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    • 2. 发明授权
    • Pressure transducer apparatus with monolithic body of ceramic material
    • 带陶瓷材料整体式的压力传感器装置
    • US5499158A
    • 1996-03-12
    • US339038
    • 1994-11-14
    • Robert P. BishopPaul L. HaineyStanley J. LukasiewiczAllan J. SiuzdakRobert E. Luminello, Jr.Vishwa N. Shukla
    • Robert P. BishopPaul L. HaineyStanley J. LukasiewiczAllan J. SiuzdakRobert E. Luminello, Jr.Vishwa N. Shukla
    • G01L9/00H01G7/00
    • G01L9/0075
    • A monolithic capacitive pressure transducer (12) is shown composed of ceramic material having a first closed cavity (12) separated from a surface thereof by a flexible wall member and a second closed cavity (16) defined by rigid wall members. Capacitor plates (32, 36; 40, 44) are formed on two opposed surfaces defining each cavity. Vias (33, 37; 41, 45) are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm (20) and first and second base portions (22, 30) having recesses (24) in the top and bottom surfaces using ceramic powder coated with an organic binder. A metal layer is deposited on the pieces which are then joined together to form a single unit. A spacer (26) may be inserted in the recesses to ensure that a predetermined gap is maintained in each cavity during the joining operation. The parts are then debinderized by heating to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.
    • 单体电容式压力传感器(12)由陶瓷材料组成,陶瓷材料具有通过柔性壁构件从其表面分离的第一闭合腔(12)和由刚性壁构件限定的第二闭合腔(16)。 在限定每个空腔的两个相对的表面上形成电容器板(32,36; 40,44)。 通孔(33,37,41,45)形成为从电容器板延伸以允许与其电连接。 传感器通过在压力下分开地形成隔膜(20)和在顶表面和底表面上具有凹部(24)的第一和第二基部(22,30),其中使用涂覆有机粘合剂的陶瓷粉末。 金属层沉积在片上,然后将它们连接在一起以形成单个单元。 可以在凹槽中插入间隔件(26),以确保在接合操作期间在每个空腔中保持预定的间隙。 然后通过加热到第一温度水平来使部件脱粘,以允许粘合剂有机物以及间隔物有机物,如果使用间隔物,则通过隔膜和基底的开孔气化和/或分解和除去。 然后将该单元升温至烧结温度以将其改变成单片体并将金属化层转化为结合到陶瓷的导电层。
    • 3. 发明授权
    • Process for forming ceramic pixel array and pixel array formed thereby
    • 用于形成由此形成的陶瓷像素阵列和像素阵列的工艺
    • US5397518A
    • 1995-03-14
    • US49017
    • 1993-04-16
    • Vishwa N. ShuklaAllan J. SiuzdakStanley J. Lukasiewicz
    • Vishwa N. ShuklaAllan J. SiuzdakStanley J. Lukasiewicz
    • C04B35/468C04B35/47H01L37/02C04B33/32
    • H01L37/02C04B35/4682C04B35/47
    • An array of raised lands disposed in columns and rows formed of ceramic material, particularly barium strontium titanate, is formed by making a die of resist material having a negative image pattern of the array on a ceramic substrate and then forming a slurry having a high solid content of the ceramic material, filling the pattern with the slurry and firing the filled die to produce a sintered array of pixels. In a modified embodiment a pressing pad 18 of deformable ceramic tape is formed and pressed into the die after the die has been filled with slurry 16 in order to compact the material and wipe the ceramic material from the sidewalls 12. In another embodiment a ceramic tape of the type used for the pressing pad is pressed into the die and after a short time removed from the die with the pixel array formed in the tape which is then fired to sinter the array. In a modification of this embodiment that portion of the tape extending out of the die beyond the sidewalls 12 can be removed and the die then fired to form a pixel array which is confined essentially to vertical shrinkage upon firing.
    • 通过在陶瓷基板上形成具有阵列的负像图案的抗蚀剂材料的模具,然后形成具有高固体的浆料,形成由陶瓷材料,特别是钛酸钡钡形成的列和列排列的凸起的阵列 陶瓷材料的含量,用浆料填充图案并点燃填充的模具以产生像素的烧结阵列。 在改进的实施例中,在模具已经填充有浆料16之后,形成可变形陶瓷带的压垫18并压入模具中,以便压缩材料并从侧壁12擦拭陶瓷材料。在另一个实施例中,陶瓷带 用于压垫的类型被压入模具中,并且在形成在带中的像素阵列短时间从模具中移除之后,然后烧制以烧结阵列。 在该实施例的修改中,可以去除延伸超出侧壁12的模具的带的部分,然后烧制模具以形成基本上被限制在烧制时的垂直收缩的像素阵列。
    • 4. 发明授权
    • Method of making a pressure transducer apparatus
    • 制造压力传感器装置的方法
    • US5525280A
    • 1996-06-11
    • US224219
    • 1994-04-07
    • Vishwa N. ShuklaStanley J. LukasiewiczFrancois A. Padovani
    • Vishwa N. ShuklaStanley J. LukasiewiczFrancois A. Padovani
    • G01L9/12G01L9/00H01L29/84B32B31/12B32B31/26C04B33/32
    • G01L9/0075Y10T29/435
    • A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.
