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    • 2. 发明授权
    • Ion implanter
    • 离子注入机
    • US06326630B1
    • 2001-12-04
    • US09184335
    • 1998-11-02
    • Yasuo Yamashita
    • Yasuo Yamashita
    • H01J37317
    • H01J37/3171H01J37/32412
    • In order to provide an ion implanter which can process the material in high accuracy by preventing charge up of the material, in an ion implanter comprising an ion source for generating an ion beam, a mass separator for separating and emitting only a necessary ion seed from said ion beam, a post acceleration tube for accelerating said ion bean emitted so as to have energy necessary for an ion implanting, a quadrupole lens department for shaping said accelerated ion beam to have a suitable shape for being implanted to, an ion deflection department for isolating and removing beam components being neutral electrically from said shaped ion beam, and an ion implanting room for implanting said ion to said material by implanting said ion beam that neutral beam components are removed, at least a post acceleration tube holds its high vacuum degree, and vacuum degree of the ion implanting room is held to generate a beam plasma.
    • 为了提供一种离子注入机,其可以通过防止材料的充电来高精度地处理材料,在包括用于产生离子束的离子源的离子注入机中,用于分离和仅发射必需的离子种子的质量分离器 所述离子束,用于加速所述发射的离子束以便具有离子注入所需的能量的后加速管,用于使所述加速离子束成形以具有合适形状以用于植入离子偏转部的四极透镜部, 隔离和去除与所述成形离子束中性电子的束分量;以及离子注入室,用于通过注入去除中性束成分的所述离子束将所述离子注入所述材料,至少后加速管保持其高真空度, 并且保持离子注入室的真空度以产生束等离子体。
    • 5. 发明授权
    • Rotary type electric razor
    • 旋转式电动剃刀
    • US5014428A
    • 1991-05-14
    • US487839
    • 1990-03-05
    • Yasuo Yamashita
    • Yasuo Yamashita
    • B26B19/16
    • B26B19/16
    • The present invention is directed to a rotary type electric razor which includes an arch-shaped external cutting edge detachably mounted on an upper side of a main body case, an internal cutting edge driving unit supported for free vertical movement with respect to the main body case, and a motor speed detecting means provided within the main body case. The internal cutting edge driving unit comprises a rotary internal cutting edge which rotates in sliding contact with respect to the internal face of the external cutting edge, an internal cutting edge driving chassis for rotatably supporting the rotary internal cutting edge, a motor mounted on the internal cutting edge driving chassis, and a drive transmitting means for transmitting the output of the motor to the rotary internal cutting edge. The motor speed detecting means comprises a rotary member mounted to the output shaft of the motor, and a photosensor opposite the rotary member.
    • 7. 发明授权
    • Ion injection device and method therefor
    • 离子注入装置及其方法
    • US5753923A
    • 1998-05-19
    • US654601
    • 1996-05-29
    • Kazuo MeraIsao HashimotoYasuo YamashitaMinoru FujimotoKouji Ishiguro
    • Kazuo MeraIsao HashimotoYasuo YamashitaMinoru FujimotoKouji Ishiguro
    • C23C14/48H01J37/317H01L21/265
    • H01J37/3171H01J2237/20228
    • An ion injection device is provided which permits ion injection into a wafer with an optimum ion beam injection angle, and the ion injection device is characterized, by the provision of a wafer holding means for holding a wafer into which ion beam taken out from an ion source is implanted; a relative position varying means for varying the relative position between the wafer holding means and the ion beam within a plane substantially perpendicular to the direction of the ion beam; and an incidence angle varying means for varying an incidence angle of the ion beam on the surface of the wafer held on the wafer holding means. More specifically, the wafer holding means is a rotatable disk which holds a plurality of wafers on the circumference thereof, and the relative position varying means is constituted by a rotating means which causes the rotatable disk to rotate in a plane substantially perpendicular to the direction of the ion beam and by a rocking means for rocking the rotatable disk in a plane substantially perpendicular to the direction of the ion beam.
    • 提供一种离子注入装置,其允许以最佳离子束注入角将离子注入晶片,并且离子注入装置的特征在于,通过提供用于保持晶片的晶片保持装置,离子束从离子 源植入; 相对位置变化装置,用于在基本垂直于离子束方向的平面内改变晶片保持装置和离子束之间的相对位置; 以及用于改变保持在晶片保持装置上的晶片的表面上的离子束的入射角的入射角变化装置。 更具体地说,晶片保持装置是在圆周上保持多个晶片的可旋转盘,并且相对位置变化装置由旋转装置构成,该旋转装置使得可旋转盘在基本上垂直于 离子束和用于在基本上垂直于离子束的方向的平面中摆动可旋转盘的摆动装置。
    • 10. 发明申请
    • Cooling system for work machine
    • 工作机冷却系统
    • US20070187075A1
    • 2007-08-16
    • US10598857
    • 2005-08-02
    • Kyoko YamadaHiroya TanakaYasuo Yamashita
    • Kyoko YamadaHiroya TanakaYasuo Yamashita
    • F28F13/00
    • E02F9/0891E02F9/0866F01P11/10F01P11/12F01P2001/005F01P2025/48
    • An object of the present invention is to provide a cooling system for a work machine including a sound insulating/flow regulating plate that is capable of coping with different types and operating conditions of a work machine. An upper cover is provided above a cooling package that contains a heat exchanger unit and a cooling fan. A side door is provided at one side of the upper cover and faces the cooling package. Upper air intake holes open to the space between the side door and the cooling package and are formed in the upper cover. Side air intake holes are formed in the side door, at a location adjacent to the upper cover. A sound insulating/flow regulating plate is swingably mounted by hinges that are disposed between the upper air intake holes and the side air intake holes.
    • 本发明的目的在于提供一种能够应对作业机械的不同类型和操作条件的隔音/流量调节板的作业机械的冷却系统。 在包含热交换器单元和冷却风扇的冷却组件的上方设置有上盖。 侧门设置在上盖的一侧并面向冷却包装。 上部进气孔通向侧门和冷却包装之间的空间,并形成在上盖中。 在侧门处,与上盖相邻的位置处形成有侧吸气孔。 隔音/流量调节板通过设置在上部空气吸入孔和侧面空气吸入孔之间的铰链可摆动地安装。