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    • 3. 发明授权
    • Cadmium-free junction fabrication process for CuInSe.sub.2 thin film
solar cells
    • CuInSe2薄膜太阳能电池的无镉结制造工艺
    • US5948176A
    • 1999-09-07
    • US939844
    • 1997-09-29
    • Kannan V. RamanathanMiguel A. ContrerasRaghu N. BhattacharyaJames KeaneRommel Noufi
    • Kannan V. RamanathanMiguel A. ContrerasRaghu N. BhattacharyaJames KeaneRommel Noufi
    • H01L31/032H01L31/0336H01L31/00
    • H01L31/0749H01L31/0323Y02E10/541Y02P70/521
    • The present invention provides an economical, simple, dry and controllable semiconductor layer junction forming process to make cadmium free high efficiency photovoltaic cells having a first layer comprised primarily of copper indium diselenide having a thin doped copper indium diselenide n-type region, generated by thermal diffusion with a group II(b) element such as zinc, and a halide, such as chlorine, and a second layer comprised of a conventional zinc oxide bilayer. A photovoltaic device according the present invention includes a first thin film layer of semiconductor material formed primarily from copper indium diselenide. Doping of the copper indium diselenide with zinc chloride is accomplished using either a zinc chloride solution or a solid zinc chloride material. Thermal diffusion of zinc chloride into the copper indium diselenide upper region creates the thin n-type copper indium diselenide surface. A second thin film layer of semiconductor material comprising zinc oxide is then applied in two layers. The first layer comprises a thin layer of high resistivity zinc oxide. The second relatively thick layer of zinc oxide is doped to exhibit low resistivity.
    • 本发明提供了一种经济,简单,干燥和可控制的半导体层结形成工艺,其制造不含镉的高效光伏电池,其具有主要由铜铟二硒化物组成的第一层,其具有通过热产生的薄掺杂铜铟二硒化物n型区域 与II族(b)元素如锌的扩散,以及卤化物如氯,以及由常规的氧化锌双层组成的第二层。 根据本发明的光电器件包括主要由铜铟二硒化物形成的半导体材料的第一薄膜层。 使用氯化锌溶液或固体氯化锌材料,可以用氯化锌掺杂二硒化铜铟。 氯化锌向铜铟锡上部区域的热扩散产生薄的n型铜铟二硒化物表面。 然后将包含氧化锌的半导体材料的第二薄膜层分两层施加。 第一层包括一层高电阻率的氧化锌。 第二较厚的氧化锌层被掺杂以显示低电阻率。
    • 8. 发明授权
    • Recrystallization method to selenization of thin-film Cu(In,Ga)Se.sub.2
for semiconductor device applications
    • 用于半导体器件应用的薄膜Cu(In,Ga)Se2的硒化的重结晶方法
    • US5436204A
    • 1995-07-25
    • US293826
    • 1994-08-22
    • David S. AlbinJeffrey J. CarapellaJohn R. TuttleMiguel A. ContrerasAndrew M. GaborRommel NoufiAndrew L. Tennant
    • David S. AlbinJeffrey J. CarapellaJohn R. TuttleMiguel A. ContrerasAndrew M. GaborRommel NoufiAndrew L. Tennant
    • C01B19/00C01G3/00C23C14/34C23C30/00H01L21/20H01L21/203H01L21/205H01L21/263H01L21/363H01L31/0296H01L31/032H01L31/04H01L21/302
    • H01L31/0322Y02E10/541Y02P70/521
    • A process for fabricating slightly Cu-poor thin-films of Cu(In,Ga)Se.sub.2 on a substrate for semiconductor device applications includes the steps of forming initially a slightly Cu-rich, phase separated, mixture of Cu(In,Ga)Se.sub.2 :Cu.sub.x Se on the substrate in solid form followed by exposure of the Cu(In,Ga)Se.sub.2 :Cu.sub.x Se solid mixture to an overpressure of Se vapor and (In,Ga) vapor for deposition on the Cu(In,Ga)Se.sub.2 :Cu.sub.x Se solid mixture while simultaneously increasing the temperature of the solid mixture toward a recrystallization temperature (about 550.degree. C.) at which Cu(In,Ga)Se.sub.2 is solid and Cu.sub.x Se is liquid. The (In,Ga) flux is terminated while the Se overpressure flux and the recrystallization temperature are maintained to recrystallize the Cu.sub.x Se with the (In, Ga) that was deposited during the temperature transition and with the Se vapor to form the thin-film of slightly Cu-poor Cu.sub.x (In,Ga).sub.y Se.sub.z. The initial Cu-rich, phase separated large grain mixture of Cu(In,Ga)Se.sub.2 :Cu.sub.x Se can be made by sequentially depositing or co-depositing the metal precursors, Cu and (In, Ga), on the substrate at room temperature, ramping up the thin-film temperature in the presence of Se overpressure to a moderate anneal temperature (about 450.degree. C.) and holding that temperature and the Se overpressure for an annealing period. A nonselenizing, low temperature anneal at about 100.degree. C. can also be used to homogenize the precursors on the substrates before the selenizing, moderate temperature anneal.
    • 在用于半导体器件的衬底上制造Cu(In,Ga)Se2的略微不合铜的薄膜的工艺包括以下步骤:首先形成Cu(In,Ga)Se 2的稍微富Cu,相分离的混合物 :在固体形式的衬底上,然后将Cu(In,Ga)Se 2:CuxSe固体混合物暴露于Se蒸气和(In,Ga)蒸气的过压,沉积在Cu(In,Ga)Se 2:CuxSe上 固体混合物同时将固体混合物的温度升高至重结晶温度(约550℃),其中Cu(In,Ga)Se 2为固体,CuxSe为液体。 (In,Ga)通量终止,同时保持Se超压通量和再结晶温度,以在温度转变期间沉积的(In,Ga)和Se蒸气重结晶CuxSe,形成薄膜 轻微Cu-Cux(In,Ga)ySez。 Cu(In,Ga)Se2:CuxSe的初始富Cu相分离的大晶粒混合物可以通过在室温下依次沉积或共沉积金属前体Cu和(In,Ga) 在存在Se超压的情况下将薄膜温度升高到适度退火温度(约450℃),并保持该温度和Se超压退火时间。 在硒化,中等温度退火之前,也可以在约100℃下进行非硒化低温退火,以使基板上的前体均匀化。