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1. 发明授权

US09089007B2 Method and apparatus for substrate support with multi-zone heating 有权
标题翻译：用于多区域加热的基板支撑的方法和装置
公开(公告)号：US09089007B2
公开(公告)日：2015-07-21
申请号：US13766885
申请日：2013-02-14
申请人： Yao-Hung Yang , Jeonghoon Oh , Frank F. Hooshdaran , Tom K. Cho , Tao Hou
发明人： Yao-Hung Yang , Jeonghoon Oh , Frank F. Hooshdaran , Tom K. Cho , Tao Hou
IPC分类号： H05B3/10 , H05B3/12 , H01L21/67 , H05B1/02 , F26B19/00
CPC分类号： H05B3/12 , H01L21/67103 , H01L21/67248 , H05B1/0233
摘要： Methods and substrate processing systems are provided for controlling substrate heating efficiency and generating a desired temperature profile on the surface of a substrate when the substrate is disposed on a substrate support surface of a substrate support assembly. The substrate support assembly is provided with minimum software control and hardware requirement and includes a heating element comprised of multiple heating elements sections. The heating element is connected to a power source for adjusting the temperature outputs of the multiple heating element sections and providing adjustable multi-heating zones and desired temperature distribution over the substrate support surface of the substrate support assembly within a process chamber.
摘要翻译：提供了方法和衬底处理系统，用于当衬底设置在衬底支撑组件的衬底支撑表面上时，用于控制衬底加热效率并在衬底的表面上产生期望的温度分布。基板支撑组件具有最小的软件控制和硬件要求，并且包括由多个加热元件部分组成的加热元件。加热元件连接到用于调节多个加热元件部分的温度输出的电源并且在处理室内的基板支撑组件的基板支撑表面上提供可调节的多加热区域和期望的温度分布。

2. 发明申请

US20130284721A1 METHOD AND APPARATUS FOR SUBSTRATE SUPPORT WITH MULTI-ZONE HEATING 有权
标题翻译：用于多层加热的基板支撑的方法和装置
公开(公告)号：US20130284721A1
公开(公告)日：2013-10-31
申请号：US13766885
申请日：2013-02-14
申请人： Yao-Hung Yang , Jeonghoon Oh , Frank F. Hooshdaran , Tom K. Cho , Tao Hou
发明人： Yao-Hung Yang , Jeonghoon Oh , Frank F. Hooshdaran , Tom K. Cho , Tao Hou
IPC分类号： H05B3/12
CPC分类号： H05B3/12 , H01L21/67103 , H01L21/67248 , H05B1/0233
摘要： Methods and substrate processing systems are provided for controlling substrate heating efficiency and generating a desired temperature profile on the surface of a substrate when the substrate is disposed on a substrate support surface of a substrate support assembly. The substrate support assembly is provided with minimum software control and hardware requirement and includes a heating element comprised of multiple heating elements sections. The heating element is connected to a power source for adjusting the temperature outputs of the multiple heating element sections and providing adjustable multi-heating zones and desired temperature distribution over the substrate support surface of the substrate support assembly within a process chamber.
摘要翻译：提供了方法和衬底处理系统，用于当衬底设置在衬底支撑组件的衬底支撑表面上时，用于控制衬底加热效率并在衬底的表面上产生期望的温度分布。基板支撑组件具有最小的软件控制和硬件要求，并且包括由多个加热元件部分组成的加热元件。加热元件连接到用于调节多个加热元件部分的温度输出的电源并且在处理室内的基板支撑组件的基板支撑表面上提供可调节的多加热区域和期望的温度分布。

3. 发明授权

US09766022B2 Gas heater 有权
公开(公告)号：US09766022B2
公开(公告)日：2017-09-19
申请号：US13667314
申请日：2012-11-02
申请人： Tao Hou , Son T. Nguyen , Kenric T. Choi , Anh N. Nguyen
发明人： Tao Hou , Son T. Nguyen , Kenric T. Choi , Anh N. Nguyen
IPC分类号： H05B1/00 , F28F7/02
CPC分类号： F28F7/02
摘要： A method and apparatus for heating or cooling a fluid is provided. In one embodiment, a heat exchanger is provided. The heat exchanger includes a first subassembly comprising an insert. The insert comprises a body having a blind passage formed axially in the body, a plurality of nozzles formed therein, and a first plurality of heat exchange elements disposed within the body. The heat exchanger also comprises a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles are disposed radially between the blind passage and the thin gap.

4. 发明申请

US20130058637A1 GAS HEATER 有权
标题翻译：气体加热器
公开(公告)号：US20130058637A1
公开(公告)日：2013-03-07
申请号：US13667314
申请日：2012-11-02
申请人： Tao Hou , Son T. Nguyen , Kenric T. Choi , Anh N. Nguyen
发明人： Tao Hou , Son T. Nguyen , Kenric T. Choi , Anh N. Nguyen
IPC分类号： F24H3/04 , H05B1/02
CPC分类号： F28F7/02
摘要： A method and apparatus for heating or cooling a fluid is provided. In one embodiment, a heat exchanger is provided. The heat exchanger includes a first subassembly comprising an insert. The insert comprises a body having a blind passage formed axially in the body, a plurality of nozzles formed therein, and a first plurality of heat exchange elements disposed within the body. The heat exchanger also comprises a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles are disposed radially between the blind passage and the thin gap.
摘要翻译：提供了用于加热或冷却流体的方法和装置。在一个实施例中，提供了热交换器。热交换器包括包括插入件的第一子组件。插入件包括具有在主体中轴向形成的盲通道的主体，形成在其中的多个喷嘴，以及设置在主体内的第一多个热交换元件。热交换器还包括第二子组件，其包括套筒和设置在套筒内的第二多个热交换元件，其中插入件可密封地接合在套筒内，并且插入件和套筒协同地限定薄间隙，并且其中多个喷嘴径向设置在盲通道和薄间隙之间。

