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1. 发明授权

US06740910B2 Field-effect transistor, circuit configuration and method of fabricating a field-effect transistor 失效
标题翻译：场效应晶体管，电路结构和制造场效晶体管的方法
公开(公告)号：US06740910B2
公开(公告)日：2004-05-25
申请号：US10352830
申请日：2003-01-28
申请人： Wolfgang Roesner , Richard Johannes Luyken , Johannes Kretz
发明人： Wolfgang Roesner , Richard Johannes Luyken , Johannes Kretz
IPC分类号： H01L2976
CPC分类号： H01L29/775 , B82Y10/00 , H01L29/0665 , H01L29/0673 , H01L29/0676 , H01L29/66439 , H01L29/78642 , H01L51/0048 , H01L51/0052 , H01L51/0512 , Y10S977/938
摘要： The gate region of a field effect transistor comprises at least one through hole wherein a nanoelement is provided which is electrically coupled to the source and the drain. The nanoelement may have the conductance thereof controlled by means of the gate, such that the nanoelement forms a channel region of the field effect transistor.
摘要翻译：场效应晶体管的栅极区域包括至少一个通孔，其中提供了与源极和漏极电耦合的纳米元件。纳米元件可以通过栅极控制其电导，使得纳米元件形成场效应晶体管的沟道区。

2. 发明授权

US07265376B2 Non-volatile memory cell, memory cell arrangement and method for production of a non-volatile memory cell 有权
标题翻译：非易失性存储单元，存储单元布置和用于生产非易失性存储单元的方法
公开(公告)号：US07265376B2
公开(公告)日：2007-09-04
申请号：US10533215
申请日：2003-10-29
申请人： Andrew Graham , Franz Hofmann , Wolfgang Hönlein , Johannes Kretz , Franz Kreupl , Erhard Landgraf , Richard Johannes Luyken , Wolfgang Rösner , Thomas Schulz , Michael Specht
发明人： Andrew Graham , Franz Hofmann , Wolfgang Hönlein , Johannes Kretz , Franz Kreupl , Erhard Landgraf , Richard Johannes Luyken , Wolfgang Rösner , Thomas Schulz , Michael Specht
IPC分类号： H01L35/24 , H01L51/00 , H01L29/788 , H01L21/336
CPC分类号： H01L29/7888 , B82Y10/00 , G11C13/025 , G11C2213/17 , H01L21/28282 , H01L21/84 , H01L27/115 , H01L27/11568 , H01L27/1203 , H01L27/28 , H01L29/66833 , H01L29/792 , H01L29/7926 , H01L51/0048 , H01L51/0052 , H01L51/057
摘要： A nonvolatile memory cell, memory cell arrangement, and method for production of a nonvolatile memory cell is disclosed. The nonvolatile memory cell includes a vertical field-effect transistor (FET). The FET contains a nanoelement arranged as a channel region and an electrically insulating layer. The electrically insulating layer at least partially surrounds the nanoelement and acts as a charge storage layer and as a gate-insulating layer. The electrically insulating layer is arranged such that electrical charge carriers may be selectively introduced into or removed from the electrically insulating layer and the electrical conductivity characteristics of the nanoelement may be influenced by the electrical charge carriers introduced into the electrically insulating layer.
摘要翻译：公开了一种用于制造非易失性存储单元的非易失性存储单元，存储单元布置和方法。非易失性存储单元包括垂直场效应晶体管（FET）。 FET包含布置为沟道区和电绝缘层的纳米元件。电绝缘层至少部分地包围纳米元件并充当电荷存储层和作为栅极绝缘层。电绝缘层被布置成使得电荷载体可以被选择性地引入到电绝缘层中或从电绝缘层移除，并且纳米元件的导电特性可能受到引入电绝缘层中的电荷载流子的影响。

