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    • 2. 发明申请
    • METHOD FOR PRODUCING TUNABLE INTERFERENCE FILTER
    • 生产可控干扰滤波器的方法
    • US20120132349A1
    • 2012-05-31
    • US13301161
    • 2011-11-21
    • Yasushi MATSUNOKoji KITAHARAHiroshi KOMATSU
    • Yasushi MATSUNOKoji KITAHARAHiroshi KOMATSU
    • B32B37/02B32B37/06B32B37/08B32B37/14
    • G02B26/001
    • A method for producing a tunable interference filter including a first substrate, a second substrate, a first reflection coating, a second reflection coating, and a gap changing section having a first gap changing section and a second first gap changing section, the method comprising a first substrate production process of forming the first substrate and forming the first reflection coating and the first gap changing section on the first substrate, a second substrate production process of forming the second substrate and forming the second reflection coating and the second gap changing section on the second substrate, and a bonding process of bonding the first substrate and the second substrate in a state in which temperature of the first substrate is higher than temperature of the second substrate after the first substrate production process and the second substrate production process.
    • 一种用于制造可调谐干涉滤光器的方法,包括第一基底,第二基底,第一反射涂层,第二反射涂层和具有第一间隙变化部分和第二第一间隙变化部分的间隙变化部分, 在所述第一基板上形成所述第一反射涂层和所述第一间隙变化部的第一基板制造工序,在所述第一基板上形成所述第二基板并形成所述第二反射涂层的第二基板制造工序和所述第二间隙变更部 以及在第一基板制造工序和第二基板制造工序之后,第一基板的温度高于第二基板的温度的状态下,接合第一基板和第二基板的接合工序。
    • 3. 发明申请
    • VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS
    • 可变波长干扰滤波器,光学滤波器,光学模块和电子设备
    • US20130083398A1
    • 2013-04-04
    • US13602885
    • 2012-09-04
    • Yasushi MATSUNOAkira SANO
    • Yasushi MATSUNOAkira SANO
    • G02B26/00
    • G01N21/658G01J3/26G01J3/502G02B26/001
    • A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is kv, and a spring constant of the air existing in the inter-reflecting film gap is kair, kv≧20×kair is satisfied.
    • 可变波长干涉滤光器包括固定基板,与固定基板接合的可移动基板,设置在固定基板上的固定反射膜,设置在可移动基板上的可移动反射膜, 以及静电致动器,其适于通过使可移动基板朝向固定基板偏转来改变反射膜间隙的间隙量;释放空间,当静止反射膜和可移动反射膜之间的空气移动时, 在固定基板和可动基板之间设置反射膜间隙的间隙量,并且假定可动基板的弹簧常数为kv,并且存在于反射膜间隙中的空气的弹簧常数 是kair,kv≥20×kair。
    • 4. 发明申请
    • OPTICAL FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER
    • 光学过滤器,光学过滤器模块和光学分析仪
    • US20120300208A1
    • 2012-11-29
    • US13479931
    • 2012-05-24
    • Akira SANOYasushi MATSUNO
    • Akira SANOYasushi MATSUNO
    • G02B26/00G01J3/46
    • G01J1/04G01J1/0488G01J3/26G01J2003/1247G02B26/001
    • An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential.
    • 光学滤波器包括固定基板,与固定基板相对的可移动基板,设置在固定基板的面对可移动基板的表面上的第一反射膜,设置在可移动基板上并与第一反射膜相对的第二反射膜 间隙,形成为覆盖所述第一反射膜并延伸超过所述第一反射膜的外周的第一电极,以及设置在所述可动基板的面向所述固定基板的表面上并与所述第一反射膜的一部分相对的第二电极 电极,第一电极由透光材料形成,第一电极和第二反射膜以相同的电位电连接。
    • 7. 发明申请
    • OPTICAL FILTER, ANALYTICAL INSTRUMENT, OPTICAL DEVICE, AND CHARACTERISTIC MEASUREMENT METHOD
    • 光学滤波器,分析仪器,光学器件和特性测量方法
    • US20110176128A1
    • 2011-07-21
    • US12986394
    • 2011-01-07
    • Yasushi MATSUNO
    • Yasushi MATSUNO
    • G01B9/02G01R29/24
    • G01J3/26G01J3/51G02B26/001
    • An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first reflecting film provided to the first substrate, a second reflecting film provided to the second substrate, and opposed to the first reflecting film, a first electrode provided to the first substrate, a second electrode provided to the second substrate, and opposed to the first electrode, and a voltage control section adapted to control an electrical potential difference between the first electrode and a second electrode, and when switching a wavelength of a light beam to be dispersed by switching the electrical potential difference between the first electrode and the second electrode, and measuring an intensity of the light beam dispersed, the voltage control section switches the electrical potential difference from a first electrical potential difference to a second electrical potential difference larger than the first electrical potential difference.
