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1. 发明授权

US5444901A Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted 失效
标题翻译：制造同时安装有双重元件的硅压力传感器的方法
公开(公告)号：US5444901A
公开(公告)日：1995-08-29
申请号：US142237
申请日：1993-10-25
申请人： Walter J. Wiegand , Frank W. Gobetz , Robert H. Bullis , James P. Towey , James W. Lennon
发明人： Walter J. Wiegand , Frank W. Gobetz , Robert H. Bullis , James P. Towey , James W. Lennon
IPC分类号： G01L9/00 , H01G7/00 , G01L9/12
CPC分类号： G01L9/0073 , Y10T29/435 , Y10T29/49005 , Y10T29/49007
摘要： A dual-element, parallel-plate silicon capacitative pressure sensor includes a pressure sensing element and a reference element of identical structure. Both elements are separately fabricated from the same silicon wafers using identical processing steps. Further, both elements are simultaneously mounted to a header using identical mounting steps. Such identical fabrication and mounting steps serve to identically match the dielectric materials and, thus, the aging properties of both the sensing and reference elements. By matching the sensing and reference elements in these ways, and by aging these components at elevated temperatures in exactly the same way, it is possible to achieve an extremely close match in long-term dielectric aging properties.
摘要翻译：双元件平行板硅电容压力传感器包括压力感测元件和相同结构的参考元件。使用相同的处理步骤，两个元件由相同的硅晶片分别制造。此外，使用相同的安装步骤将两个元件同时安装到插头。这种相同的制造和安装步骤用于使电介质材料相同地匹配，并且因此用于感测和参考元件两者的老化特性。通过以这些方式匹配传感元件和参考元件，并且通过以完全相同的方式在升高的温度下老化这些部件，可以在长期的介电老化性能方面实现非常接近的匹配。

2. 发明授权

US5448444A Capacitive pressure sensor having a reduced area dielectric spacer 失效
标题翻译：电容式压力传感器具有减小面积的电介质间隔物
公开(公告)号：US5448444A
公开(公告)日：1995-09-05
申请号：US188257
申请日：1994-01-28
申请人： Paul L. Provenzano , James L. Swindal , Robert J. Kuhlberg , Charles B. Brahm , Harold D. Meyer , Frank W. Gobetz , Walter J. Wiegand , Robert H. Bullis
发明人： Paul L. Provenzano , James L. Swindal , Robert J. Kuhlberg , Charles B. Brahm , Harold D. Meyer , Frank W. Gobetz , Walter J. Wiegand , Robert H. Bullis
IPC分类号： G01L9/00 , H01G7/00
CPC分类号： G01L9/0073 , H01L2924/163
摘要： A silicon capacitive pressure sensor is disclosed that has a glass dielectric material sputter-deposited onto a silicon substrate of the sensor. After deposition of the bulk dielectric material, the glass is patterned and etched to form a pair of concentric rings. An inner ring is of a circular shape, while the outer ring is of an octagonal shape. As compared to prior art dielectric spacers which are of a single ring of relatively wide thickness, the pair of concentric rings disclosed herein significantly reduce the parasitic capacitance of the glass dielectric material, thereby increasing the sensitivity of the sensor.
摘要翻译：公开了一种硅电容式压力传感器，其具有溅射沉积在传感器的硅衬底上的玻璃介电材料。在沉积体电介质材料之后，对玻璃进行图案化和蚀刻以形成一对同心环。内圈为圆形，外圈为八角形。与现有技术的具有相对较宽厚度的单个环的电介质间隔物相比，本文公开的一对同心环显着降低了玻璃介电材料的寄生电容，从而增加了传感器的灵敏度。