3. 发明授权

US07189988B2 Molecular electronics arrangement and method for producing a molecular electronics arrangement 有权
标题翻译：分子电子学布置和分子电子学布置方法
公开(公告)号：US07189988B2
公开(公告)日：2007-03-13
申请号：US10482719
申请日：2002-07-01
申请人： Jessica Hartwich , Johannes Kretz , Richard Johannes Luyken , Wolfgang Rösner
发明人： Jessica Hartwich , Johannes Kretz , Richard Johannes Luyken , Wolfgang Rösner
IPC分类号： H01L35/24
CPC分类号： G11C13/0019 , B82Y10/00 , G11C13/0014 , H01L51/0048 , H01L51/005 , H01L51/0052 , H01L51/0093 , H01L51/0595
摘要： The invention relates to a molecular electronics arrangement comprising a substrate, at least one first strip conductor having a surface and being arranged in or on the substrate, a spacer which is arranged on the surface of the at least one first strip conductor and which partially covers the surface of the at least one first strip conductor, and at least one second strip conductor which is arranged on the spacer and comprises a surface which faces the surface of the at least one first strip conductor in a plane manner. The spacer partially covers the surface of the at least one second strip conductor, and defines a pre-determined distance between the at least one first strip conductor and the at least one second strip conductor. The inventive molecular electronics arrangement also comprises molecular electronics molecules which are arranged between a free region of the surface of the at least one first strip conductor and a free region of the surface of the at least one second strip conductor, the length of said molecules being essentially equal to the distance between the at least one first strip conductor and the at least one second strip conductor. The invention also relates to a method for producing a molecular electronics arrangement.
摘要翻译：本发明涉及一种分子电子装置，其包括基底，至少一个具有表面并且布置在基底中或基底上的第一条状导体，隔离物，其被布置在至少一个第一条状导体的表面上，并且部分覆盖所述至少一个第一带状导体的表面和布置在所述间隔件上并包括以平面方式面对所述至少一个第一带状导体的表面的表面的至少一个第二条状导体。所述间隔件部分地覆盖所述至少一个第二条状导体的表面，并且限定所述至少一个第一条状导体和所述至少一个第二条状导体之间的预定距离。本发明的分子电子学装置还包括分子电子学分子，其分布在至少一个第一带状导体的表面的自由区域和至少一个第二条状导体的表面的自由区域之间，所述分子的长度为基本上等于所述至少一个第一带状导体和所述至少一个第二带状导体之间的距离。本发明还涉及生产分子电子装置的方法。

4. 发明授权

US07265424B2 Fin Field-effect transistor and method for producing a fin field effect-transistor 有权
标题翻译：翅片场效应晶体管及其制造方法
公开(公告)号：US07265424B2
公开(公告)日：2007-09-04
申请号：US10768971
申请日：2004-01-30
申请人： Franz Hofmann , Johannes Kretz , Wolfgang Roesner , Thomas Schulz
发明人： Franz Hofmann , Johannes Kretz , Wolfgang Roesner , Thomas Schulz
IPC分类号： H01L29/76
CPC分类号： H01L29/785 , H01L29/66795
摘要： A fin field effect transistor having a substrate, a fin structure above the substrate, as well as a drain region and a source region outside the fin structure above the substrate. The fin structure serves as a channel between the source region and the drain region. The source and drain regions are formed once the gate has been produced.
摘要翻译：具有衬底的翅片场效应晶体管，衬底上方的鳍结构，以及衬底上方的鳍状结构之外的漏极区域和源极区域。鳍结构用作源极区域和漏极区域之间的沟道。一旦栅极生产就形成源区和漏区。

5. 发明申请

US20050276093A1 Memory cell, memory cell arrangement, patterning arrangement, and method for fabricating a memory cell 审中-公开
标题翻译：存储单元，存储单元布置，图案化布置以及用于制造存储单元的方法
公开(公告)号：US20050276093A1
公开(公告)日：2005-12-15
申请号：US11119531
申请日：2005-04-29
申请人： Andrew Graham , Franz Hofmann , Wolfgang Honlein , Johannes Kretz , Franz Kreupl , Erhard Landgraf , Richard Luyken , Wolfgang Roesner , Thomas Schulz , Michael Specht
发明人： Andrew Graham , Franz Hofmann , Wolfgang Honlein , Johannes Kretz , Franz Kreupl , Erhard Landgraf , Richard Luyken , Wolfgang Roesner , Thomas Schulz , Michael Specht
IPC分类号： G11C13/02 , H01L21/8242 , H01L27/108 , H01L51/00 , H01L51/05 , H01L51/30 , G11C11/24
CPC分类号： G11C13/025 , B82Y10/00 , G11C13/0033 , G11C2213/16 , H01L27/10841 , H01L27/10864 , H01L27/10876 , H01L27/283 , H01L51/0048 , H01L51/0052 , H01L51/0512 , H01L51/057
摘要： A memory cell having a storage capacitor and a vertical switching transistorm, which has a semiconducting nanostructure which has grown on at least part of the storage capacitor and includes a semiconducting nanotube, a bundle of semiconducting nanotubes, or a semiconducting nanorod.
摘要翻译：具有存储电容器和垂直开关转置管的存储单元，其具有在至少部分存储电容器上生长的半导体纳米结构，并且包括半导体纳米管，半导体纳米管束或半导体纳米棒。

