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1. 发明申请

US20090226610A1 COATING APPARATUS WITH ROTATION MODULE 有权
公开(公告)号：US20090226610A1
公开(公告)日：2009-09-10
申请号：US12388214
申请日：2009-02-18
申请人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
发明人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
IPC分类号： C23C16/44 , C23C16/54
CPC分类号： C23C14/56 , C23C14/042 , C23C14/12 , C23C14/50 , C23C14/566 , C23C14/568 , C23C16/54 , H01L21/67155
摘要： The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device for at least one of attaching and detaching a mask to the substrate, and a mask alignment device for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device is attached to the movable support so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.

2. 发明授权

US09353436B2 Coating apparatus with rotation module 有权
标题翻译：带旋转模块的涂装设备
公开(公告)号：US09353436B2
公开(公告)日：2016-05-31
申请号：US12388214
申请日：2009-02-18
申请人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
发明人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
IPC分类号： C23C14/04 , C23C16/04 , C23C14/56 , C23C16/54 , C23C14/50 , C23C14/12 , H01L21/67
CPC分类号： C23C14/56 , C23C14/042 , C23C14/12 , C23C14/50 , C23C14/566 , C23C14/568 , C23C16/54 , H01L21/67155
摘要： The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device for at least one of attaching and detaching a mask to the substrate, and a mask alignment device for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device is attached to the movable support so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.
摘要翻译：本发明涉及一种基材的涂布方法，实施该方法的涂布装置和涂布装置的处理模块。处理模块包括用于待涂覆的基底的可移动支撑件，其可在至少两个位置之间移动。另外，提供了一种用于将掩模附着和分离至基板的掩模布置装置和用于使掩模相对于基板对准的掩模对准装置，其中掩模对准装置附接到可移动支撑件以便与支撑件一起移动。或者，处理模块包括真空室，用于待涂覆的基底的可移动支撑件，所述支撑件布置在真空室中并且可在至少两个位置之间旋转，其中，用于至少一个附着和分离的掩模排列装置在处理模块的真空室内布置有衬底的掩模。

3. 发明申请

US20090226618A1 COATING APPARATUS WITH ROTATION MODULE 审中-公开
标题翻译：涂装装置与旋转模块
公开(公告)号：US20090226618A1
公开(公告)日：2009-09-10
申请号：US12042869
申请日：2008-03-05
申请人： Uwe Schuessler , Reiner Gertmann , Stefan Bangert
发明人： Uwe Schuessler , Reiner Gertmann , Stefan Bangert
IPC分类号： B05D1/32 , B05C13/00 , C23C14/34 , B05D1/00
CPC分类号： H01L21/67236 , C23C14/568 , H01L21/682
摘要： The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device for at least one of attaching and detaching a mask to the substrate, and a mask alignment device for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device is attached to the movable support so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.
摘要翻译：本发明涉及一种基材的涂布方法，实施该方法的涂布装置和涂布装置的处理模块。处理模块包括用于待涂覆的基底的可移动支撑件，其可在至少两个位置之间移动。另外，提供了一种用于将掩模附着和分离至基板的掩模布置装置和用于使掩模相对于基板对准的掩模对准装置，其中掩模对准装置附接到可移动支撑件以便与支撑件一起移动。或者，处理模块包括真空室，用于待涂覆的基底的可移动支撑件，所述支撑件布置在真空室中并且可在至少两个位置之间旋转，其中，用于至少一个附着和分离的掩模排列装置在处理模块的真空室内布置有衬底的掩模。

