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    • 3. 发明授权
    • Method of fabricating field effect transistors
    • 制造场效应晶体管的方法
    • US4503599A
    • 1985-03-12
    • US462014
    • 1983-01-28
    • Kiichi UeyanagiSusumu TakahashiYasunari UmemotoMichiharu Nakamura
    • Kiichi UeyanagiSusumu TakahashiYasunari UmemotoMichiharu Nakamura
    • H01L29/78H01L21/033H01L21/336H01L21/338H01L29/417H01L29/80H01L29/812H01L21/265
    • H01L29/66522H01L21/033H01L29/66871H01L29/80H01L29/812
    • Herein disclosed is a field effect transistor fabricating method comprising: the step of forming a surface portion of a semiconductor substrate with an impurity region for a channel; the step of forming a first material layer, which has a width substantially equal to that of a gate electrode, in such a position on said semiconductor substrate and is to be formed with said gate electrode, a second material layer, which has a width larger than that of said first material layer, above said first material layer, and source and drain regions by an ion implantation using said first and second material layers thus formed as a mask; the step of forming source and drain electrodes in contact with said source and drain regions; the step of forming a third material layer, which has a selectivity with said first material layer in its etched characteristics, on the semiconductor body thus far prepared by the foregoing steps; the step of forming at least an aperture by removing said first material layer in a state using said third material layer as a mask; and the step of forming said gate electrode in said aperture.
    • 本文公开了一种场效应晶体管制造方法,包括:形成具有沟道杂质区的​​半导体衬底的表面部分的步骤; 在所述半导体衬底上形成具有与栅电极的宽度基本相等的第一材料层的步骤,并形成所述栅电极,第二材料层的宽度较大 比所述第一材料层的上述第一材料层的上述第一材料层和通过使用由此形成的掩模的所述第一和第二材料层的离子注入的源极和漏极区域; 形成与所述源极和漏极区域接触的源极和漏极的步骤; 在上述步骤制备的半导体本体上形成第三材料层的步骤,该第三材料层具有其蚀刻特性中的所述第一材料层的选择性; 通过以使用所述第三材料层作为掩模的状态除去所述第一材料层来形成至少一个孔的步骤; 以及在所述孔中形成所述栅电极的步骤。
    • 10. 发明申请
    • Light reuse sheet, solar battery module, and light source module
    • 光再利用片,太阳能电池模块和光源模块
    • US20110240095A1
    • 2011-10-06
    • US12998677
    • 2009-11-19
    • Luis Manuel Murillo-MoraHideaki HonmaKohei MoronagaSusumu Takahashi
    • Luis Manuel Murillo-MoraHideaki HonmaKohei MoronagaSusumu Takahashi
    • H01L31/0232H01J1/62G02B5/08
    • H01L31/056H01L31/0547H01L33/60Y02E10/52
    • A light reuse sheet includes a reflective surface having an uneven configuration, the reflective surface in order to reflect light in a specific direction so as to cause light to be incident to a solar battery cell, the light being incident to a solar battery module, or in order to exit light in a specific direction by reflecting the light, the light being emitted from a light emitting element of a light source module. The reflective surface satisfies the following formula where a length in a horizontal direction of a solar battery cell or a light emitting element is represented by Lx; a length in a vertical direction of a solar battery cell or a light emitting element is represented by Ly; an angle formed between a direction of an uneven configuration of the reflective surface and an edge in a horizontal direction of the solar battery cell or the light emitting element is represented by φ; and maximum width of light which passes between adjacent solar battery cells and which is reflected by a light reuse sheet and is incident to a light receiving face of a solar battery cell or maximum width of light which is not emitted from a light emitting element in a specific direction and which exits in a specific direction by reflecting the light at a light reuse sheet is represented by A.  f  φ = 0 = Ly · cos   φ - Lx · sin   φ - A  ( cos 2  φ - sin 2   φ ) ( Formula   1 )
    • 光再利用片材包括具有不均匀构造的反射表面,反射表面以反射特定方向的光,以使光入射到太阳能电池单元,该光入射到太阳能电池模块,或 为了通过反射光而在特定方向上退出光,光从光源模块的发光元件发射。 反射面满足下式,其中太阳能电池单元或发光元件的水平方向上的长度由Lx表示; 太阳能电池单元或发光元件的垂直方向的长度由Ly表示; 在太阳能电池单元或发光元件的反射表面的不均匀构造的方向与水平方向的边缘之间形成的角度由&phgr; 和相邻的太阳能电池单元之间通过并由光再利用片材反射并入射到太阳能电池单元的光接收面的光的最大宽度或不从发光元件发射的最大宽度的光 特定方向,通过将光反射在光再利用片材上而沿特定方向退出。 = 0 = Ly·cosθ&phgr - sin;; - 公式(公式1)