6. 发明申请

US20080035997A1 Fin Field-Effect Transistor and Method for Fabricating a Fin Field-Effect Transistor 审中-公开
标题翻译：翅片场效应晶体管和制造鳍场效应晶体管的方法
公开(公告)号：US20080035997A1
公开(公告)日：2008-02-14
申请号：US11833080
申请日：2007-08-02
申请人： Franz Hofmann , Johannes Kretz , Wolfgang Roesner , Thomas Schulz
发明人： Franz Hofmann , Johannes Kretz , Wolfgang Roesner , Thomas Schulz
IPC分类号： H01L29/78
CPC分类号： H01L29/785 , H01L29/66795
摘要： A fin field-effect transistor has a substrate and a fin structure above the substrate, as well as a drain region and a source region outside the fin structure above the substrate. The fin structure serves as a channel between the source region and the drain region. The source and drain regions are formed once a gate has been produced.
摘要翻译：翅片场效应晶体管具有在衬底上方的衬底和鳍结构，以及在衬底上方的鳍结构之外的漏极区域和源极区域。鳍结构用作源极区域和漏极区域之间的沟道。源极和漏极区域一旦形成栅极就形成。

7. 发明申请

US20050224888A1 Integrated circuit array 审中-公开
标题翻译：集成电路阵列
公开(公告)号：US20050224888A1
公开(公告)日：2005-10-13
申请号：US11116139
申请日：2005-04-27
申请人： Andrew Graham , Franz Hofmann , Wolfgang Honlein , Johannes Kretz , Franz Kreupl , Erhard Landgraf , Richard Luyken , Wolfgang Roesner , Thomas Schulz , Michael Specht
发明人： Andrew Graham , Franz Hofmann , Wolfgang Honlein , Johannes Kretz , Franz Kreupl , Erhard Landgraf , Richard Luyken , Wolfgang Roesner , Thomas Schulz , Michael Specht
IPC分类号： G11C13/02 , H01L29/78 , H01L51/00 , H01L51/30 , H01L29/76
CPC分类号： G11C13/025 , B82Y10/00 , G11C2213/17 , H01L27/283 , H01L51/0048 , H01L51/0052 , H01L51/0512
摘要： Integrated circuit array having field effect transistors (FETs) formed next to and/or above one another. The array has a substrate, a planarized first wiring plane with interconnects and first source/drain regions of the FETs, a planarized first insulator layer on the first wiring plane, a planarized gate region layer, which has patterned gate regions made of electrically conductive material and insulator material introduced therebetween, on the first insulated layer, a planarized second insulator layer on the gate region layer, holes formed through the second insulator layer, the gate regions, and the first insulator layer, a vertical nanoelement serving as a channel region in each of the holes, a second wiring plane with interconnects and second source/drain regions of the FETs, each nanoelement being arranged between the first and second wiring planes, and a gate insulating layer between the respective vertical nanoelement and the electrically conductive material of the gate regions.
摘要翻译：集成电路阵列具有形成在彼此之上和/或彼此之上的场效应晶体管（FET）。阵列具有衬底，具有互连的平坦化的第一布线面和FET的第一源极/漏极区，在第一布线平面上的平坦化的第一绝缘体层，平坦化的栅极区域层，其具有由导电材料制成的图案化栅极区域和介于其间的绝缘体材料，在所述第一绝缘层上，在所述栅极区域层上的平坦化的第二绝缘体层，穿过所述第二绝缘体层，所述栅极区域和所述第一绝缘体层形成的空穴，用作所述沟道区域中的沟道区域的垂直纳米元件每个孔，具有互连的第二布线面和FET的第二源极/漏极区，每个纳米元件布置在第一和第二布线平面之间，并且在相应的垂直纳米元件和导电材料之间的栅极绝缘层门区域。

8. 发明授权

US08227177B2 Method for multiple irradiation of a resist 有权
标题翻译：多次照射抗蚀剂的方法
公开(公告)号：US08227177B2
公开(公告)日：2012-07-24
申请号：US11746909
申请日：2007-05-10
申请人： Kang-Hoon Choi , Klaus Elian , Christoph Hohle , Johannes Kretz , Frank Thrum
发明人： Kang-Hoon Choi , Klaus Elian , Christoph Hohle , Johannes Kretz , Frank Thrum
IPC分类号： G03F7/20
CPC分类号： G03F7/203 , G03F7/2022 , G03F7/70466
摘要： The invention relates to a method with contrast reversal which, inter alia, opens up new areas of application for resists.
摘要翻译：本发明涉及一种具有对比度反转的方法，其特别是开辟新的抗蚀剂应用领域。

