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    • 7. 发明授权
    • Semiconductor integrated circuit device and method of testing the same
    • 半导体集成电路器件及其测试方法
    • US5068605A
    • 1991-11-26
    • US404355
    • 1989-09-07
    • Moritoshi YasunagaNoboru MasudaHideo TodokoroYasunari UmemotoHirotoshi TanakaHiroyuki Itoh
    • Moritoshi YasunagaNoboru MasudaHideo TodokoroYasunari UmemotoHirotoshi TanakaHiroyuki Itoh
    • G01R31/28G01R31/30G01R31/302G01R31/305G01R31/3185H01L21/66H01L21/82H01L21/822H01L27/04
    • G01R31/305G01R31/30G01R31/318516
    • A semiconductor integrated circuit device includes: input terminals; output terminals; a group of gates which receives an input signal applied to the input terminals and outputs an output signal from the output terminals, the output signal corresponding to the state of the input signal; and an arrangement for forcibly setting the output of each gate constituting the group either at a "1" level or at a "0" level irrespective of the state of the input signal and the state of an input signal to each gate. The arrangement for forcibly setting the output is an arrangement for changing the potential of a semiconductor substrate in which each gate is formed. This arrangement for changing potential includes an impurity doped region formed in the semiconductor substrate, the impurity doped region surrounding at least a transistor constituting each gate so as to apply a potential to the transistor, and a terminal for applying the potential to the impurity doped region. The semiconductor integrated circuit device according to another aspect includes an observation pad formed on a portion of at least one of the output and input areas of each gate, the observation pad being exposed without being covered with an insulator layer and the potential of the observation pad being observed as a difference of shading by using an electron or ion beam tester. A fault of each gate can be detected in accordance with a shading image of the observation pads.
    • 半导体集成电路装置包括:输入端子; 输出端子; 一组门,其接收施加到输入端的输入信号,并输出来自输出端的输出信号,输出信号对应于输入信号的状态; 以及用于强制地将构成组的每个门的输出强制设置为“1”电平或“0”电平的装置,而与输入信号的状态和每个门的输入信号的状态无关。 用于强制设置输出的布置是用于改变其中形成每个栅极的半导体衬底的电位的布置。 这种用于变化电位的布置包括形成在半导体衬底中的杂质掺杂区域,至少构成每个栅极的晶体管的杂质掺杂区域,以便向晶体管施加电位,以及将电位施加到杂质掺杂区域 。 根据另一方面的半导体集成电路器件包括形成在每个栅极的输出和输入区域中的至少一个的一部分上的观察垫,观察垫被暴露而不被绝缘体层覆盖,并且观察垫的电位 通过使用电子或离子束测试仪被观察为阴影的差异。 可以根据观察垫的阴影图像来检测每个门的故障。