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    • 1. 发明授权
    • Underlayer for high amplitude spin valve sensors
    • 用于高振幅自旋阀传感器的底层
    • US06954342B2
    • 2005-10-11
    • US09846707
    • 2001-04-30
    • Witold KulaAlexander Zeltser
    • Witold KulaAlexander Zeltser
    • G01R33/09G11B5/012G11B5/39G11B5/33
    • B82Y25/00B82Y10/00G01R33/093G11B5/012G11B5/3903G11B2005/3996
    • A spin valve sensor system and a method for fabricating the same are provided. Such spin valve sensor includes a pinned layer having a pinned layer magnetization. Also included is a free layer disposed adjacent the pinned layer. The free layer has a free layer magnetization perpendicular to the pinned layer magnetization in the absence of an external field. A pinning layer is disposed adjacent the pinned layer for fixing the pinned layer magnetization. Further included is an underlayer disposed adjacent the pinning layer. Such underlayer comprises NiFeX. Disposed adjacent the underlayer and the pinning layer is an upper layer. The upper layer comprises a material selected from the group consisting of NiFe and CoFe for increasing a GMR ratio associated with the SV sensor.
    • 提供一种自旋阀传感器系统及其制造方法。 这种自旋阀传感器包括具有钉扎层磁化的钉扎层。 还包括邻近被钉扎层设置的自由层。 自由层在没有外部场的情况下具有垂直于被钉扎层磁化的自由层的磁化。 钉扎层邻近被钉扎层设置以固定被钉扎层的磁化。 还包括设置在钉扎层附近的底层。 这种底层包括NiFeX。 邻近下层设置并且钉扎层是上层。 上层包括选自NiFe和CoFe的材料,用于增加与SV传感器相关联的GMR比。
    • 8. 发明授权
    • CPP read sensor having constrained current paths made of lithographically-defined conductive vias with surrounding oxidized metal sublayers and method of making same
    • CPP读取传感器具有由具有周围的氧化金属子层的光刻定义的导电通孔制成的约束电流路径及其制造方法
    • US07646570B2
    • 2010-01-12
    • US11496604
    • 2006-07-31
    • Hardayal Singh GillJordan Asher KatineAlexander Zeltser
    • Hardayal Singh GillJordan Asher KatineAlexander Zeltser
    • G11B5/39H04R31/00
    • G11B5/398B82Y25/00B82Y40/00G01R33/093G11B5/3906G11B5/3983H01F41/306H01F41/308Y10T29/49046Y10T29/49052
    • Current-perpendicular-to-plane (CPP) read sensors having constrained current paths made of lithographically-defined conductive vias with surrounding oxidized metal sublayers, and methods of making the same, are disclosed. In one illustrative example, at least part of a sensor stack structure which includes an electrically conductive spacer layer is formed. A metal (e.g. Ta) sublayer is then deposited over and adjacent the spacer layer, followed by one of an oxidation process, a nitridation process, and an oxynitridation process, to produce an insulator (e.g. TaOx) from the metal sublayer. The metal sublayer deposition and oxidation/nitridation/oxynitridation processes are repeated as necessary to form the insulator with a suitable thickness. Next, a resist structure which exposes one or more portions of the insulator is formed over the insulator. With the resist structure in place, exposed insulator materials are removed by etching to form one or more apertures through the insulator down to the spacer layer. Electrically conductive materials are subsequently deposited within the one or more apertures to form one or more lithographically-defined conductive vias of a current-constraining structure. Advantageously, the lithographically-defined conductive vias increase the current density of the read sensor in the region of the sensing layers to thereby simultaneously increase its resistance and magnetoresistance. With use of the process of oxidation, nitridation, or oxynitridation on each metal sublayer, degradation of the spacer layer is reduced or eliminated such that the desirable soft magnetics of the sensing layers in the read sensor are maintained.
    • 公开了具有由具有周围氧化金属子层的光刻定义的导电通孔制成的约束电流路径的电流垂直平面(CPP)读取传感器及其制造方法。 在一个说明性示例中,形成包括导电间隔层的传感器堆叠结构的至少一部分。 然后将金属(例如Ta)子层沉积在间隔层上并与其相邻,随后是氧化工艺,氮化工艺和氧氮化工艺中的一种,以从金属子层产生绝缘体(例如TaO x)。 根据需要重复金属亚层沉积和氧化/氮化/氧氮化处理以形成具有合适厚度的绝缘体。 接下来,在绝缘体上形成露出绝缘体的一个或多个部分的抗蚀剂结构。 在抗蚀剂结构就位的情况下,通过蚀刻去除暴露的绝缘体材料,以形成穿过绝缘体的一个或多个孔向下到间隔层。 导电材料随后沉积在一个或多个孔内以形成电流约束结构的一个或多个光刻定义的导电通孔。 有利地,光刻定义的导电通孔增加读取传感器在感测层的区域中的电流密度,从而同时增加其电阻和磁阻。 通过使用在每个金属子层上的氧化,氮化或氧氮化的过程,间隔层的劣化被减少或消除,使得保持读取传感器中感测层的期望的软磁性。
    • 10. 发明申请
    • Magnetic head spin valve structure with CoFeCu magnetic layer and ZnOx/TaOx cap layer
    • 磁头自旋阀结构采用CoFeCu磁性层和ZnOx / TaOx帽层
    • US20060061917A1
    • 2006-03-23
    • US10945687
    • 2004-09-21
    • Hardayal GillAlexander Zeltser
    • Hardayal GillAlexander Zeltser
    • G11B5/127G11B5/33
    • B82Y25/00B82Y10/00G01R33/093G11B5/3929G11B2005/3996
    • A magnetic head that includes a spin valve sensor of the present invention which may be a CIP or CPP device. The sensor includes a free magnetic layer that is comprised of CoFeCu. In certain embodiments the free magnetic layer may also include a sublayer of NiFe. The CoFeCu free magnetic layer preferably includes Fe in a range of 5-20 at. % and Cu in a range of 1-10 at. %. The sensor may also include a cap layer of the present invention that is comprised of ZnOx/TaOx. The CoFeCu free magnetic layer of the present invention provides improved sensor performance characteristics of reduced coercivity and generally similar GMR as compared to the prior art. Where the ZnOx/TaOx cap layer is utilized, increased GMR is obtained. Thus a magnetic head of the present invention that includes both a CoFeCu free magnetic layer and a ZnOx/TaOx cap layer demonstrates reduced coercivity and increased GMR.
    • 一种磁头,其包括可以是CIP或CPP装置的本发明的自旋阀传感器。 传感器包括由CoFeCu构成的自由磁性层。 在某些实施方案中,自由磁性层还可以包括NiFe的子层。 CoFeCu自由磁性层优选包括在5-20at的范围内的Fe。 %和Cu在1-10at的范围内。 %。 该传感器还可以包括本发明的覆盖层,其由ZnO x / TaO x x构成。 与现有技术相比,本发明的CoFeCu自由磁性层提供改进的传感器性能特性,降低了矫顽力和大体相似的GMR。 在利用ZnO x / TaO x帽盖层的情况下,获得增加的GMR。 因此,本发明的磁头包括无CoFeCu的磁性层和ZnO薄膜覆盖层表现出降低的矫顽力和增加的GMR。