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1. 发明授权

US6031241A Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications 失效
标题翻译：毛细管放电极紫外灯源用于EUV微光刻等相关应用
公开(公告)号：US6031241A
公开(公告)日：2000-02-29
申请号：US1696
申请日：1997-12-31
申请人： William T. Silfvast , Mark A. Klosner , Gregory M. Shimkaveg
发明人： William T. Silfvast , Mark A. Klosner , Gregory M. Shimkaveg
IPC分类号： H01J35/20 , G01J3/10 , G03F7/20 , H01J61/12 , H01J61/28 , H01J61/30 , H05G2/00 , G21G4/00
CPC分类号： H05G2/003 , B82Y10/00 , G01J3/10 , G03F7/70016 , G03F7/70033 , G03F7/70916 , G03F7/70983 , H01J61/12 , H01J61/28 , H01J61/30 , H05G2/005
摘要： Capillary discharge extreme ultraviolet lamp sources for EUV microlithography and other applications. The invention covers operating conditions for a pulsed capillary discharge lamp for EUVL and other applications such as resist exposure tools, microscopy, interferometry, metrology, biology and pathology. Techniques and processes are described to mitigate against capillary bore erosion, pressure pulse generation, and debris formation in capillary discharge-powered lamps operating in the EUV. Additional materials are described for constructing capillary discharge devices fore EUVL and related applications. Further, lamp designs and configurations are described for lamps using gasses and metal vapors as the radiating species.
摘要翻译：毛细管放电极紫外灯源用于EUV微光刻等应用。本发明涵盖用于EUVL的脉冲毛细管放电灯和诸如抗蚀剂曝光工具，显微镜，干涉测量，计量学，生物学和病理学的其它应用的操作条件。描述了技术和过程，以减轻在EUV中操作的毛细管放电动力灯中的毛细管孔侵蚀，压力脉冲产生和碎片形成。描述了用于在EUVL和相关应用之前构建毛细管放电装置的附加材料。此外，对于使用气体和金属蒸气作为辐射种类的灯描述了灯的设计和配置。

2. 发明申请

US20090136001A1 Pixel array arrangement for a soft x-ray source 失效
标题翻译：用于软X射线源的像素阵列布置
公开(公告)号：US20090136001A1
公开(公告)日：2009-05-28
申请号：US11986703
申请日：2007-11-26
申请人： John R. DeSalvo , Carol Ann Gamlen , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
发明人： John R. DeSalvo , Carol Ann Gamlen , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
IPC分类号： H01J35/18
CPC分类号： H01J35/06 , G21K5/02 , H01J35/08 , H01J35/16 , H01J2235/068
摘要： A pixel array arrangement is provided for a soft x-ray source. The arrangement includes: a window-frame structure having a plurality of channels passing therethrough, where each channel forms a pixel for the x-ray source; a cathode disposed on one side of each channel in the window-frame structure and operable to emit electrons into the channel; and an anode disposed in each cavity on an opposing side of the channel from the cathode and operable to emit x-ray radiation when electrons from the cathode impinge thereon, where the anode is configured to emit x-ray radiation at a diffused angle such that the x-ray radiation from a given pixel overlaps with x-ray radiation from adjacent pixels.
摘要翻译：为软X射线源提供像素阵列布置。该装置包括：具有穿过其中的多个通道的窗框结构，其中每个通道形成用于x射线源的像素; 阴极，其设置在所述窗框结构中的每个通道的一侧上，并且可操作以将电子发射到所述通道中; 以及阳极，其设置在与阴极相对的通道的相对侧上的每个空腔中，并且当来自阴极的电子撞击其上时可操作以发射x射线辐射，其中阳极被配置为以扩散角发射x射线辐射，使得来自给定像素的x射线辐射与来自相邻像素的x射线辐射重叠。

3. 发明申请

US20120148025A1 System and method for non-destructive decontamination of sensitive electronics using soft x-ray radiation 有权
标题翻译：使用软X射线辐射对敏感电子设备进行非破坏性去污的系统和方法
公开(公告)号：US20120148025A1
公开(公告)日：2012-06-14
申请号：US11986228
申请日：2007-11-19
申请人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
发明人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
IPC分类号： G21K5/08
CPC分类号： A61L2/08 , A61L2/082
摘要： A method is provided for decontaminating biological pathogens residing in an enclosure of an electronic device. The method includes: identifying materials used to encase the enclosure of the electronic device; tailoring x-ray radiation to penetrate the materials encasing the enclosure; and directing x-ray radiation having a diffused radiation angle towards the electronic device.
摘要翻译：提供了一种用于净化驻留在电子设备的外壳中的生物病原体的方法。该方法包括：识别用于封装电子设备外壳的材料; 定制x射线辐射以穿透包围外壳的材料; 并将具有扩散的辐射角的x射线辐射引向电子设备。

