外周缘延伸的第一和第二电极线基板分别设置为与第二电极隔离的第一对置电极线以及将第一电极线与第一相对电极线连接的第一导电部。第二电极线和第一相对电极线沿着各个方向延伸穿过可动部分的假想圆的中心点，并以规则的角度间隔分割假想圆。

9. 发明申请

US20110176128A1 OPTICAL FILTER, ANALYTICAL INSTRUMENT, OPTICAL DEVICE, AND CHARACTERISTIC MEASUREMENT METHOD 有权
标题翻译：光学滤波器，分析仪器，光学器件和特性测量方法
公开(公告)号：US20110176128A1
公开(公告)日：2011-07-21
申请号：US12986394
申请日：2011-01-07
申请人： Yasushi MATSUNO
发明人： Yasushi MATSUNO
IPC分类号： G01B9/02 , G01R29/24
CPC分类号： G01J3/26 , G01J3/51 , G02B26/001
摘要： An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first reflecting film provided to the first substrate, a second reflecting film provided to the second substrate, and opposed to the first reflecting film, a first electrode provided to the first substrate, a second electrode provided to the second substrate, and opposed to the first electrode, and a voltage control section adapted to control an electrical potential difference between the first electrode and a second electrode, and when switching a wavelength of a light beam to be dispersed by switching the electrical potential difference between the first electrode and the second electrode, and measuring an intensity of the light beam dispersed, the voltage control section switches the electrical potential difference from a first electrical potential difference to a second electrical potential difference larger than the first electrical potential difference.
摘要翻译：滤光器包括第一基板，与第一基板相对的第二基板，设置在第一基板上的第一反射膜，设置在第二基板上并与第一反射膜相对的第二反射膜，所述第一基板，设置在所述第二基板上并与所述第一电极相对的第二电极，以及适于控制所述第一电极和第二电极之间的电位差的电压控制部，以及当切换光束的波长时通过切换第一电极和第二电极之间的电位差来分散，并且测量分散的光束的强度，电压控制部分将电位差从第一电位差切换到第二电位差大比第一个电位差。

10. 发明申请

US20120044491A1 OPTICAL FILTER, OPTICAL FILTER MODULE, SPECTROMETRIC INSTRUMENT, AND OPTICAL APPARATUS 审中-公开
标题翻译：光学滤光片，光学滤光片，光谱仪和光学仪器
公开(公告)号：US20120044491A1
公开(公告)日：2012-02-23
申请号：US13209835
申请日：2011-08-15
申请人： Tatsuo URUSHIDANI , Yasushi MATSUNO
发明人： Tatsuo URUSHIDANI , Yasushi MATSUNO
IPC分类号： G01J3/28 , G02B5/28
CPC分类号： G02B26/001 , G01J3/0294 , G01J3/26
摘要： An optical filter includes a first substrate, a second substrate facing the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and facing the first optical film, and at least one of the first optical film and the second optical film has a metal film having a reflecting property and transmissibility of a light in a desired wavelength band, and a surface and an edge portion of the metal film is covered by a dielectric film. It is also possible to provide a tilted surface to an edge portion of the metal film. Further, it is also possible to form a step-like bump between the metal film and a dielectric film as another optical film formed under the metal film.
摘要翻译：光学滤波器包括：第一基板，面向第一基板的第二基板;设置在第一基板上的第一光学膜;以及设置在第二基板上并面对第一光学膜的第二光学膜，以及第一光学膜中的至少一个光学膜和第二光学膜具有具有期望波长带的光的反射性和透射率的金属膜，并且金属膜的表面和边缘部分被电介质膜覆盖。还可以向金属膜的边缘部分提供倾斜表面。此外，也可以在金属膜和电介质膜之间形成作为在金属膜下形成的另一光学膜的阶梯状凸起。

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