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1. 发明申请

US20080035946A1 Rare earth element-doped silicon oxide film electroluminescence device 审中-公开
标题翻译：稀土元素掺杂氧化硅膜电致发光器件
公开(公告)号：US20080035946A1
公开(公告)日：2008-02-14
申请号：US11973525
申请日：2007-10-09
申请人： Wei Gao , Tingkai Li , Robert Barrowcliff , Yoshi Ono , Sheng Hsu
发明人： Wei Gao , Tingkai Li , Robert Barrowcliff , Yoshi Ono , Sheng Hsu
IPC分类号： H01L33/00 , H01L23/58
CPC分类号： H05B33/145 , H01L21/3115 , H01L31/03046 , Y02E10/544
摘要： A method is provided for forming a rare earth (RE) element-doped silicon (Si) oxide film with nanocrystalline (nc) Si particles. The method comprises: providing a first target of Si, embedded with a first rare earth element; providing a second target of Si; co-sputtering the first and second targets; forming a Si-rich Si oxide (SRSO) film on a substrate, doped with the first rare earth element; and, annealing the rare earth element-doped SRSO film. The first target is doped with a rare earth element such as erbium (Er), ytterbium (Yb), cerium (Ce), praseodymium (Pr), or terbium (Tb). The sputtering power is in the range of about 75 to 300 watts (W). Different sputtering powers are applied to the two targets. Also, deposition can be controlled by varying the effective areas of the two targets. For example, one of the targets can be partially covered.
摘要翻译：提供了一种用于形成具有纳米晶体（nc）Si颗粒的稀土（RE）元素掺杂硅（Si）氧化物膜的方法。该方法包括：提供嵌入有第一稀土元素的Si的第一靶; 提供Si的第二个目标; 共溅射第一和第二个目标; 在掺杂有第一稀土元素的衬底上形成富Si氧化硅（SRSO）膜; 并对稀土元素掺杂的SRSO膜退火。第一靶用铒（Er），镱（Yb），铈（Ce），镨（Pr）或铽（Tb）等稀土元素掺杂。溅射功率在约75至300瓦（W）的范围内。不同的溅射功率被应用于两个目标。此外，可以通过改变两个目标的有效面积来控制沉积。例如，其中一个目标可以被部分覆盖。

2. 发明申请

US20060183305A1 Sputter-deposited rare earth element-doped silicon oxide film with silicon nanocrystals for electroluminescence applications 失效
标题翻译：溅射沉积的稀土元素掺杂氧化硅膜与硅纳米晶体用于电致发光应用
公开(公告)号：US20060183305A1
公开(公告)日：2006-08-17
申请号：US11334015
申请日：2006-01-18
申请人： Wei Gao , Tingkai Li , Robert Barrowcliff , Yoshi Ono , Sheng Hsu
发明人： Wei Gao , Tingkai Li , Robert Barrowcliff , Yoshi Ono , Sheng Hsu
IPC分类号： H01L21/425
CPC分类号： H05B33/145 , H01L21/3115 , H01L31/03046 , Y02E10/544
摘要： A method is provided for forming a rare earth (RE) element-doped silicon (Si) oxide film with nanocrystalline (nc) Si particles. The method comprises: providing a first target of Si, embedded with a first rare earth element; providing a second target of Si; co-sputtering the first and second targets; forming a Si-rich Si oxide (SRSO) film on a substrate, doped with the first rare earth element; and, annealing the rare earth element-doped SRSO film. The first target is doped with a rare earth element such as erbium (Er), ytterbium (Yb), cerium (Ce), praseodymium (Pr), or terbium (Tb). The sputtering power is in the range of about 75 to 300 watts (W). Different sputtering powers are applied to the two targets. Also, deposition can be controlled by varying the effective areas of the two targets. For example, one of the targets can be partially covered.
摘要翻译：提供了一种用于形成具有纳米晶体（nc）Si颗粒的稀土（RE）元素掺杂硅（Si）氧化物膜的方法。该方法包括：提供嵌入有第一稀土元素的Si的第一靶; 提供Si的第二个目标; 共溅射第一和第二个目标; 在掺杂有第一稀土元素的衬底上形成富Si氧化硅（SRSO）膜; 并对稀土元素掺杂的SRSO膜退火。第一靶用铒（Er），镱（Yb），铈（Ce），镨（Pr）或铽（Tb）等稀土元素掺杂。溅射功率在约75至300瓦（W）的范围内。不同的溅射功率被应用于两个目标。此外，可以通过改变两个目标的有效面积来控制沉积。例如，其中一个目标可以被部分覆盖。