3. 发明授权

US5440931A Reference element for high accuracy silicon capacitive pressure sensor 失效
标题翻译：高精度硅电容式压力传感器的参考元件
公开(公告)号：US5440931A
公开(公告)日：1995-08-15
申请号：US142236
申请日：1993-10-25
申请人： Walter J. Wiegand , Frank W. Gobetz , Robert H. Bullis
发明人： Walter J. Wiegand , Frank W. Gobetz , Robert H. Bullis
IPC分类号： G01L9/00 , G01L19/02 , G01L9/12
CPC分类号： G01L9/0073 , G01L19/02
摘要： A dual-element, parallel-plate silicon capacitative pressure sensor includes a pressure sensing element and a reference element of identical structure. Both elements are fabricated from the same silicon wafers using identical processing steps. Further, both elements are simultaneously mounted to a header using identical mounting steps. Such identical fabrication and mounting steps serve to identically match the dielectric materials and, thus, the aging properties of both the sensing and reference elements. By matching the sensing and reference elements in these ways, and by aging these components at elevated temperatures in exactly the same way, it is possible to achieve an extremely close match in long-term dielectric aging properties.
摘要翻译：双元件平行板硅电容压力传感器包括压力感测元件和相同结构的参考元件。两个元件由相同的硅晶片使用相同的处理步骤制造。此外，使用相同的安装步骤将两个元件同时安装到插头。这种相同的制造和安装步骤用于使电介质材料相同地匹配，并且因此用于感测和参考元件两者的老化特性。通过以这些方式匹配传感元件和参考元件，并且通过以完全相同的方式在升高的温度下老化这些部件，可以在长期的介电老化性能方面实现非常接近的匹配。

4. 发明授权

US5381299A Capacitive pressure sensor having a substrate with a curved mesa 失效
标题翻译：电容式压力传感器具有带有弯曲台面的基板
公开(公告)号：US5381299A
公开(公告)日：1995-01-10
申请号：US188952
申请日：1994-01-28
申请人： Paul L. Provenzano , James L. Swindal , Robert J. Kuhlberg , Charles B. Brahm , Harold D. Meyer , Frank W. Gobetz , Walter J. Wiegand , Robert H. Bullis
发明人： Paul L. Provenzano , James L. Swindal , Robert J. Kuhlberg , Charles B. Brahm , Harold D. Meyer , Frank W. Gobetz , Walter J. Wiegand , Robert H. Bullis
IPC分类号： G01L9/00 , H04R19/00 , H01G7/00
CPC分类号： G01L9/0073 , H04R19/00 , Y10T29/435
摘要： A silicon capacitive pressure sensor is disclosed having a silicon substrate and a silicon diaphragm separated by a glass dielectric spacer. The substrate has an upper surface formed as a mesa which is generally curved in shape, the curvature being concave. Due to manufacturing constraints the mesa upper surface comprises a series of concentric rings that approximate the desired concave shape. The step height and diameter of the rings are such that, at full deflection of the diaphragm, the diaphragm touches the center of the mesa, but not the edges of the individual steps. That is, letting the edges or corners of the steps define a curve, the radius of curvature of the diaphragm is smaller than the radius of curvature of the locus of the step corners.
摘要翻译：公开了一种硅电容式压力传感器，其具有由玻璃介电隔离物隔开的硅衬底和硅隔膜。基板具有形成为台面的上表面，该台面通常为弯曲形状，曲率为凹形。由于制造约束，台面上表面包括一系列近似所需凹形状的同心环。环的台阶高度和直径使得在隔膜的完全偏转时，隔膜接触台面的中心，而不是各个台阶的边缘。也就是说，让台阶的边缘或角落定义曲线，光阑的曲率半径小于阶梯角的曲率半径。

5. 发明授权

US4930042A Capacitive accelerometer with separable damping and sensitivity 失效
标题翻译：电容式加速度计具有可分离的阻尼和灵敏度
公开(公告)号：US4930042A
公开(公告)日：1990-05-29
申请号：US317240
申请日：1989-02-28
申请人： Walter J. Wiegand , James L. Swindal , Richard E. Swarts , Robert H. Bullis , Mario T. Lopiccolo , Daniel H. Grantham , Arthur G. Foyt
发明人： Walter J. Wiegand , James L. Swindal , Richard E. Swarts , Robert H. Bullis , Mario T. Lopiccolo , Daniel H. Grantham , Arthur G. Foyt
IPC分类号： G01P1/00 , G01P15/08 , G01P15/125
CPC分类号： G01P15/125 , G01P1/003 , G01P15/0802
摘要： A micromachined three-plate capacitive accelerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration.