4. 发明授权

US07660392B2 Pixel array arrangement for a soft x-ray source 失效
标题翻译：用于软X射线源的像素阵列布置
公开(公告)号：US07660392B2
公开(公告)日：2010-02-09
申请号：US11986703
申请日：2007-11-26
申请人： John Richard DeSalvo , Carol Ann Gamlen , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
发明人： John Richard DeSalvo , Carol Ann Gamlen , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
IPC分类号： H01J35/08
CPC分类号： H01J35/06 , G21K5/02 , H01J35/08 , H01J35/16 , H01J2235/068
摘要： A pixel array arrangement is provided for a soft x-ray source. The arrangement includes: a window-frame structure having a plurality of channels passing therethrough, where each channel forms a pixel for the x-ray source; a cathode disposed on one side of each channel in the window-frame structure and operable to emit electrons into the channel; and an anode disposed in each cavity on an opposing side of the channel from the cathode and operable to emit x-ray radiation when electrons from the cathode impinge thereon, where the anode is configured to emit x-ray radiation at a diffused angle such that the x-ray radiation from a given pixel overlaps with x-ray radiation from adjacent pixels.
摘要翻译：为软X射线源提供像素阵列布置。该装置包括：具有穿过其中的多个通道的窗框结构，其中每个通道形成用于x射线源的像素; 阴极，其设置在所述窗框结构中的每个通道的一侧上，并且可操作以将电子发射到所述通道中; 以及阳极，其设置在与阴极相对的通道的相对侧上的每个空腔中，并且当来自阴极的电子撞击其上时可操作以发射x射线辐射，其中阳极被配置为以扩散角发射x射线辐射，使得来自给定像素的X射线辐射与来自相邻像素的x射线辐射重叠。

5. 发明授权

US08280004B2 System and method for non-destructive decontamination of sensitive electronics using soft x-ray radiation 有权
公开(公告)号：US08280004B2
公开(公告)日：2012-10-02
申请号：US11986228
申请日：2007-11-19
申请人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
发明人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
IPC分类号： G21K5/08
CPC分类号： A61L2/08 , A61L2/082
摘要： A method is provided for decontaminating biological pathogens residing in an enclosure of an electronic device. The method includes: identifying materials used to encase the enclosure of the electronic device; tailoring x-ray radiation to penetrate the materials encasing the enclosure; and directing x-ray radiation having a diffused radiation angle towards the electronic device.

6. 发明授权

US07580506B2 System and method for non-destructive decontamination of sensitive electronics using soft X-ray radiation 失效
标题翻译：使用软X射线辐射对敏感电子设备进行非破坏性去污的系统和方法
公开(公告)号：US07580506B2
公开(公告)日：2009-08-25
申请号：US11699443
申请日：2007-01-29
申请人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
发明人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
IPC分类号： G21K5/00 , H01J35/14
CPC分类号： A61L2/08 , A61L2/082
摘要： A method is provided for decontaminating biological pathogens residing in an enclosure of an electronic device. The method includes: identifying materials used to encase the enclosure of the electronic device; tailoring x-ray radiation to penetrate the materials encasing the enclosure; and directing x-ray radiation having a diffused radiation angle towards the electronic device.
摘要翻译：提供了一种用于净化驻留在电子设备的外壳中的生物病原体的方法。该方法包括：识别用于封装电子设备外壳的材料; 定制x射线辐射以穿透包围外壳的材料; 并将具有扩散的辐射角的x射线辐射引向电子设备。

7. 发明申请

US20080181364A1 System and method for non-destructive decontamination of sensitive electronics using soft X-ray radiation 失效
标题翻译：使用软X射线辐射对敏感电子设备进行非破坏性去污的系统和方法
公开(公告)号：US20080181364A1
公开(公告)日：2008-07-31
申请号：US11699443
申请日：2007-01-29
申请人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
发明人： John R. DeSalvo , Charles M. Newton , William T. Silfvast , Gregory M. Shimkaveg
IPC分类号： H01J35/14
CPC分类号： A61L2/08 , A61L2/082
摘要： A method is provided for decontaminating biological pathogens residing in an enclosure of an electronic device. The method includes: identifying materials used to encase the enclosure of the electronic device; tailoring x-ray radiation to penetrate the materials encasing the enclosure; and directing x-ray radiation having a diffused radiation angle towards the electronic device.
摘要翻译：提供了一种用于净化驻留在电子设备的外壳中的生物病原体的方法。该方法包括：识别用于封装电子设备外壳的材料; 定制x射线辐射以穿透包围外壳的材料; 并将具有扩散的辐射角的x射线辐射引向电子设备。