3. 发明申请

US20060172555A1 Method to make silicon nanoparticle from silicon rich-oxide by DC reactive sputtering for electroluminescence application 审中-公开
标题翻译：通过用于电致发光应用的DC反应溅射从富硅氧化物制造硅纳米颗粒的方法
公开(公告)号：US20060172555A1
公开(公告)日：2006-08-03
申请号：US11049594
申请日：2005-02-01
申请人： Wei Gao , Tingkai Li , Yoshi Ono , Sheng Hsu
发明人： Wei Gao , Tingkai Li , Yoshi Ono , Sheng Hsu
IPC分类号： H01L21/31
CPC分类号： C23C14/5806 , C23C14/10
摘要： A method of forming a silicon-rich silicon oxide layer having nanometer sized silicon particles therein includes preparing a substrate; preparing a target; placing the substrate and the target in a sputtering chamber; setting the sputtering chamber parameters; depositing material from the target onto the substrate to form a silicon-rich silicon oxide layer; and annealing the substrate to form nanometer sized silicon particles therein.
摘要翻译：形成其中具有纳米尺寸硅颗粒的富硅氧化硅层的方法包括制备衬底; 准备一个目标将基板和靶放置在溅射室中; 设置溅射室参数; 将材料从靶材沉积到衬底上以形成富硅氧化硅层; 并对衬底退火以在其中形成纳米尺寸的硅颗粒。

4. 发明申请

US20060180816A1 Wide wavelength range silicon electroluminescence device 审中-公开
标题翻译：宽波长范围的硅电致发光器件
公开(公告)号：US20060180816A1
公开(公告)日：2006-08-17
申请号：US11058505
申请日：2005-02-14
申请人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Hsu
发明人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Hsu
IPC分类号： H01L29/26
CPC分类号： H05B33/145
摘要： A method is provided for forming a Si electroluminescence (EL) device for emitting light at short wavelengths. The method comprises: providing a substrate; forming a first insulator layer overlying the substrate; forming a silicon-rich silicon oxide (SRSO) layer overlying the first insulator layer, embedded with nanocrystalline Si having a size in the range of 0.5 to 5 nm; forming a second insulator layer overlying the SRSO layer; and, forming a top electrode. Typically, the SRSO has a Si richness in the range of 5 to 40%. In one aspect, the SRSO layer is formed using a DC sputtering process. In another aspect, the SRSO formation step includes a rapid thermal annealing (RTA) process subsequent to depositing the SRSO. Likewise, thermal oxidation or plasma oxidation can be performed subsequent to the SRSO layer deposition. The size of Si nanocrystals is decreased in response to above-mentioned deposition, annealing, and oxidation processes.
摘要翻译：提供一种用于形成用于发射短波长的光的Si电致发光（EL）装置的方法。该方法包括：提供衬底; 形成覆盖所述衬底的第一绝缘体层; 形成覆盖在第一绝缘体层上的富硅氧化物（SRSO）层，其中嵌入尺寸在0.5至5nm范围内的纳米晶体Si; 形成覆盖所述SRSO层的第二绝缘体层; 并形成顶部电极。通常，SRSO的Si浓度范围为5〜40％。在一个方面，使用DC溅射工艺形成SRSO层。另一方面，SRSO形成步骤包括在沉积SRSO之后的快速热退火（RTA）工艺。同样地，可以在SRSO层沉积之后进行热氧化或等离子体氧化。响应于上述沉积，退火和氧化过程，Si纳米晶体的尺寸减小。