6. 发明授权

US4049989A Ion production means 失效
标题翻译：离子生产手段
公开(公告)号：US4049989A
公开(公告)日：1977-09-20
申请号：US605562
申请日：1975-08-18
申请人： Robert H. Bullis , Walter J. Wiegand, Jr.
发明人： Robert H. Bullis , Walter J. Wiegand, Jr.
IPC分类号： G01G11/00 , G01F1/64 , G01N27/62 , H01T23/00 , H01J27/00
CPC分类号： H01T23/00 , G01F1/64 , G01N27/62
摘要： Apparatus for providing ions having a specific electric charge to a stream of working fluid are disclosed. The ions are produced by a variety of techniques in a volume of the working fluid which is maintained in a protected region within the stream. An electric field draws ions away from the production region and makes them available to the stream of fluid. In many applications an independent electric field is applied to the flowing fluid to move the ions within the working fluid.
摘要翻译：公开了用于向工作流体流提供具有特定电荷的离子的装置。离子通过各种技术在工作流体的体积中产生，该体积被保持在流内的保护区域中。电场将离子从生产区域吸走，使其可用于流体流。在许多应用中，独立的电场被施加到流动的流体上以移动工作流体内的离子。

7. 发明授权

US5535626A Sensor having direct-mounted sensing element 失效
标题翻译：传感器具有直接安装的传感元件
公开(公告)号：US5535626A
公开(公告)日：1996-07-16
申请号：US361277
申请日：1994-12-21
申请人： Robert H. Bullis , James L. Swindal , Walter J. Wiegand , Charles R. Winston, Jr.
发明人： Robert H. Bullis , James L. Swindal , Walter J. Wiegand , Charles R. Winston, Jr.
IPC分类号： G01P1/02 , G01P15/125 , G01P15/08
CPC分类号： G01P1/023 , G01P15/125 , G01P2015/0828
摘要： A silicon capacitive microsensor which is sensitive to acceleration forces includes a silicon capacitive sensing element 10 comprising three silicon layers 12,16,26 having glass dielectric layers 14,24 between each pair of silicon layers with the middle silicon layer 16 consisting of a proof mass 18 suspended between the two glass dielectric layers 14,24 by a silicon hinge 20 which is connected to a slightly thicker silicon support layer 17 around the periphery (FIG. 3 ) between the glass layers 14,24 (FIG. 1 ). Three metallic bond pads 40,42,44 on the surface 45 of the silicon layers 26,16,12, respectively, are soldered to circuit trace pads 108 on a circuit board 100 which has a glass upper layer 104 and a silicon support layer 102. The thermal expansion coefficient between the glass layer 104 and the sensing element 10 are substantially the same, thereby minimizing thermally induced stresses on the sensing element 10 and minimizing inaccuracies associated therewith. Such direct mounting greatly simplifies the manufacturing process for such sensors. Also, such direct mounting eliminates flying leads thereby allowing the sensing element 10 to be fabricated to much smaller dimensions than that of the prior art.
摘要翻译：对加速力敏感的硅电容微传感器包括硅电容感测元件10，其包括在每对硅层之间具有玻璃介电层14,24的三个硅层12,16,26，中间硅层16由检测质量块 18通过硅铰链20悬挂在两个玻璃介电层14,24之间，该硅铰链20连接到玻璃层14,24（图1）周围的周边（图3）之间的略厚的硅支撑层17。分别在硅层26,16,12的表面45上的三个金属接合焊盘40,42,44焊接到电路板100上的电路迹线焊盘108，电路板100具有玻璃上层104和硅支撑层102 玻璃层104和感测元件10之间的热膨胀系数基本上相同，从而最小化感应元件10上的热致应力并最小化与之相关联的不准确度。这种直接安装大大简化了这种传感器的制造过程。此外，这种直接安装消除了飞行引线，从而允许将感测元件10制造成比现有技术小得多的尺寸。