8. 发明授权

US4411733A SPER Device for material working 失效
标题翻译： SPER设备用于材料加工
公开(公告)号：US4411733A
公开(公告)日：1983-10-25
申请号：US389780
申请日：1982-06-18
申请人： John J. Macklin , William T. Silfvast , Obert R. Wood, II
发明人： John J. Macklin , William T. Silfvast , Obert R. Wood, II
IPC分类号： C23C14/22 , H01J37/32 , H01L21/306 , B05B5/02 , B05D3/06 , C23F1/00
CPC分类号： H01J37/32009 , C23C14/221
摘要： A segmented plasma excitation and recombination (SPER) device is employed in a deposition scheme in which the plasma generated in the gap between adjacent electrodes is formed into a beam of ions/atoms by flowing a background gas through the gap. The beam strikes a workpiece and deposits a layer of the vaporized electrode material thereon. Also described are techniques where the ions react with workpiece or the background gas to form a layer, as well as where the ions bombard the workpiece to etch away a layer.
摘要翻译：在沉积方案中采用分段等离子体激发和复合（SPER）装置，其中通过使背景气体流过间隙，在相邻电极之间的间隙中产生的等离子体形成为离子/原子束。光束撞击工件并在其上沉积蒸发的电极材料层。还描述了其中离子与工件或背景气体反应以形成层的技术，以及离子轰击工件以蚀刻掉层的位置。

9. 发明授权

US4395770A Segmented plasma excitation-recombination light source 失效
标题翻译：分段等离子体激发重组光源
公开(公告)号：US4395770A
公开(公告)日：1983-07-26
申请号：US367092
申请日：1982-04-09
申请人： William T. Silfvast , Leo H. Szeto , Obert R. Wood, II
发明人： William T. Silfvast , Leo H. Szeto , Obert R. Wood, II
IPC分类号： H01S3/03 , H01S3/097 , H01S3/093
CPC分类号： H01S3/031 , H01S3/097
摘要： An electrical signal, such as a high current pulse, is applied to a series of two or more conducting strips (101-110) installed in series in a laser cavity (150, 151) containing either a buffer gas or a vacuum. The strips are separated by small gaps. When the electrical signal is applied to the strips, plasmas (141-149) are formed in the gap regions. The plasmas are comprised of ions from the strip material. Once formed, these plasmas expand hemispherically, cool and recombine to generate radiation. The composition of the plasmas depends on the strip material, the electric field in the gaps, the gap size and the background gas type and pressure.
摘要翻译：将诸如高电流脉冲的电信号施加到串联安装在包含缓冲气体或真空的激光腔（150,151）中的一系列两个或更多个导电条（101-110）上。条带被小间隙分开。当电信号施加到条带上时，等离子体（141-149）形成在间隙区域中。等离子体由带状材料的离子组成。一旦形成，这些等离子体半球扩张，冷却并重组以产生辐射。等离子体的组成取决于条带材料，间隙中的电场，间隙尺寸和背景气体类型和压力。

10. 发明授权

US06998785B1 Liquid-jet/liquid droplet initiated plasma discharge for generating useful plasma radiation 失效
标题翻译：喷液/液滴引发等离子体放电产生有用的等离子体辐射
公开(公告)号：US06998785B1
公开(公告)日：2006-02-14
申请号：US10194387
申请日：2002-07-12
申请人： William T. Silfvast , Martin C. Richardson
发明人： William T. Silfvast , Martin C. Richardson
IPC分类号： H01J7/24 , H05B31/26
CPC分类号： H05G2/003
摘要： Plasma discharge sources for generating emissions in the VUV, EUV and X-ray spectral regions. Embodiments can include running a current through liquid jet streams within space to initiate plasma discharges. Additional embodiments can include liquid droplets within the space to initiate plasma discharges. One embodiment can form a substantially cylindrical plasma sheath. Another embodiment can form a substantially conical plasma sheath. Another embodiment can form bright spherical light emission from a cross-over of linear expanding plasmas. All the embodiments can generate light emitting plasmas within a space by applying voltage to electrodes adjacent to the space. All the radiative emissions are characteristic of the materials comprising the liquid jet streams or liquid droplets.
摘要翻译：用于在VUV，EUV和X射线光谱区域产生发射的等离子体放电源。实施例可以包括在空间内运行通过液体喷射流的电流以启动等离子体放电。另外的实施例可以包括空间内的液滴以启动等离子体放电。一个实施例可以形成基本上圆柱形的等离子体护套。另一实施例可以形成基本上圆锥形的等离子体护套。另一个实施例可以形成来自线性膨胀等离子体的交叉的亮球形光发射。所有实施例都可以通过向与该空间相邻的电极施加电压而在空间内产生发光等离子体。所有的辐射发射是包括液体射流或液滴的材料的特征。

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