5. 发明申请

US20060160335A1 Rare earth element-doped silicon/silicon dioxide lattice structure 失效
标题翻译：稀土元素掺杂硅/二氧化硅晶格结构
公开(公告)号：US20060160335A1
公开(公告)日：2006-07-20
申请号：US11039463
申请日：2005-01-19
申请人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Hsu
发明人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Hsu
IPC分类号： H01L21/20
CPC分类号： C23C14/16 , C03C17/34 , C23C14/10 , C23C28/322 , C23C28/323 , C23C28/345 , C23C28/3455 , C23C28/42 , H01L21/02164 , H01L21/02266 , H01L21/0237 , H01L21/02532 , H01L21/02573 , H01L21/0259 , H01L21/02631 , H01L21/02667 , H01L21/31608 , H01L33/26
摘要： Provided are an electroluminescence (EL) device and corresponding method for forming a rare earth element-doped silicon (Si)/Si dioxide (SiO2) lattice structure. The method comprises: providing a substrate; DC sputtering a layer of amorphous Si overlying the substrate; DC sputtering a rare earth element; in response, doping the Si layer with the rare earth element; DC sputtering a layer of SiO2 overlying the rare earth-doped Si; forming a lattice structure; annealing; and, in response to the annealing, forming nanocrystals in the rare-earth doped Si having a grain size in the range of 1 to 5 nanometers (nm). In one aspect, the rare earth element and Si are co-DC sputtered. Typically, the steps of DC sputtering Si, DC sputtering the rare earth element, and DC sputtering the SiO2 are repeated 5 to 60 cycles, so that the lattice structure includes the plurality (5-60) of alternating SiO2 and rare earth element-doped Si layers.
摘要翻译：提供了一种用于形成稀土元素掺杂硅（Si）/二氧化硅（SiO 2）晶格结构的电致发光（EL）器件和相应的方法。该方法包括：提供衬底; DC溅射覆盖衬底的非晶硅层; 直流溅射稀土元素; 作为响应，用稀土元素掺杂Si层; DC溅射一层SiO 2，覆盖稀土掺杂的Si; 形成晶格结构; 退火; 并且响应于退火，在具有1至5纳米（nm）范围内的晶粒尺寸的稀土掺杂Si中形成纳米晶体。一方面，稀土元素和Si共溅射。通常，DC溅射Si，DC溅射稀土元素和DC溅射SiO 2的步骤重复5至60个循环，使得晶格结构包括多个（5-60）交替的SiO 2和稀土元素掺杂 Si层。

6. 发明申请

US20060189014A1 High-luminescence silicon electroluminescence device 失效
标题翻译：高发光硅电致发光器件
公开(公告)号：US20060189014A1
公开(公告)日：2006-08-24
申请号：US11066713
申请日：2005-02-24
申请人： Tingkai Li , Pooran Joshi , Wei Gao , Yoshi Ono , Sheng Hsu
发明人： Tingkai Li , Pooran Joshi , Wei Gao , Yoshi Ono , Sheng Hsu
IPC分类号： H01L21/00
CPC分类号： H01L31/03046 , Y02E10/544 , Y02P70/521
摘要： A method for forming a high-luminescence Si electroluminescence (EL) phosphor is provided, with an EL device made from the Si phosphor. The method comprises: depositing a silicon-rich oxide (SRO) film, with Si nanocrystals, having a refractive index in the range of 1.5 to 2.1, and a porosity in the range of 5 to 20%; and, post-annealing the SRO film in an oxygen atmosphere. DC-sputtering or PECVD processes can be used to deposit the SRO film. In one aspect the method further comprises: HF buffered oxide etching (BOE) the SRO film; and, re-oxidizing the SRO film, to form a SiO2 layer around the Si nanocrystals in the SRO film. In one aspect, the SRO film is re-oxidized by annealing in an oxygen atmosphere. In this manner, a layer of SiO2 is formed around the Si nanocrystals having a thickness in the range of 1 to 5 nanometers (nm).
摘要翻译：提供一种用于形成高发光Si电致发光（EL）荧光体的方法，其具有由Si荧光体制成的EL器件。该方法包括：用Si纳米晶体沉积富含氧的氧化物（SRO）膜，折射率在1.5至2.1范围内，孔隙率在5至20％的范围内; 并且在氧气氛中对SRO膜进行后退火。 DC溅射或PECVD工艺可用于沉积SRO膜。在一个方面，该方法还包括：HF缓冲氧化物蚀刻（BOE）SRO膜; 并且再次氧化SRO膜，以在SRO膜中的Si纳米晶体周围形成SiO 2层。在一个方面，SRO膜通过在氧气气氛中退火再次氧化。以这种方式，在具有1至5纳米（nm）范围内的厚度的Si纳米晶体周围形成SiO 2层。