5. 外观设计

USD676344S1 Banknote counting machine 有权
标题翻译：钞票计数机
公开(公告)号：USD676344S1
公开(公告)日：2013-02-19
申请号：US29433506
申请日：2012-10-01
申请人： Chih-Kun Shih , Wan-Cheng Luo , Xiao-Mao Xie , Wei Xu , Si-He Hu , Tao Hou
设计人： Chih-Kun Shih , Wan-Cheng Luo , Xiao-Mao Xie , Wei Xu , Si-He Hu , Tao Hou

6. 发明申请

US20090283252A1 GAS HEATER 有权
标题翻译：气体加热器
公开(公告)号：US20090283252A1
公开(公告)日：2009-11-19
申请号：US12122616
申请日：2008-05-16
申请人： Tao Hou , Son T. Nguyen , Kenric Choi , Anh N. Nguyen
发明人： Tao Hou , Son T. Nguyen , Kenric Choi , Anh N. Nguyen
IPC分类号： G05D23/00 , F28F1/10 , H05B1/00 , H05B1/02
CPC分类号： F28F7/02
摘要： A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit.
摘要翻译：一种用于加热或冷却流体的方法和装置。连接到多个分配喷嘴的入口导管，与设备外围的通道流体连通。插入件和套筒协同地限定与流体流体连通的薄间隙，流体流过该间隙。在薄间隙附近的热插入物通过出口管道流出或流出流体。

7. 发明申请

US20110205191A1 ELECTROMAGNETIC SENSING DEVICE HAVING MULTI-POINT TOUCH FUNCTION 审中-公开
标题翻译：具有多点触控功能的电磁感应装置
公开(公告)号：US20110205191A1
公开(公告)日：2011-08-25
申请号：US13120815
申请日：2009-09-08
申请人： Tao Hou , Honggang Wang , Jie Wang , Hang Yin
发明人： Tao Hou , Honggang Wang , Jie Wang , Hang Yin
IPC分类号： G06F3/033
CPC分类号： G06F3/046 , G06F3/03545 , G06F2203/04808
摘要： An electromagnetic sensing device having a multi-point touch function comprises electromagnetic pens (101) for inputting graphics and an electromagnetic sensing board for detecting trace information of the inputted graphics. Each of the electromagnetic pens (101) has a resonance circuit provided therein, and the electromagnetic sensing board has an electromagnetic wave transmitter (102), an electromagnetic wave receiver (105), a controller (109) and an electric wave frequency switching unit (103) provided therein. The electric wave frequency switching unit (103) of the electromagnetic sensing board receives an instruction from the controller (109) to control the electromagnetic wave transmitter (102) to transmit electromagnetic waves at different frequencies, and the electromagnetic pens (101) generate electromagnetic resonance waves at respective resonance frequencies. The electromagnetic wave receiver (105) receives the electromagnetic resonance waves at the respective resonance frequencies so that the trace information of the electromagnetic pens (101) having the respective resonance frequencies is detected. With this electromagnetic sensing device, it is possible to achieve a wireless and passive electromagnetic sensing device having the multi-point touch function.
摘要翻译：具有多点触摸功能的电磁感测装置包括用于输入图形的电磁笔（101）和用于检测输入图形的跟踪信息的电磁感测板。每个电磁笔（101）具有设置在其中的谐振电路，电磁感测板具有电磁波发射器（102），电磁波接收器（105），控制器（109）和电波频率切换单元 103）。电磁感测板的电波频率切换单元（103）从控制器（109）接收控制电磁波发射器（102）发送不同频率的电磁波的指令，电磁笔（101）产生电磁谐振波在各自的共振频率。电磁波接收器（105）以相应的谐振频率接收电磁谐振波，从而检测具有相应谐振频率的电磁笔（101）的迹线信息。利用该电磁感测装置，可以实现具有多点触摸功能的无线和被动电磁感测装置。

8. 发明授权

US08309874B2 Gas heater 有权
标题翻译：燃气加热器
公开(公告)号：US08309874B2
公开(公告)日：2012-11-13
申请号：US12122616
申请日：2008-05-16
申请人： Tao Hou , Son T. Nguyen , Kenric Choi , Anh N. Nguyen
发明人： Tao Hou , Son T. Nguyen , Kenric Choi , Anh N. Nguyen
IPC分类号： H05B1/00
CPC分类号： F28F7/02
摘要： A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit.
摘要翻译：一种用于加热或冷却流体的方法和装置。连接到多个分配喷嘴的入口导管，与设备外围的通道流体连通。插入件和套筒协同地限定与流体流体连通的薄间隙，流体流过该间隙。在薄间隙附近的热插入物通过出口管道流出或流出流体。

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