    • 滤光器包括第一基板,与第一基板相对的第二基板,设置在第一基板上的第一反射膜,设置在第二基板上并与第一反射膜相对的第二反射膜, 所述第一基板,设置在所述第二基板上并与所述第一电极相对的第二电极,以及适于控制所述第一电极和第二电极之间的电位差的电压控制部,以及当切换光束的波长时 通过切换第一电极和第二电极之间的电位差来分散,并且测量分散的光束的强度,电压控制部分将电位差从第一电位差切换到第二电位差大 比第一个电位差。
    • 9. 发明申请
    • TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS
    • TUNABLE干涉滤光片,光学模块和电子设备
    • US20120257280A1
    • 2012-10-11
    • US13442325
    • 2012-04-09
    • Akira SANOYasushi MATSUNO
    • Akira SANOYasushi MATSUNO
    • G02B5/28
    • G02B26/001G01J3/26G02B5/28G02B5/284G02B5/285
    • A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface.
    • 可调谐干涉滤光器包括:第一和第二相对的基板; 设置在所述第一基板的第一反射膜固定面上的第一反射膜; 第二反射膜,设置在第二基板的第二反射膜固定面上,并与第一反射膜隔开间隔开; 以及第一电极,设置在面向第二基板的第一基板的第一电极表面上,其中第一电极表面与第二基板间隔开与第一反射膜固定表面不同的距离,其中, 第一反射膜和第一电极堆叠在第一电极表面上,层叠部分与第二基板隔开比第一反射膜固定表面更大的距离。
    • 10. 发明申请
    • DROPLET JET HEAD AND DROPLET JET APPARATUS
    • DROPLET喷气头和喷射喷嘴设备
    • US20100128076A1
    • 2010-05-27
    • US12641882
    • 2009-12-18
    • Yasushi MATSUNOMasahiro FUJIIAkira SANO
    • Yasushi MATSUNOMasahiro FUJIIAkira SANO
    • B41J29/38
    • B41J2/14314B41J2002/14411B41J2002/14491
    • A droplet jet head includes a nozzle substrate having a plurality of nozzle holes; a cavity substrate having recesses whose bottoms serve as diaphragms, and the recesses serving as ejection chambers; an electrode substrate having separate electrodes opposed to the diaphragms; a reservoir substrate having a recess serving as a common droplet chamber for supplying droplets to the ejection chambers, through holes for transferring the droplets from the common droplet chamber to the ejection chambers, and nozzle communicating holes for transferring the droplets from the ejection chambers to the nozzle holes; and a driver IC that supplies a driving signal to the separate electrodes. The cavity substrate has a first hole, and the reservoir substrate has a second hole. The first hole and the second hole communicate with each other to form a housing. The driver IC is housed in the housing.
    • 液滴喷头包括具有多个喷嘴孔的喷嘴基板; 具有凹部的空腔基板,其底部用作隔膜,所述凹部用作喷射室; 具有与隔膜相对的分离电极的电极基板; 储存器基板,其具有用作向喷射室供应液滴的共同液滴室的凹槽,通过用于将液滴从共同液滴室传送到喷射室的孔,以及用于将液滴从喷射室传送到喷嘴的喷嘴连通孔 喷嘴孔; 以及向单独的电极提供驱动信号的驱动器IC。 空腔基板具有第一孔,并且储存器基板具有第二孔。 第一孔和第二孔彼此连通以形成壳体。 驱动器IC安装在外壳中。