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    • 3. 发明授权
    • Inline transfer system and method
    • 在线传输系统和方法
    • US07393159B2
    • 2008-07-01
    • US10863064
    • 2004-06-07
    • Won-Kie ChangGi-Cheon YoonGeun-Soo An
    • Won-Kie ChangGi-Cheon YoonGeun-Soo An
    • B65G51/00
    • B65G49/065B65G2207/06B65G2249/02B65G2249/04H01L21/67784
    • An inline transfer system and method are provided for the secure transport and efficient processing of substrates such as glass substrates or semiconductor devices. A rotary conveyor is provided that includes a plurality of air nozzles which inject air to move a substrate above the plurality of air nozzles without the plurality of air nozzles making contact with the substrate. At least two independent processing units are operably coupled to the rotary conveyor. Advantageously, because a plurality of substrates may be processed in parallel, greater efficiency and flexibility are provided. Because the substrate can be moved without physical contact between the structure of the air nozzles and the substrate, the transfer is secure, clean, and efficient.
    • 提供了一种在线传输系统和方法,用于安全传输和有效处理诸如玻璃基板或半导体器件的基板。 提供一种旋转输送机,其包括多个空气喷嘴,其喷射空气以在多个空气喷嘴上方移动基板,而不会使多个空气喷嘴与基板接触。 至少两个独立的处理单元可操作地联接到旋转输送机。 有利地,由于可以并行处理多个基板,因此提供更高的效率和灵活性。 因为基板可以在空气喷嘴的结构和基板之间没有物理接触的情况下移动,所以转印是牢固,清洁和高效的。