    • 单片电容式压力传感器由陶瓷材料组成,陶瓷材料在其表面附近形成有封闭的空腔,并且在形成空腔的两个相对的表面上形成电容器板。 形成从电容器板延伸以允许与其电连接的通孔。 传感器通过在压力下分开地形成隔膜和使用涂覆有有机粘合剂的陶瓷粉末在顶面中具有凹部的基底来制造。 金属层沉积在两片上,然后将片连接在一起以形成单个单元。 间隔件可以插入凹部中,以确保在接合操作期间在两个部件之间保持预定的间隙。 然后通过在空气中加热至第一温度水平使部分脱粘,以允许粘合剂有机物以及间隔器有机物(如果使用间隔物)通过隔膜和基底的开孔气化和/或分解和除去 。 然后将该单元升温至还原气氛中的烧结温度以将其改变成单体,并将金属化层转化为与陶瓷结合的导电层。
    • 5. 发明授权
    • Pressure sensor apparatus
    • 压力传感器装置
    • US06487911B1
    • 2002-12-03
    • US09717763
    • 2000-11-21
    • Peter H. FrackeltonStanley J. Lukasiewicz
    • Peter H. FrackeltonStanley J. Lukasiewicz
    • G01L700
    • G01L9/0075G01L19/14
    • A fluid pressure sensor (10) has a generally polyhedron configured capacitive transducer (18) electrically connected to a flexible circuit using interference fit U-shaped edge connectors (20). The flexible circuit (16) is received in an electronics chamber formed in a top end of a base member (12) with the corners of the transducer disposed on the face surface (12f) of the top. A cover (24) is formed with a circular fluid pressure opening (24a) through which a sealing gasket (22) extends, the gasket having tabs (22a) received in a seat (24c) formed in the bottom surface of the top wall (24b) of the cover. A transducer receiving seat (24d) is also formed in the bottom surface of the cover for placement of transducer (18). The cover is formed with opposing legs (24h) which interfit with notches (12d) in the base and a third leg (24n) slidingly received in a slot formed in the base through which conductive tails (16h) of the flexible circuit (16) extend for electrical engagement with a hexport (26) slidingly received over the cover and top portion of the base member.
    • 流体压力传感器(10)具有使用过盈配合的U形边缘连接器(20)电连接到柔性电路的大致多面体配置的电容换能器(18)。 柔性电路(16)被容纳在形成在基部构件(12)的顶端中的电子室中,其中换能器的角部设置在顶部的表面(12f)上。 盖(24)形成有圆形流体压力开口(24a),密封垫圈(22)延伸通过该圆形流体压力开口,垫圈具有接纳在形成在顶壁底面中的座(24c)中的凸片(22a) 24b)。 传感器接收座(24d)也形成在盖的底表面中以放置换能器(18)。 所述盖形成有与所述底座中的凹口(12d)相配合的相对腿部(24h),以及滑动地容纳在形成在所述基部中的槽中的第三腿部(24n),柔性电路(16)的导电尾部(16h) 延伸用于与滑动地容纳在盖的顶部和基部构件上的六端口(26)的电接合。
    • 6. 发明授权
    • Pressure transducer apparatus and method for making
    • 压力传感器装置及制造方法
    • US5880371A
    • 1999-03-09
    • US962016
    • 1997-10-31
    • Steven BeringhauseStanley J. LukasiewiczCharles J. Leedecke
    • Steven BeringhauseStanley J. LukasiewiczCharles J. Leedecke
    • G01L9/12G01L9/00H01L29/84
    • G01L9/0075G01L9/0073
    • A fluid pressure responsive capacitive transducer (20) having a lowered manufacturing cost is shown in which a sheet (10) of cast or roll compacted tape material having a selected thickness is partitioned into a multitude of rectangular substrates portions (16) and another sheet (12) having another selected thickness is partitioned into a like number and sized diaphragm portions (18) and are processed in sheet form to apply capacitor plates and associated conductive traces as well as a sealing and spacing glass layer. At least one sheet is then separated into groups, generally comprising one, two or four portions, and pairs of groups of substrates and diaphragms are held together and heated to seal the transducers. Groups of more than one portion of the first and second sheets are then separated into individual transducers.