4. 发明授权

US07837799B2 Arrangement for transporting a flat substrate in a vacuum chamber 失效
标题翻译：用于在真空室中输送平面基板的布置
公开(公告)号：US07837799B2
公开(公告)日：2010-11-23
申请号：US10732179
申请日：2003-12-10
申请人： Stefan Bangert , Frank Fuchs , Uwe Schuessler , Ralph Lindenberg , Tobias Stolley
发明人： Stefan Bangert , Frank Fuchs , Uwe Schuessler , Ralph Lindenberg , Tobias Stolley
IPC分类号： C23C16/00 , C23C14/00 , C23F1/00 , H01L21/306 , C25B11/00 , C25B13/00
CPC分类号： B65G49/065 , B65G49/063 , B65G2249/02 , B65G2249/045 , Y10S414/139
摘要： An arrangement for transporting a flat substrate through a coating installation, wherein the coating installation comprises, e.g., several and different sputter cathodes, to which the flat substrate, for example a glass pane, is transported one after the other in vacuo. So that no abrasion is generated between glass pane and contact, the glass pane is kept spaced apart from the contact by means of gas pressure. The gas pressure is herein built up through relatively few and small holes in a gas channel. Since during flooding of the coating installation to atmospheric pressure or during evacuation, due to the small holes, no fast pressure equalization between gas channel and the remaining coating installation is possible, the gas channel is decoupled in terms of gas from the remaining coating installation and provided with a separate gas line, via which gas can be introduced into the gas channel or pumped out of it.
摘要翻译：用于将平坦基底输送通过涂覆装置的布置，其中所述涂覆装置包括例如多个和不同的溅射阴极，平坦基底例如玻璃板在其中真空地彼此输送。因此，玻璃板和接触件之间不会产生磨损，玻璃板通过气体压力与接触件保持间隔开。气体压力通过气体通道中相对较少和小的孔形成。由于涂层装置在大气压下或排空过程中，由于小孔，气体通道和剩余的涂层装置之间无法实现快速压力平衡，所以气体通道与剩余涂层装置的气体相分离，设置有单独的气体管线，通过该气体管线可以将气体引入气体通道中或从其中泵出。

5. 发明申请

US20050199493A1 Arrangement for transporting a flat substrate in a vacuum chamber 失效
标题翻译：用于在真空室中输送平面基板的布置
公开(公告)号：US20050199493A1
公开(公告)日：2005-09-15
申请号：US10732179
申请日：2003-12-10
申请人： Stefan Bangert , Frank Fuchs , Uwe Schuessler , Ralph Lindenberg , Tobias Stolley
发明人： Stefan Bangert , Frank Fuchs , Uwe Schuessler , Ralph Lindenberg , Tobias Stolley
IPC分类号： B65G49/06 , B65G49/07 , C23C14/00
CPC分类号： B65G49/065 , B65G49/063 , B65G2249/02 , B65G2249/045 , Y10S414/139
摘要： An arrangement for transporting a flat substrate through a coating installation, wherein the comprises, e.g., several and different sputter cathodes, to which the flat substrate, for example a glass pane, is transported one after the other in vacuo. So that no abrasion is generated between glass pane and contact, the glass pane is kept spaced apart from the contact by means of gas pressure. The gas pressure is herein built up through relatively few and small holes in a gas channel. Since during flooding of the coating installation to atmospheric pressure or during evacuation, due to the small holes, no fast pressure equalization between gas channel and the remaining coating installation is possible, the gas channel is decoupled in terms of gas from the remaining coating installation and provided with a separate gas line, via which gas can be introduced into the gas channel or pumped out of it.
摘要翻译：用于将平坦基板输送通过涂布设备的布置，其中包括例如几个和不同的溅射阴极，平板基板（例如玻璃板）在其中真空地一个接一个地输送到该喷涂阴极。因此，玻璃板和接触件之间不会产生磨损，玻璃板通过气体压力与接触件保持间隔开。气体压力通过气体通道中相对较少和小的孔形成。由于涂层装置在大气压下或排空过程中，由于小孔，气体通道和剩余的涂层装置之间无法实现快速压力平衡，所以气体通道与剩余涂层装置的气体相分离，设置有单独的气体管线，通过该气体管线可以将气体引入气体通道中或从其中泵出。

