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    • 8. 发明授权
    • Semiconductor light emitting element
    • 半导体发光元件
    • US07763907B2
    • 2010-07-27
    • US11850404
    • 2007-09-05
    • Koichi TachibanaHajime NagoShinji SaitoShinya NunoueGenichi Hatakoshi
    • Koichi TachibanaHajime NagoShinji SaitoShinya NunoueGenichi Hatakoshi
    • H01L33/22H01L33/14H01L33/38
    • H01L33/32H01L33/02H01L33/16
    • A semiconductor light emitting element includes: an {0001} n-type semiconductor substrate formed of a III-V semiconductor, which is in a range of 0° to 45° in inclination angle into a direction, and which is in a range of 0° to 10° in inclination angle into a direction; an n-type layer formed of a III-V semiconductor on the n-type semiconductor substrate; an n-type guide layer formed of a III-V semiconductor above the n-type layer; an active layer formed of a III-V semiconductor above the n-type guide layer; a p-type first guide layer formed of a III-V semiconductor above the active layer; a p-type contact layer formed of a III-V semiconductor above the p-type first guide layer; and an concavo-convex layer formed of a III-V semiconductor between the p-type first guide layer and the p-type contact layer. The concavo-convex layer has concave portions and convex portions which are alternately and regularly arranged at a top face thereof, and has lower p-type impurity concentration than that of the p-type contact layer.
    • 半导体发光元件包括:由III-V族半导体形成的{0001} n型半导体衬底,其倾斜角度在0°至45°的范围内,并且其为 在倾斜角度为0°至10°的范围内成为<11-20>方向; 在n型半导体衬底上由III-V半导体形成的n型层; 由n型层上方的III-V族半导体形成的n型引导层; 由n型引导层上方的III-V族半导体形成的有源层; 由有源层上方的III-V族半导体形成的p型第一引导层; p型接触层,其由p型第一引导层上方的III-V族半导体形成; 以及在p型第一引导层和p型接触层之间由III-V族半导体形成的凹凸层。 该凹凸层具有在顶面交替规则地配置的凹部和凸部,并且p型杂质浓度比p型接触层低。
    • 9. 发明申请
    • SEMICONDUCTOR LIGHT EMITTING ELEMENT
    • 半导体发光元件
    • US20080179623A1
    • 2008-07-31
    • US11850404
    • 2007-09-05
    • Koichi TACHIBANAHajime NagoShinji SaitoShinya NunoueGenichi Hatakoshi
    • Koichi TACHIBANAHajime NagoShinji SaitoShinya NunoueGenichi Hatakoshi
    • H01L29/24
    • H01L33/32H01L33/02H01L33/16
    • A semiconductor light emitting element includes: an {0001} n-type semiconductor substrate formed of a III-V semiconductor, which is in a range of 0° to 45° in inclination angle into a direction, and which is in a range of 0° to 10° in inclination angle into a direction; an n-type layer formed of a III-V semiconductor on the n-type semiconductor substrate; an n-type guide layer formed of a III-V semiconductor above the n-type layer; an active layer formed of a III-V semiconductor above the n-type guide layer; a p-type first guide layer formed of a III-V semiconductor above the active layer; a p-type contact layer formed of a III-V semiconductor above the p-type first guide layer; and an concavo-convex layer formed of a III-V semiconductor between the p-type first guide layer and the p-type contact layer. The concavo-convex layer has concave portions and convex portions which are alternately and regularly arranged at a top face thereof, and has lower p-type impurity concentration than that of the p-type contact layer.
    • 半导体发光元件包括:由III-V族半导体形成的{0001} n型半导体衬底,其倾斜角度在0°至45°的范围内,并且其为 在倾斜角度为0°至10°的范围内成为<11-20>方向; 在n型半导体衬底上由III-V半导体形成的n型层; 由n型层上方的III-V族半导体形成的n型引导层; 由n型引导层上方的III-V族半导体形成的有源层; 由有源层上方的III-V族半导体形成的p型第一引导层; p型接触层,其由p型第一引导层上方的III-V族半导体形成; 以及在p型第一引导层和p型接触层之间由III-V族半导体形成的凹凸层。 该凹凸层具有在顶面交替规则地配置的凹部和凸部,并且p型杂质浓度比p型接触层低。