9. 发明授权

US07635867B2 Nanotube array and method for producing a nanotube array 失效
标题翻译：纳米管阵列及其制造方法
公开(公告)号：US07635867B2
公开(公告)日：2009-12-22
申请号：US10476663
申请日：2002-05-16
申请人： Andrew Graham , Franz Hofmann , Johannes Kretz , Franz Kreupl , Richard Luyken , Wolfgang Rösner
发明人： Andrew Graham , Franz Hofmann , Johannes Kretz , Franz Kreupl , Richard Luyken , Wolfgang Rösner
IPC分类号： H01L31/0312
CPC分类号： H01L51/0048 , B82Y10/00 , C01B32/05 , G01N27/127 , G11C13/025 , H01L51/0595
摘要： A nanotube array and a method for producing a nanotube array. The nanotube array has a substrate, a catalyst layer, which includes one or more subregions, on the surface of the substrate and at least one nanotube arranged on the surface of the catalyst layer, parallel to the surface of the substrate. The at least one nanotube being arranged parallel to the surface of the substrate results in a planar arrangement of at least one nanotube. Therefore, the nanotube array of the invention is suitable for coupling to conventional silicon microelectronics. Therefore, according to the invention it is possible for a nanotube array to be electronically coupled to macroscopic semiconductor electronics. Furthermore, the nanotube array according to the invention may have an electrically insulating layer between the substrate and the catalyst layer. This electrically insulating layer preferably has a topography which is such that the at least one nanotube rests on the electrically insulating layer at its end sections and is uncovered in its central section. As a result of the surface of the at least one nanotube being partly uncovered, the uncovered surface of the nanotube can be used as an active sensor surface. For example, the uncovered surface of the nanotube can come into operative contact with an atmosphere which surrounds the nanotube array. The electrical resistance of a nanotube changes significantly in the presence of certain gases. Thus because the nanotube is clear and uncovered, the nanotube array can be used in many sensor applications.
摘要翻译：纳米管阵列及其制造方法。纳米管阵列具有衬底，催化剂层，其包括在衬底的表面上的一个或多个子区域，和布置在催化剂层表面上的平行于衬底表面的至少一个纳米管。所述至少一个纳米管平行于衬底的表面布置，导致至少一个纳米管的平面布置。因此，本发明的纳米管阵列适用于与传统的硅微电子耦合。因此，根据本发明，可以将纳米管阵列电连接到宏观半导体电子器件。此外，根据本发明的纳米管阵列可以在衬底和催化剂层之间具有电绝缘层。该电绝缘层优选地具有使得至少一个纳米管在其端部部分处于电绝缘层上并且在其中心部分未被覆盖的形貌。由于至少一个纳米管的表面部分未被覆盖，纳米管的未被覆盖的表面可以用作主动传感器表面。例如，纳米管的未覆盖表面可以与围绕纳米管阵列的气氛进行操作接触。在某些气体的存在下，纳米管的电阻显着变化。因此，由于纳米管是透明和未覆盖的，所以纳米管阵列可用于许多传感器应用中。

10. 发明申请

US20060181925A1 Nonvolatile memory cell arrangement 有权
标题翻译：非易失性存储单元布置
公开(公告)号：US20060181925A1
公开(公告)日：2006-08-17
申请号：US11283572
申请日：2005-11-18
申请人： Michael Specht , Franz Hofmann , Ulrich Dorda , Johannes Kretz , Lars Dreeskornfeld
发明人： Michael Specht , Franz Hofmann , Ulrich Dorda , Johannes Kretz , Lars Dreeskornfeld
IPC分类号： G11C16/04 , G11C11/34
CPC分类号： H01L27/115 , G11C16/0466 , G11C16/0483 , H01L21/28273 , H01L21/28282 , H01L27/11521 , H01L27/11568 , H01L29/66795 , H01L29/66825 , H01L29/66833 , H01L29/785 , H01L29/7881 , H01L29/792
摘要： Memory transistors are arranged in a plurality of rows and columns. A first source/drain terminal of each memory transistor of a first column is connected to an electrically conductive conductor track in a first metallization plane, and a first source/drain terminal of each memory transistor of a second column adjacent to the first column is connected to an electrically conductive conductor track in a second metallization plane.
摘要翻译：存储晶体管被布置成多个行和列。第一列的每个存储晶体管的第一源极/漏极端子连接到第一金属化平面中的导电导体轨道，并且与第一列相邻的第二列的每个存储晶体管的第一源极/漏极端子被连接到第二金属化平面中的导电导体轨道。

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