6. 发明申请

US20090260566A1 MASK SUPPORT, MASK ASSEMBLY, AND ASSEMBLY COMPRISING A MASK SUPPORT AND A MASK 审中-公开
标题翻译： MASK支持，MASK大会和组装包括一个MASK支持和一个MASK
公开(公告)号：US20090260566A1
公开(公告)日：2009-10-22
申请号：US12244488
申请日：2008-10-02
申请人： Heike Landgraf , Uwe Schuessler , Stefan Bangert
发明人： Heike Landgraf , Uwe Schuessler , Stefan Bangert
IPC分类号： B05C11/00
CPC分类号： C23C14/042 , B05C21/005 , C23C14/04 , G03F7/12 , H05B33/10 , Y10T29/49826 , Y10T29/49863
摘要： A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.
摘要翻译：面罩支撑件10包括框架元件20和弹性元件30.弹性元件30固定到框架元件20.弹性元件30是由柔性材料整体形成的部件。它包括杠杆或臂部分37，其具有从臂部分37的自由端以大约90°的角度延伸的第一接合突出部38。由薄金属箔制成，以及连接元件42.连接元件42包括用于与弹性元件30的接合突起38接合的接合部分43.掩模41可以附着/拉伸到掩模支撑件10以及以便从面罩支撑件10舒适地脱离。

7. 发明授权

US08686819B2 Magnetic holding device and method for holding a substrate 有权
标题翻译：磁保持装置及保持基板的方法
公开(公告)号：US08686819B2
公开(公告)日：2014-04-01
申请号：US12818392
申请日：2010-06-18
申请人： Uwe Schuessler , Stefan Bangert , Heike Landgraf
发明人： Uwe Schuessler , Stefan Bangert , Heike Landgraf
IPC分类号： H01F7/20 , H01F7/00
CPC分类号： G03F7/70858 , G03F7/707
摘要： A magnetic holding device is adapted for holding a mask during processing of a substrate. The magnetic holding device includes a substrate carrier which is adapted for receiving the substrate to be processed. The substrate carrier includes a permanent magnet adapted for generating a first magnetic field for holding the mask. Furthermore, the substrate carrier includes a solenoid which is adapted for generating a second magnetic field adapted for at least partially compensating the first magnetic field. In case the first magnetic field is compensated, at least partially, by means of the second magnetic field, the mask is released from the substrate carrier.
摘要翻译：磁性保持装置适于在基板的加工期间保持掩模。磁保持装置包括适于接收待处理基板的基板载体。衬底载体包括适于产生用于保持掩模的第一磁场的永磁体。此外，衬底载体包括螺线管，螺线管适于产生适于至少部分地补偿第一磁场的第二磁场。在通过第二磁场至少部分补偿第一磁场的情况下，掩模从衬底载体释放。

8. 发明申请

US20110126402A1 METHODS OF AND FACTORIES FOR THIN-FILM BATTERY MANUFACTURING 有权
标题翻译：薄膜电池制造方法与工艺
公开(公告)号：US20110126402A1
公开(公告)日：2011-06-02
申请号：US12882002
申请日：2010-09-14
申请人： Byung-Sung Kwak , Stefan Bangert , Dieter Haas , Omkaram Nalamasu
发明人： Byung-Sung Kwak , Stefan Bangert , Dieter Haas , Omkaram Nalamasu
IPC分类号： B23P19/00 , C23C16/44
CPC分类号： H01M10/0404 , H01M4/621 , H01M6/40 , H01M10/052 , H01M10/0585 , Y02E60/122 , Y02P70/54 , Y10T29/52
摘要： Methods of and factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A factory includes one or more tool sets for fabricating a thin-film battery.
摘要翻译：描述了薄膜电池制造的方法和工厂。一种方法包括制造薄膜电池的操作。工厂包括用于制造薄膜电池的一个或多个工具组。