7. 发明授权

US07811837B2 Terbium-doped, silicon-rich oxide electroluminescent devices and method of making the same 有权
标题翻译：铽掺杂，富硅氧化物电致发光器件及其制造方法
公开(公告)号：US07811837B2
公开(公告)日：2010-10-12
申请号：US11582275
申请日：2006-10-16
申请人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Teng Hsu
发明人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Teng Hsu
IPC分类号： H01L29/00
CPC分类号： H01L27/15 , H01L33/0004 , H01L33/343
摘要： A method of fabricating an electroluminescent device includes, on a prepared substrate, depositing a rare earth-doped silicon-rich layer on gate oxide layer as a light emitting layer; and annealing and oxidizing the structure to repair any damage caused to the rare earth-doped silicon-rich layer; and incorporating the electroluminescent device into a CMOS IC. An electroluminescent device fabricated according to the method of the invention includes a substrate, a rare earth-doped silicon-rich layer formed on the gate oxide layer for emitting a light of a pre-determined wavelength; a top electrode formed on the rare earth-doped silicon-rich layer; and associated CMOS IC structures fabricated thereabout.
摘要翻译：一种制造电致发光器件的方法包括：在制备的衬底上，在作为发光层的栅极氧化物层上沉积稀土掺杂的富硅层; 并对该结构进行退火和氧化以修复对稀土掺杂的富硅层造成的任何损伤; 并将电致发光器件并入CMOS IC。根据本发明的方法制造的电致发光器件包括：衬底，形成在栅极氧化物层上的用于发射预定波长的光的稀土掺杂富硅层; 在稀土掺杂的富硅层上形成的顶部电极; 并在其附近制造相关的CMOS IC结构。

8. 发明申请

US20080164569A1 Terbium-doped, silicon-rich oxide electroluminescent devices and method of making the same 有权
标题翻译：铽掺杂，富硅氧化物电致发光器件及其制造方法
公开(公告)号：US20080164569A1
公开(公告)日：2008-07-10
申请号：US11582275
申请日：2006-10-16
申请人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Teng Hsu
发明人： Tingkai Li , Wei Gao , Yoshi Ono , Sheng Teng Hsu
IPC分类号： H01L29/00
CPC分类号： H01L27/15 , H01L33/0004 , H01L33/343
摘要： A method of fabricating an electroluminescent device includes, on a prepared substrate, depositing a rare earth-doped silicon-rich layer on gate oxide layer as a light emitting layer; and annealing and oxidizing the structure to repair any damage caused to the rare earth-doped silicon-rich layer; and incorporating the electroluminescent device into a CMOS IC. An electroluminescent device fabricated according to the method of the invention includes a substrate, a rare earth-doped silicon-rich layer formed on the gate oxide layer for emitting a light of a pre-determined wavelength; a top electrode formed on the rare earth-doped silicon-rich layer; and associated CMOS IC structures fabricated thereabout.
摘要翻译：一种制造电致发光器件的方法包括：在制备的衬底上，在作为发光层的栅极氧化物层上沉积稀土掺杂的富硅层; 并对该结构进行退火和氧化以修复对稀土掺杂的富硅层造成的任何损伤; 并将电致发光器件并入CMOS IC。根据本发明的方法制造的电致发光器件包括：衬底，形成在栅极氧化物层上的用于发射预定波长的光的稀土掺杂富硅层; 在稀土掺杂的富硅层上形成的顶部电极; 并在其附近制造相关的CMOS IC结构。

