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    • 7. 发明授权
    • Row electrode anodization
    • 行电极阳极氧化
    • US06433473B1
    • 2002-08-13
    • US09258021
    • 1999-02-25
    • Kishore K. ChakravortyFariborz NadiChristopher J. SpindtRonald L. HansenColin D. Stanners
    • Kishore K. ChakravortyFariborz NadiChristopher J. SpindtRonald L. HansenColin D. Stanners
    • H01J162
    • H01J9/148H01J3/022H01J29/02
    • A structure and method for forming an column electrode for a field emission display device wherein the column electrode is disposed beneath the field emitters and the row electrode. In one embodiment, the present invention comprises depositing a resistor layer over portions of a column electrode. Next, an inter-metal dielectric layer is deposited over the column electrode. In the present embodiment, the inter-metal dielectric layer is deposited over portions of the resistor layer and over pad areas of the column electrode. After the deposition of the inter-metal dielectric layer, the column electrode is subjected to an anodization process such that exposed regions of the column electrode are anodized. In so doing, the present invention provides a column electrode structure which is resistant to column to row electrode shorts and which is protected from subsequent processing steps.
    • 一种用于形成用于场发射显示装置的列电极的结构和方法,其中列电极设置在场发射极和行电极之下。 在一个实施例中,本发明包括在列电极的部分上沉积电阻层。 接下来,在列电极上沉积金属间介电层。 在本实施例中,金属间介电层沉积在列电极的电阻层和焊盘区域的部分上。 在沉积金属间电介质层之后,对柱电极进行阳极氧化处理,使得阳极氧化柱电极的露出区域。 在这样做时,本发明提供了一种对柱对电极短路有抵抗力的列电极结构,并且不受后续处理步骤的保护。