9. 发明申请

US20050263078A1 Drive mechanism for a vacuum treatment apparatus 失效
标题翻译：真空处理设备的驱动机构
公开(公告)号：US20050263078A1
公开(公告)日：2005-12-01
申请号：US10898018
申请日：2004-07-23
申请人： Ralph Lindenberg , Michael Konig , Uwe Schussler , Stefan Bangert
发明人： Ralph Lindenberg , Michael Konig , Uwe Schussler , Stefan Bangert
IPC分类号： C23C14/50 , C23C14/56 , C23C16/44 , C23C16/54 , H01L21/00 , H01L21/677 , C23C16/00
CPC分类号： C23C14/568 , C23C16/54 , H01L21/67196 , H01L21/67742
摘要： The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A-A) from an entrance airlock to an exit airlock. A stationary supporting column (1) is disposed in the center and on it a rotatory drive chamber (6) is borne which has control rods (9) for a rotation and a radial displacement of the substrate holders. In the rotatory drive chamber (6), a motor (4) and rotatory displacement drives for the control rods (9) are arranged on the supporting column (1), the control rods being in active connection each with a corresponding substrate holder. To solve the problem of carrying substrates through the vacuum treatment apparatus, even substrates of great area, smoothly, at a slight angle to the vertical, not fastened to the substrate holders, it is provided that a) the motor (4) is joined to a stationary bearing carrier (5) in which a rotatory star-shaped array of cantilevers (14) is mounted, b) the cantilevers (14) are articulated at one end to bell-crank levers (16), each of which has a pivot pin (17), c) the other end of each of the bell-crank levers (16) is articulated to one of the control rods (9), and that d) the pivot pins (17) of the bell-crank levers (16) are guided in a first stationary radial cam (11) whose shape determines the radial movements of the control rods (9). A periodic, variable superposition of the radial movements is performed by variable tangential movements produced by a second stationary radial cam (12) with a bell-crank lever which is joined by a link (24) to the drive chamber (6).
摘要翻译：本发明涉及一种用于真空处理设备的驱动机构，通过该驱动机构，基板保持器可以从轴线（A-A）从入口气闸传送到出口气闸。固定支撑柱（1）设置在中心，并且在其上具有旋转驱动室（6），其具有用于基板保持器的旋转和径向位移的控制杆（9）。在旋转驱动室（6）中，在支撑柱（1）上布置有用于控制杆（9）的马达（4）和旋转位移驱动装置，控制杆主动地连接到相应的基板支架。为了解决通过真空处理装置承载基板的问题，即使是没有紧固到基板保持器上的大面积，平滑地，与垂直方向成微小角度的基板，即使将a）马达（4）接合到固定轴承架（5），其中安装有悬臂（14）的旋转星形阵列，b）悬臂（14）在一端铰接到钟形曲柄杆（16），每一个都具有枢轴销（17），c）每个钟形杠杆（16）的另一端铰接到控制杆（9）中的一个，并且d）钟形曲柄杆（10）的枢轴销（17） 16）在其形状确定控制杆（9）的径向移动的第一固定径向凸轮（11）中引导。径向运动的周期性可变叠加通过由具有连杆（24）连接到驱动室（6）的钟形曲柄杆的第二静止径向凸轮（12）产生的可变切向运动来执行。

10. 发明申请

US20140050865A1 APPARATUS AND METHOD FOR COATING USING A HOT WIRE 审中-公开
标题翻译：使用热丝涂装的装置和方法
公开(公告)号：US20140050865A1
公开(公告)日：2014-02-20
申请号：US14005115
申请日：2011-03-22
申请人： Stefan Bangert , Werner Guhr , Stefan Keller , Michael König
发明人： Stefan Bangert , Werner Guhr , Stefan Keller , Michael König
IPC分类号： C23C16/448
CPC分类号： C23C16/448 , C23C16/44
摘要： A coating apparatus (700) is provided including: (i) a vacuum chamber (16) for coating a substrate (12) with coating material heated by a wire (14); and (ii) an actuator system (18) including a motorised drive (20). The actuator system is configured for tensioning the wire (14) during the coating. Furthermore, a method of manufacturing a coated substrate (12) is provided including: (i) tensioning a wire (14) by an actuator system (18) including a motorised drive; and (ii) coating the substrate (12) with a coating material (28), the coating being under vacuum conditions. The coating includes heating at least a portion (14a) of the wire (14) to an operating temperature for inducing a temperature increase in the coating material before the coating material is deposited over substrate (12).
摘要翻译：提供一种涂覆设备（700），包括：（i）用于通过由导线（14）加热的涂层材料涂覆基底（12）的真空室（16）; 和（ii）包括电动驱动器（20）的致动器系统（18）。致动器系统构造成在涂覆期间张紧线（14）。此外，提供一种制造涂覆基板（12）的方法，包括：（i）通过包括电动驱动器的致动器系统（18）张紧导线（14）; 和（ii）用涂料（28）涂覆基材（12），该涂层处于真空条件下。所述涂层包括将所述金属丝（14）的至少一部分（14a）加热到在所述涂层材料沉积在基底（12）上之前引起涂层材料升温的操作温度。

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