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    • 3. 发明授权
    • Superconductive-channel electric field-effect drive
    • 超导通道电场效应驱动
    • US5528052A
    • 1996-06-18
    • US171888
    • 1993-12-22
    • Johannes G. BednorzJochen D. MannhartCarl A. MuellerDarrell G. Schlom
    • Johannes G. BednorzJochen D. MannhartCarl A. MuellerDarrell G. Schlom
    • H01L39/14H01L29/06B05D5/12H01B12/00H01L39/22
    • H01L39/146
    • Proposed is a method for operating a field-effect device comprised of a superconducting current channel having source and drain electrodes connected thereto, said superconducting current channel being separated from a gate electrode by an insulating layer, where the resistance of said current channel is controlled by varying the critical current of the superconducting material through the application of an electrical field across the superconducting current channel, which in turn changes the density of the mobile charge carriers in the superconducting material. Taught is also an inverted MISFET device for performing that method, the device being characterized in that on an electrically conductive substrate an insulating layer is provided which in turn carries a layer consisting of a superconducting material, and that a gate electrode is attached to said substrate, and source and drain electrodes are electrically connected to said superconductor layer. Advantageously, between the substrate and the superconducting layer, a metallic passivation layer may be provided.
    • 提出了一种用于操作场效应器件的方法,该场效应器件包括具有与其连接的源电极和漏电极的超导电流通道,所述超导电流通道由绝缘层与栅电极分离,其中所述电流通道的电阻由 通过在超导电流通道上施加电场来改变超导材料的临界电流,这继而改变超导材料中的可移动电荷载流子的密度。 教授也是用于执行该方法的反向MISFET器件,其特征在于,在导电衬底上提供绝缘层,该绝缘层又带有由超导材料组成的层,并且栅电极附着到所述衬底 并且源电极和漏电极电连接到所述超导体层。 有利地,在衬底和超导层之间可以提供金属钝化层。
    • 7. 发明授权
    • Epitaxial template and barrier for the integration of functional thin film metal oxide heterostructures on silicon
    • 外延模板和屏障,用于在硅上整合功能性薄膜金属氧化物异质结构
    • US06642539B2
    • 2003-11-04
    • US10231401
    • 2002-08-29
    • Ramamoorthy RameshDarrell G. Schlom
    • Ramamoorthy RameshDarrell G. Schlom
    • H01L2912
    • H01L27/11502G11C11/22H01L21/28568H01L27/11507H01L28/55H01L28/75
    • A ferroelectric memory cell formed on a monocrystalline silicon underlayer, either an epitaxial silicon contact plug to a transistor source or drain or silicon gate region for which the memory cell forms a non-volatile gate. A conductive barrier layer of doped strontium titanate, whether cationically substituted, such by lanthanum or niobium for strontium and titanium respectively, or anionically deficient, is epitaxially grown over the silicon, and a lower metal oxide electrode layer, a ferroelectric layer and an upper metal oxide electrode layer are epitaxially grown on the barrier layer. No platinum barrier is needed beneath the ferroelectric stack. The invention can be applied to many other functional oxide materials of the Ruddlesden-Popper and devices including micromachined electromechanical (MEM) devices and ferromagnetic tri-layer devices.
    • 在单晶硅衬底上形成的铁电存储单元,即存储单元形成非易失性栅极的硅晶体管源极或漏极或硅栅极区域的外延硅接触插塞。 掺杂的钛酸锶的导电阻挡层,无论是阳离子取代的,如分别用于锶和钛的镧或铌或阴离子缺陷的导电阻挡层在硅上外延生长,并且下部金属氧化物电极层,铁电层和上部金属 氧化物电极层在阻挡层上外延生长。 铁电堆下方不需要铂金屏障。 本发明可以应用于Ruddlesden-Popper的许多其它功能氧化物材料和包括微加工机电(MEM)器件和铁磁性三层器件的器件。