    • 示出了具有降低的制造成本的流体压力响应电容换能器(20),其中具有选定厚度的铸造或辊压制带材的片材(10)被分隔成多个矩形衬底部分(16)和另一个片材 具有另一选定厚度的板12被分隔成相同数量和尺寸的膜片部分(18),并以片状加工,以施加电容器板和相关的导电迹线以及密封和间隔玻璃层。 然后将至少一个片材分成一组,通常包括一个,两个或四个部分,并将一组基片和隔膜保持在一起并加热以密封换能器。 然后将第一和第二片的多于一部分的组分离成单独的换能器。
    • 7. 发明授权
    • Cylinder pressure sensor for an internal combustion engine
    • 用于内燃机的气缸压力传感器
    • US5126617A
    • 1992-06-30
    • US739590
    • 1991-08-02
    • Stanley J. LukasiewiczCharles M. AnastasiaLawrence E. CooperGregg W. Pestana
    • Stanley J. LukasiewiczCharles M. AnastasiaLawrence E. CooperGregg W. Pestana
    • G01L9/00G01L23/10
    • G01L9/008G01L23/10
    • A pressure sensor for providing an electrical signal corresponding to pressure in a cylinder of an automotive engine has a rigid load-spreading element rigidly secured to a first surface of a ceramic piezoelectric body by a rigid bonding material precisely conformed to the first surface to be in substantially uniform load-transferring relation to all parts of the first body surface, has a rigid support member rigidly secured to a parallel, opposite surface of the ceramic piezoelectric body by a rigid bonding material precisely conformed to the opposite surface to be in substantially uniform load-transferring relation to all parts of the opposite body surface to form a piezoelectric unit, and has a peripheral part of the rigid support member precisely mounted with an interference fit in a bore in a metal component of a mounting structure so that the body of piezoelectric material and the load-spreading element extend in cantilever relation at a precisely determined location to be engaged by force applied through a diaphragm in response to an applied pressure to provide an electrical signal precisely corresponding to the pressure.
    • 用于提供与汽车发动机的气缸中的压力相对应的电信号的压力传感器具有通过刚性接合材料刚性地固定到陶瓷压电体的第一表面的刚性负载传播元件, 与第一体表的所有部分基本均匀的载荷传递关系具有通过刚性接合材料刚性地固定到陶瓷压电体的平行相对表面的刚性支撑构件,该刚性粘合材料精确地符合相对表面以基本均匀的载荷 与相对体表面的所有部分的转移关系形成压电单元,并且刚性支撑构件的周边部分精确地安装成与安装结构的金属部件中的孔中的过盈配合,使得压电体 材料和负载传播元件在精确确定的位置上以悬臂关系延伸以进行接合 d通过响应于施加的压力通过隔膜施加的力,以提供精确对应于压力的电信号。
    • 8. 发明授权
    • Pressure transducer apparatus
    • 压力传感器装置
    • US5485345A
    • 1996-01-16
    • US339039
    • 1994-11-14
    • Stanley J. LukasiewiczRobert P. BishopRobert O. SouthworthKeith W. Kawate
    • Stanley J. LukasiewiczRobert P. BishopRobert O. SouthworthKeith W. Kawate
    • G01L9/00H01G7/00G01L9/12
    • G01L9/0075G01L13/026
    • A monolithic capacitive differential pressure transducer (10, 44,) is shown composed of ceramic material having first and second cavities formed adjacent to opposed face surfaces to form first and second flexible diaphragms (12, 14; 50, 52) and a motion transfer pin (24, 58) attached to and extending between the diaphragms. Capacitor plates are disposed on a surface of at least one flexible diaphragm and a stationary member to form a capacitive gap. Component parts are first pressed from ceramic powder and assembled into a unit using one of several methods including relatively high pressure to press them together or using a combination of low pressure along with raising the temperature of the material to soften the binder in the ceramic material at surfaces of the parts which are to be joined together. Selected gaps, both along the x-y direction and along the z direction may be obtained, particularly in assembling the parts using high pressure using consumable spacer material which is sublimated in a debinderization cycle prior to sintering of the unit to form a monolithic body.
    • 示出了由陶瓷材料组成的单片电容差压变换器(10,44),其具有邻近相对的表面形成的第一和第二空腔,以形成第一和第二柔性隔膜(12,14; 50,52)和运动传递销 (24,58),其连接到膜片之间并在膜片之间延伸。 电容板设置在至少一个柔性隔膜和静止构件的表面上以形成电容间隙。 组分部分首先从陶瓷粉末压制并组装成单元,使用包括较高压力在内的几种方法之一将其压在一起,或者使用低压组合以及提高材料的温度来软化陶瓷材料中的粘合剂 要连接在一起的部件的表面。 可以获得沿着x-y方向和z方向两者的选择的间隙,特别是在使用消耗性隔离材料组装使用高压的部件之前,在烧结单元之前在脱胶循环中升华以形成整体式。