9. 发明申请

US20080026494A1 Method of fabricating a terbium-doped electroluminescence device via metal organic deposition processes 审中-公开
标题翻译：通过金属有机沉积工艺制造掺铒电致发光器件的方法
公开(公告)号：US20080026494A1
公开(公告)日：2008-01-31
申请号：US11494181
申请日：2006-07-26
申请人： Wei-Wei Zhuang , Yoshi Ono , Wei Gao , Tingkai Li
发明人： Wei-Wei Zhuang , Yoshi Ono , Wei Gao , Tingkai Li
IPC分类号： H01L21/00
CPC分类号： H05B33/10
摘要： A method of fabricating an electroluminescent device includes preparing a wafer and a doped-silicon oxide precursor solution. The doped-silicon oxide precursor solution is spin coated onto the wafer to form a doped-silicon oxide thin film on the wafer, which is baked at progressively increasing temperatures. The wafer is then rapidly thermally annealed, further annealed in a wet oxygen ambient atmosphere. A transparent top electrode is deposited on the doped-silicon oxide thin film, which is patterned, etched, and annealed. The doped-silicon oxide thin film and the wafer undergo a final annealing step to enhance electroluminescent properties.
摘要翻译：制造电致发光器件的方法包括制备晶片和掺杂的氧化硅前体溶液。将掺杂的氧化硅前体溶液旋涂在晶片上以在晶片上形成掺杂的氧化硅薄膜，其在逐渐升高的温度下烘烤。然后将晶片快速热退火，在湿氧环境气氛中进一步退火。透明的顶部电极沉积在掺杂的氧化硅薄膜上，其被图案化，蚀刻和退火。掺杂氧化硅薄膜和晶片进行最终退火步骤以增强电致发光性能。

10. 发明授权

US07297642B2 Sputter-deposited rare earth element-doped silicon oxide film with silicon nanocrystals for electroluminescence applications 失效
标题翻译：溅射沉积的稀土元素掺杂氧化硅膜与硅纳米晶体用于电致发光应用
公开(公告)号：US07297642B2
公开(公告)日：2007-11-20
申请号：US11334015
申请日：2006-01-18
申请人： Wei Gao , Tingkai Li , Robert A. Barrowcliff , Yoshi Ono , Sheng Teng Hsu
发明人： Wei Gao , Tingkai Li , Robert A. Barrowcliff , Yoshi Ono , Sheng Teng Hsu
IPC分类号： H01L21/31
CPC分类号： H05B33/145 , H01L21/3115 , H01L31/03046 , Y02E10/544
摘要： A method is provided for forming a rare earth (RE) element-doped silicon (Si) oxide film with nanocrystalline (nc) Si particles. The method comprises: providing a first target of Si, embedded with a first rare earth element; providing a second target of Si; co-sputtering the first and second targets; forming a Si-rich Si oxide (SRSO) film on a substrate, doped with the first rare earth element; and, annealing the rare earth element-doped SRSO film. The first target is doped with a rare earth element such as erbium (Er), ytterbium (Yb), cerium (Ce), praseodymium (Pr), or terbium (Tb). The sputtering power is in the range of about 75 to 300 watts (W). Different sputtering powers are applied to the two targets. Also, deposition can be controlled by varying the effective areas of the two targets. For example, one of the targets can be partially covered.
摘要翻译：提供了一种用于形成具有纳米晶体（nc）Si颗粒的稀土（RE）元素掺杂硅（Si）氧化物膜的方法。该方法包括：提供嵌入有第一稀土元素的Si的第一靶; 提供Si的第二个目标; 共溅射第一和第二个目标; 在掺杂有第一稀土元素的衬底上形成富Si氧化硅（SRSO）膜; 并对稀土元素掺杂的SRSO膜退火。第一靶用铒（Er），镱（Yb），铈（Ce），镨（Pr）或铽（Tb）等稀土元素掺杂。溅射功率在约75至300瓦（W）的范围内。不同的溅射功率被应用于两个目标。此外，可以通过改变两个目标的有效面积来控制沉积。例如，其中一个目标可以被部分覆盖。

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