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    • 3. 发明授权
    • Photoresist materials and processes of using with photosensitive
naphthoquinone diazides and nitrones
    • 光敏材料和使用光敏萘醌二氮嗪和硝酮的方法
    • US4411978A
    • 1983-10-25
    • US885998
    • 1978-03-13
    • Urbain L. LaridonHendrik E. KokelenbergRafael P. Samijn
    • Urbain L. LaridonHendrik E. KokelenbergRafael P. Samijn
    • G03C1/00G03C1/72G03F7/004G03F7/038G03F7/095G03F7/20H01L21/027H05K3/00G03C1/54G03C1/60G03C5/00
    • G03F7/095
    • A photosensitive recording material which includes in a supported layer a mixture of photosensitive substances in admixture with one or more polymers that are soluble in an alkaline aqueous liquid, characterized in that such mixture of photosensitive substances essentially consists of:(A) at least one photosensitive nitrone of the formula: ##STR1## in which: R is an aromatic hydrocarbon group including a substituted aromatic hydrocarbon group,R.sup.1 is an aromatic or heterocyclic group including these groups in substituted form,n represents zero or 1, and(B) at least one photosensitive naphthoquinone-(1,2)-diazide (2) compound, that has a higher ultraviolet absorption in the wavelength range of 350 to 400 nm and a higher visible light absorption above 400 nm than each such nitrone has, the (A) and (B) compounds being present in such relative quantities to each other that the layer exhibits a relative decrease in solubility in an alkaline aqueous liquid upon a sufficient exposure to a UV-light and a relative increase in solubilty in such alkaline aqueous liquid upon a lesser exposure to visible light or to UV-light.
    • 一种感光记录材料,其在支撑层中包含与可溶于碱性含水液体的一种或多种聚合物混合的感光性物质的混合物,其特征在于,感光物质的这种混合物基本上由以下组成:(A)至少一种感光性 硝基酮,其结构式如下:其中R为含有取代芳香族烃基的芳香族烃基,R 1为包含取代基的这些基团的芳香族或杂环基,n表示0或1,(B)至少 (A)的光敏萘醌 - (1,2) - 二叠氮化物(2)化合物在350〜400nm的波长范围内具有较高的紫外线吸收,高于400nm的可见光吸收, 和(B)化合物以彼此相对的量存在,使得当充分暴露于UV时,该层在碱性水性液体中表现出相对降低的溶解度 并且在较少的可见光或紫外线照射下,这种碱性水性液体的溶解度相对增加。