8. 发明授权

US4463729A Method and apparatus for controlling fuel injection timing in a compression ignition engine 失效
标题翻译：用于控制压缩点火发动机中的燃料喷射正时的方法和装置
公开(公告)号：US4463729A
公开(公告)日：1984-08-07
申请号：US551791
申请日：1983-11-14
申请人： Robert H. Bullis , Robert A. DiDomenico , John A. Kimberley , Thomas M. McHugh , Christopher A. Parent , James R. Voss , Walter J. Wiegand
发明人： Robert H. Bullis , Robert A. DiDomenico , John A. Kimberley , Thomas M. McHugh , Christopher A. Parent , James R. Voss , Walter J. Wiegand
IPC分类号： F02P17/12 , F01B9/04 , F02B1/04 , F02B3/06 , F02B75/12 , F02D35/02 , F02D41/14 , F02D41/40 , F02M51/00
CPC分类号： F02D41/401 , F01B9/047 , F02D35/021 , F02D35/022 , F02D35/028 , F02D41/1497 , F02B1/04 , F02B2075/125 , F02B3/06 , Y02T10/44
摘要： The method and apparatus for generating start of combustion signals associated with the combustion events in a diesel engine, and for using such signals to control the timing of fuel delivery to the engine. The combustion event is sensed, as by an electrostatic or optical sensor, and signal conditioning circuitry provides a start-of-combustion signal which is directly and precisely indicative of the time of the onset of combustion. The sensors include self-cleaning capabilities for extended operating life on an engine. The sensors may be incorporated in the structure of a glow plug.The SOC signal is advantageously supplied to a timing control circuit which delivers a timing control signal to a fuel delivery device, such as the controller associated with a fuel pump. The control circuit stores one or more start of combustion values which indicate the desired timing, relative to an engine cycle, for the start of the combustion event as a function of speed and load. One or more adjustment signals are stored and applied as a function of speed and load to adjust the desired signal such that the control signal is corrected for delays. The actual SOC signal is compared with the desired signal to generate an error signal which may be used to finely adjust the stored .DELTA.SOC signal for particular speed and load conditions.
摘要翻译：用于产生与柴油发动机中的燃烧事件相关联的燃烧信号开始的方法和装置，以及用于使用这些信号来控制向发动机输送燃料的时间。如通过静电或光学传感器感测燃烧事件，并且信号调节电路提供直接且精确地指示燃烧开始时间的燃烧起始信号。传感器包括自动清洁功能，可延长发动机的使用寿命。传感器可以结合在电热塞的结构中。 SOC信号有利地被提供给定时控制电路，其将定时控制信号传送到诸如与燃料泵相关联的控制器的燃料输送装置。控制电路存储一个或多个起动燃烧值，其指示作为速度和负载的函数的燃烧事件开始的相对于发动机循环的期望时间。作为速度和负载的函数存储和应用一个或多个调整信号以调整期望的信号，使得对于延迟校正控制信号。将实际的SOC信号与期望的信号进行比较，以产生误差信号，该误差信号可以用于在特定的速度和负载条件下精细地调节存储的DELTA SOC信号。

9. 发明授权

US4074572A Method and apparatus for sensing the flux of a flowing fluid 失效
标题翻译：用于感测流动流体的通量的方法和装置
公开(公告)号：US4074572A
公开(公告)日：1978-02-21
申请号：US599560
申请日：1975-07-28
申请人： Robert H. Bullis , Russell G. Meyerand, Jr. , Walter J. Wiegand, Jr.
发明人： Robert H. Bullis , Russell G. Meyerand, Jr. , Walter J. Wiegand, Jr.
IPC分类号： G01F1/74 , G01F1/64
CPC分类号： G01F1/64
摘要： Various apparatus and their applications to the determination of the flux of a fluid flowing through a region in accordance with the present invention are disclosed. The technique involved is based on the formation of charged particles within the fluid and subjecting these particles to an electric field which is colinear with the direction of fluid travel. Two charged particle collection stations are established, one upstream and the other downstream of the charged particle formation site and the resulting electric currents through such stations are correlated to the flux of the fluid.
摘要翻译：公开了各种装置及其在确定根据本发明的流过区域的流体的通量的应用中。所涉及的技术是基于在流体内形成带电粒子并使这些粒子与流体行进方向共线的电场。建立了两个带电粒子收集站，一个位于带电粒子形成位置的上游和另一个下游，并且通过这些站的所得电流与流体的通量相关。

10. 发明授权

US4878383A Optical fluid level sensor 失效
标题翻译：光学液位传感器
公开(公告)号：US4878383A
公开(公告)日：1989-11-07
申请号：US115304
申请日：1987-11-02
申请人： Walter J. Wiegand, Jr. , Robert H. Bullis
发明人： Walter J. Wiegand, Jr. , Robert H. Bullis
IPC分类号： G01F23/28 , G01F23/292
CPC分类号： G01F23/2922
摘要： The present invention is related to a sight glass(10) that utilizes both reflected light at a glass to air interface(40) as well as the light transmitted through a glass to fluid to glass interface(44) to form a light pattern that is indicative of the true fluid level. By requiring that light always appear in either an "air" or "fluid" channel(42,46), any absence of light is assumed due to film coated surfaces or to other abnormal conditions. An absence of light is a signal that maintenance is required.
摘要翻译：本发明涉及一种将玻璃与空气界面（40）之间的反射光以及通过玻璃传输到玻璃到玻璃界面（44）的光的视镜（10），以形成光图案，其是表明真正的液位。通过要求光总是出现在“空气”或“流体”通道（42,46）中，由于膜涂层表面或其他异常条件，假定没有光。没有光是需要维护的信号。

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