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    • 1. 发明授权
    • Optical filter including a step section, and analytical instrument and optical apparatus using the optical filter
    • 包括台阶的光学滤波器,以及使用该滤光器的分析仪器和光学装置
    • US08917449B2
    • 2014-12-23
    • US13039390
    • 2011-03-03
    • Akira Sano
    • Akira Sano
    • G02B27/00G01J3/26G02B26/00G02B6/293
    • G02B5/26G01J3/26G02B1/10G02B6/29361G02B26/001
    • An optical filter includes a first substrate, a second substrate, a first reflecting film disposed on a first opposed surface of the first substrate, a second reflecting film disposed on a second opposed surface of the second substrate, a first electrode provided to the first substrate at a peripheral position of the first reflecting film in a plan view, and a second electrode provided to the second substrate and opposed to the first electrode. At least one of the first opposed surface and the second opposed surface is provided with a step section, and an initial gap between the first reflecting film and the second reflecting film is smaller than an initial gap between the first electrode and the second electrode, to thereby allow control of the gap between the reflecting films with good accuracy.
    • 滤光器包括第一基板,第二基板,设置在第一基板的第一相对表面上的第一反射膜,设置在第二基板的第二相对表面上的第二反射膜,设置在第一基板上的第一电极 在平面图的第一反射膜的周边位置,以及设置在第二基板上并与第一电极相对的第二电极。 第一相对表面和第二相对表面中的至少一个设置有台阶部分,并且第一反射膜和第二反射膜之间的初始间隙小于第一电极和第二电极之间的初始间隙,至 从而能够以良好的精度控制反射膜之间的间隙。
    • 3. 发明申请
    • VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS
    • 可变波长干扰滤波器,光学滤波器,光学模块和电子设备
    • US20130083398A1
    • 2013-04-04
    • US13602885
    • 2012-09-04
    • Yasushi MATSUNOAkira SANO
    • Yasushi MATSUNOAkira SANO
    • G02B26/00
    • G01N21/658G01J3/26G01J3/502G02B26/001
    • A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is kv, and a spring constant of the air existing in the inter-reflecting film gap is kair, kv≧20×kair is satisfied.
    • 可变波长干涉滤光器包括固定基板,与固定基板接合的可移动基板,设置在固定基板上的固定反射膜,设置在可移动基板上的可移动反射膜, 以及静电致动器,其适于通过使可移动基板朝向固定基板偏转来改变反射膜间隙的间隙量;释放空间,当静止反射膜和可移动反射膜之间的空气移动时, 在固定基板和可动基板之间设置反射膜间隙的间隙量,并且假定可动基板的弹簧常数为kv,并且存在于反射膜间隙中的空气的弹簧常数 是kair,kv≥20×kair。
    • 5. 发明申请
    • OPTICAL FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER
    • 光学过滤器,光学过滤器模块和光学分析仪
    • US20120300208A1
    • 2012-11-29
    • US13479931
    • 2012-05-24
    • Akira SANOYasushi MATSUNO
    • Akira SANOYasushi MATSUNO
    • G02B26/00G01J3/46
    • G01J1/04G01J1/0488G01J3/26G01J2003/1247G02B26/001
    • An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential.
    • 光学滤波器包括固定基板,与固定基板相对的可移动基板,设置在固定基板的面对可移动基板的表面上的第一反射膜,设置在可移动基板上并与第一反射膜相对的第二反射膜 间隙,形成为覆盖所述第一反射膜并延伸超过所述第一反射膜的外周的第一电极,以及设置在所述可动基板的面向所述固定基板的表面上并与所述第一反射膜的一部分相对的第二电极 电极,第一电极由透光材料形成,第一电极和第二反射膜以相同的电位电连接。
    • 8. 发明申请
    • WAVELENGTH-TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS APPARATUS
    • 波长阻抗滤波器,光学模块和光学分析装置
    • US20120050742A1
    • 2012-03-01
    • US13216509
    • 2011-08-24
    • Akira SANO
    • Akira SANO
    • G01N21/25G02B26/00G02B5/28
    • G02B26/001G01J3/26G01J3/46G01J3/50
    • A wavelength-tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, a second reflective film provided on the second substrate, the second reflective film facing the first reflective film, a first electrode provided on the first substrate, and a second electrode provided on the second substrate, the second electrode facing the first electrode, wherein the first electrode includes a first electrode layer and a second electrode layer, the first electrode layer has a first in-plane internal stress which is compressive, and the second electrode layer has a second in-plane internal stress which is tensile.
    • 一种波长可调干涉滤光器,包括第一基板,面向第一基板的第二基板,设置在第一基板上的第一反射膜,设置在第二基板上的第二反射膜,与第一反射膜相对的第二反射膜, 设置在第一基板上的第一电极和设置在第二基板上的第二电极,第二电极面对第一电极,其中第一电极包括第一电极层和第二电极层,第一电极层具有第一电极层, 平面内部应力是压缩的,并且第二电极层具有作为拉伸的第二面内内应力。