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    • 3. 发明授权
    • Thin film magnetic head with self-aligned pole tips
    • 薄膜磁头带自对准极尖
    • US06487040B1
    • 2002-11-26
    • US09448459
    • 1999-11-24
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • G11B5147
    • G11B5/3116G11B5/3106G11B5/3163Y10T29/49044
    • A magnetic head includes first and second pole tips separated by a nonmagnetic gap layer. The right side walls of the first and second pole tips are vertically aligned. Similarly, the left side walls of the first and second pole tips are vertically aligned. The side fringing flux is substantially reduced resulting in a magnetic head capable of writing data tracks with well defined boundaries. The fabrication of the magnetic head begins with forming a stack of layers on a substrate. The stack of layers includes a nonmagnetic layer sandwiched between the first pole tip layer and a sacrificial layer which is preferably made of a metal. A protective layer, such as alumina, is then deposited over and around the stack of layers. After planarization and ion milling, the sacrificial layer is exposed. The sacrificial layer is then etched away leaving a volume of space in the protective layer and above the gap layer. An inductive coil with associated dielectric layers are then deposited above the first pole layer. The second pole layer is thereafter deposited over the inductive coil and into the volume of space resulting in the first and second pole tips having vertically aligned side walls.
    • 磁头包括由非磁性间隙层分开的第一和第二极尖。 第一和第二极尖的右侧壁垂直对准。 类似地,第一和第二极尖的左侧壁垂直对齐。 侧面通量大大减小,导致能够以良好界定的边界写入数据轨迹的磁头。 磁头的制造开始于在衬底上形成一叠层。 层叠层包括夹在第一极尖端层和优选由金属制成的牺牲层之间的非磁性层。 然后将保护层(例如氧化铝)沉积在层叠层上和周围。 在平坦化和离子研磨之后,牺牲层被暴露。 然后蚀刻牺牲层,留下保护层中的空间的体积并且在间隙层上方。 然后在第一极层上方沉积具有相关电介质层的感应线圈。 然后,第二极层沉积在感应线圈上并进入空间体积,从而产生第一和第二极尖具有垂直排列的侧壁。
    • 7. 发明授权
    • Magnetic head with low stack height and self-aligned pole tips
    • 磁头具有低堆叠高度和自对准极尖
    • US06504676B1
    • 2003-01-07
    • US09458975
    • 1999-12-10
    • Hugh C. HinerBilly Wayne CrueWilliam D. JensenLien-Chang WangDurga P. Ravipati
    • Hugh C. HinerBilly Wayne CrueWilliam D. JensenLien-Chang WangDurga P. Ravipati
    • G11B5187
    • G11B5/3967G11B5/31G11B5/3106G11B5/3116G11B5/313G11B5/3163Y10T29/49044
    • A magnetic head includes pole tips with aligned sidewalls and a low head profile. The aligned sidewalls are formed by depositing a stack of pole tip layers on a substrate. The stack of layers are etched through a common overlying mask. The stack of layers is covered over and around with a protective layer which is then planarized such that the stack of layers is exposed. The protective layer is etched to a predetermined thickness above the substrate, which is thinner than the thickness of the stack of layers. An inductive coil layer is deposited on the etched protective layer and covered with an overlying magnetic yoke layer which is dielectrically separated from the coil layer. The yoke layer thus formed assumes a low profile curvature due to the thin structure of the protective layer on the substrate. As a consequence, the overall stack height of the magnetic head is reduced, thereby reducing the inductance of the overlying yoke layer and further alleviating the step coverage problem of the magnetic head during fabrication.
    • 磁头包括具有对准侧壁和低头部轮廓的极尖。 排列的侧壁通过在基板上沉积极尖端层叠而形成。 通过共同的覆盖掩模蚀刻层叠层。 层叠层被保护层覆盖并围绕,然后将其平坦化,使得层的一层被暴露。 将保护层蚀刻到衬底上方的预定厚度,其比层叠层的厚度薄。 感应线圈层沉积在蚀刻的保护层上并用覆盖的磁轭层覆盖,该磁轭层与线圈层介电地分离。 由此形成的轭层由于衬底上的保护层的薄结构而呈现低曲率的曲率。 结果,磁头的整体堆叠高度减小,从而降低了上覆磁轭层的电感,并进一步减轻了制造过程中磁头的台阶覆盖问题。
    • 8. 发明授权
    • Thin film magnetic head with self-aligned pole tips
    • 薄膜磁头带自对准极尖
    • US06173486B1
    • 2001-01-16
    • US08810862
    • 1997-03-04
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • Yun-Lin HsiaoLien-Chang WangDurga I. RavipatiHugh C. HinerWilliam D. Jensen
    • G11B5127
    • G11B5/3116G11B5/3106G11B5/3163Y10T29/49044
    • A magnetic head includes first and second pole tips separated by a nonmagnetic gap layer. The right side walls of the first and second pole tips are vertically aligned. Similarly, the left side walls of the first and second pole tips are vertically aligned. The side fringing flux is substantially reduced resulting in a magnetic head capable of writing data tracks with well defined boundaries. The fabrication of the magnetic head begins with forming a stack of layers on a substrate. The stack of layers includes a nonmagnetic layer sandwiched between the first pole tip layer and a sacrificial layer which is preferably made of a metal. A protective layer, such as alumina, is then deposited over and around the stack of layers. After planarization and ion milling, the sacrificial layer is exposed. The sacrificial layer is then etched away leaving a volume of space in the protective layer and above the gap layer. An inductive coil with associated dielectric layers are then deposited above the first pole layer. The second pole layer is thereafter deposited over the inductive coil and into the volume of space resulting in the first and second pole tips having vertically aligned side walls.
    • 磁头包括由非磁性间隙层分开的第一和第二极尖。 第一和第二极尖的右侧壁垂直对准。 类似地,第一和第二极尖的左侧壁垂直对齐。 侧面通量大大减小,导致能够以良好界定的边界写入数据轨迹的磁头。 磁头的制造开始于在衬底上形成一叠层。 层叠层包括夹在第一极尖端层和优选由金属制成的牺牲层之间的非磁性层。 然后将保护层(例如氧化铝)沉积在层叠层上和周围。 在平坦化和离子研磨之后,牺牲层被暴露。 然后蚀刻牺牲层,留下保护层中的空间的体积并且在间隙层上方。 然后在第一极层上方沉积具有相关电介质层的感应线圈。 然后,第二极层沉积在感应线圈上并进入空间体积,从而产生第一和第二极尖具有垂直排列的侧壁。