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    • 6. 发明授权
    • Capacitive sensor and manufacturing method therefor
    • 电容传感器及其制造方法
    • US08188555B2
    • 2012-05-29
    • US12277329
    • 2008-11-25
    • Yasushi Igarashi
    • Yasushi Igarashi
    • H01L29/84
    • G01P15/125B81B7/02B81B2201/0235B81B2201/0264B81B2207/092B81C1/00301G01P1/023G01P2015/0828
    • A capacitive sensor includes a semiconductor substrate, a fixed electrode serving as a first electrode formed on a surface of or in the semiconductor substrate, a structure formed on the semiconductor substrate to have a vibratable second electrode that is formed to be spaced from and opposed to the semiconductor substrate and from the fixed electrode serving as the first electrode, a sealing member serving as a first sealing member formed on the semiconductor substrate to be spaced from the structure, to cover the structure, and to have a through hole serving as a first through hole, and a movable electrode serving as a vibratable third electrode formed on the sealing member to block up the through hole, and to be spaced from and opposed to the movable electrode.
    • 电容传感器包括半导体衬底,用作形成在半导体衬底的表面上或半导体衬底中的第一电极的固定电极,形成在半导体衬底上的结构,以具有形成为与第二电极间隔开并与之相对的可振动的第二电极 半导体衬底和用作第一电极的固定电极,用作第一密封构件的密封构件,形成在半导体衬底上以与结构间隔开以覆盖结构,并且具有用作第一电极的通孔 通孔,以及用作可振动的第三电极的可动电极,形成在密封构件上以阻挡通孔,并与可动电极间隔开并与之相对。
    • 7. 发明授权
    • Metal oxide capacitor with hydrogen diffusion blocking covering
    • 具有氢扩散阻挡覆盖层的金属氧化物电容器
    • US06573587B1
    • 2003-06-03
    • US10154824
    • 2002-05-28
    • Yasushi Igarashi
    • Yasushi Igarashi
    • H01L2900
    • H01L28/55Y10S438/957
    • A semiconductor device of the present invention includes capacitors made up of a lower electrode, a capacitive insulation film made from metal oxide material, provided on one surface of a semiconductor substrate. An ozone TEOS film is provided on these capacitors, and a protective film for covering the upper surfaces of the capacitors is then provided on this ozone TEOS film. An interlay insulation film that is thicker than the ozone TEOS film is provided on the protective film for covering the upper surfaces of the capacitors. In this way, the present invention prevents degradation in film quality of the capacitive insulation film due to mutual reaction etc. As a result, it becomes possible to provide a capacitor using an insulating film made of a metal oxide as a capacitive insulation film, having a protective film for sufficiently preventing diffusion of H2, a semiconductor device having high reliability, and a method of manufacturing such a semiconductor device, are provided.
    • 本发明的半导体器件包括由半导体衬底的一个表面上的下电极,由金属氧化物材料制成的电容绝缘膜构成的电容器。 在这些电容器上设置臭氧TEOS膜,然后在该臭氧TEOS膜上设置用于覆盖电容器的上表面的保护膜。 在保护膜上设置比臭氧TEOS膜厚的层间绝缘膜,以覆盖电容器的上表面。 以这种方式,本发明可防止由于相互反应等导致的电容绝缘膜的膜质量的劣化。结果,可以提供一种使用由金属氧化物制成的绝缘膜作为电容绝缘膜的电容器,具有 提供了充分防止H2扩散的保护膜,具有高可靠性的半导体器件及其制造方法。
    • 8. 发明授权
    • Read-out circuit
    • 读出电路
    • US06426906B1
    • 2002-07-30
    • US09941722
    • 2001-08-30
    • Yasushi Igarashi
    • Yasushi Igarashi
    • G11C700
    • G11C11/22
    • A read-out circuit capable of achieving an improvement in the reliability of a reference potential generating cell by utilizing a 1T-1C (one transistor-one ferroelectric capacitor) type FRAM which enables a reduction in area to constitute the reference potential generating cell is provided. A read-out circuit that amplifies a binary signal through a sense amplifier and reads out the amplified signal as a bit line potential is provided with a 0-level setting circuit that resets the lower potential signal in the binary signal to 0 V at a stage preceding the sense amplifier. By adopting this structure, a constant potential can be used as a reference potential, to achieve stable operation. In addition since a constant potential can be used as the reference potential, the degree of change occurring over time can be reduced. Furthermore, since the capacity of the reference potential line does not require a particularly large capacity, the power consumption during a read-out operation can be reduced.
    • 提供一种能够通过利用能够减小面积来构成参考电位生成单元的1T-1C(一晶体管一铁电电容器)型FRAM来实现参考电位生成单元的可靠性提高的读出电路 。 通过读出放大器放大二进制信号并读出放大的信号作为位线电位的读出电路设置有0电平设置电路,该电平将二进制信号中的较低电位信号复位为0V 在读出放大器之前。 通过采用这种结构,可以将恒定电位用作参考电位,以实现稳定的操作。 此外,由于可以使用恒定电位作为参考电位,所以可以减少随时间发生的变化程度。 此外,由于参考电位线的容量不需要特别大的容量,所以可以减少读出操作期间的功耗。
    • 9. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07256088B2
    • 2007-08-14
    • US11091529
    • 2005-03-29
    • Yasushi Igarashi
    • Yasushi Igarashi
    • H01L21/8242
    • H01L28/55Y10S438/957
    • A semiconductor device of the present invention includes capacitors made up of a lower electrode, a capacitive insulation film made from metal oxide material, provided on one surface of a semiconductor substrate. An ozone TEOS film is provided on these capacitors, and a protective film for covering the upper surfaces of the capacitors is then provided on this ozone TEOS film. An interlay insulation film that is thicker than the ozone TEOS film is provided on the protective film for covering the upper surfaces of the capacitors. In this way, the present invention prevents degradation in film quality of the capacitive insulation film due to mutual reaction etc. As a result, it becomes possible to provide a capacitor using an insulating film made of a metal oxide as a capacitive insulation film, having a protective film for sufficiently preventing diffusion of H2, a semiconductor device having high reliability, and a method of manufacturing such a semiconductor device, are provided.
    • 本发明的半导体器件包括由半导体衬底的一个表面上的下电极,由金属氧化物材料制成的电容绝缘膜构成的电容器。 在这些电容器上设置臭氧TEOS膜,然后在该臭氧TEOS膜上设置用于覆盖电容器的上表面的保护膜。 在保护膜上设置比臭氧TEOS膜厚的层间绝缘膜,以覆盖电容器的上表面。 以这种方式,本发明可防止由于相互反应等导致的电容绝缘膜的膜质量的劣化。结果,可以提供一种使用由金属氧化物制成的绝缘膜作为电容绝缘膜的电容器,具有 提供了用于充分防止H 2 H 2扩散的保护膜,具有高可靠性的半导体器件,以及制造这种半导体器件的方法。
    • 10. 发明授权
    • Method and circuit for reading data from a ferroelectric memory cell
    • 用于从铁电存储单元读取数据的方法和电路
    • US06834006B2
    • 2004-12-21
    • US10247375
    • 2002-09-20
    • Yasushi Igarashi
    • Yasushi Igarashi
    • G11C1122
    • G11C11/22
    • Data stored in a ferroelectric capacitor in a ferroelectric memory cell are read by applying a preliminary voltage to the ferroelectric capacitor to increase its polarization if a certain data value is stored, then applying a series of read voltages to produce a potential responsive to the stored data. The preliminary voltage may be applied either before or after one terminal of the ferroelectric capacitor is placed in a floating state, which is maintained while the series of read voltages is applied. Application of the preliminary voltage provides an increased reading margin if the ferroelectric capacitor has partially lost polarization while storing the certain data value, by restoring some of the lost polarization.
    • 通过向铁电电容器施加初步电压来读取存储在铁电存储单元中的铁电电容器的数据,以便如果存储某个数据值则增加其极化,然后施加一系列读取电压以响应于所存储的数据产生电位 。 可以在将铁电电容器的一个端子置于浮置状态之前或之后施加初始电压,该浮置状态在施加一系列读取电压时保持。 如果铁电电容器通过恢复一些失去的极化而在存储某些数据值的同时部分地失去极化,则初始电压的应用提供增加的读取余量。