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    • 3. 发明授权
    • Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers
    • 用于检测压力型流量控制器孔堵塞的方法和装置
    • US06302130B1
    • 2001-10-16
    • US09529985
    • 2000-07-18
    • Tadahiro OhmiSeiichi IidaSatoshi KagatsumeJun HiroseKouji NishinoNobukazu IkedaMichio YamajiRyousuke DohiKazuhiro YoshikawaMutsunori KoyomogiTomio UnoEiji IdetaTakashi Hirose
    • Tadahiro OhmiSeiichi IidaSatoshi KagatsumeJun HiroseKouji NishinoNobukazu IkedaMichio YamajiRyousuke DohiKazuhiro YoshikawaMutsunori KoyomogiTomio UnoEiji IdetaTakashi Hirose
    • F17D116
    • G05D7/0635Y10T137/0396Y10T137/7759Y10T137/7761Y10T137/8326
    • A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
    • 一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置,以延长流量控制单元的寿命并提高其安全性。 检测压力型流量控制器中的孔口堵塞的装置具有控制阀(CV),用于测量其上游压力P1的孔口(2),压力检测器(14)和流量设定电路 (32)其中,在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下,下游流量QC用等式QC = KP1(K =常数)计算,并且其中控制阀(CV)为 由计算流量QC和设定流量QS之间的差分信号QY控制。 该装置包括:存储存储器M,存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y(t),其中孔口(2)没有堵塞 ,用于确定上游压力P1的压力衰减数据P(t)的压力检测器(14),其中流量从高设定流量QSH切换到具有孔口(2)的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y(t)检测压力衰减数据P(t)的中央处理单元CPU以及当压力衰减数据P(t)偏离时引起堵塞报警的报​​警电路(46) 从标准压力衰减数据Y(t)到特定程度或以上。
    • 8. 发明申请
    • Fluid Control Device
    • 流体控制装置
    • US20090250126A1
    • 2009-10-08
    • US11991744
    • 2006-07-21
    • Mutsunori Koyomogi
    • Mutsunori Koyomogi
    • F16K11/22
    • F16K27/003Y10T137/87684
    • There is provided a fluid control device having no dead volume.A fluid flow path is constituted by a loop-shaped flow-path portion L, and a first inlet flow-path portion B1, a second inlet flow-path portion B2 and a common outlet flow-path portion B3 which are communicated with a first inlet A1, a second inlet A2 and a common outlet A3 at predetermined portions P1, P2 and P3 of the loop-shaped flow-path portion L. There are provided a first shut-off valve V1 for opening and closing the first inlet flow-path portion B1 and a second shut-off valve V2 for opening and closing the second inlet flow-path portion B2. Accordingly, the first fluid which has flowed into the first inlet A1 and reached the loop-shaped flow-path portion L and the second fluid which has flowed into the second inlet A2 and reached the loop-shaped flow-path portion L are flowed through the loop-shaped flow-path portion L such that each of the first and second fluids are divided into two parts and thereafter are ejected from the common outlet A3.
    • 提供了没有死体积的流体控制装置。 流体流动路径由环形流路部分L和第一入口流动路径部分B1,第二入口流动路径部分B2和公共出口流动路径部分B3构成,第一入口流动路径部分B1和公共出口流动路径部分B3与第一 入口A1,第二入口A2和公共出口A3在环状流路部分L的预定部分P1,P2和P3处设置。第一截止阀V1用于打开和关闭第一入口流动通道, 路径部分B1和用于打开和关闭第二入口流动路径部分B2的第二截止阀V2。 因此,已经流入第一入口A1并到达环形流路部分L的第一流体和流入第二入口A2并到达环形流路部分L的第二流体流过 环形流路部分L使得第一和第二流体中的每一个被分成两部分,然后从公共出口A3排出。
    • 9. 发明申请
    • Fluid control device
    • 流体控制装置
    • US20060096533A1
    • 2006-05-11
    • US10537251
    • 2003-10-31
    • Yasunori MochizukiMegumu MakinoMutsunori Koyomogi
    • Yasunori MochizukiMegumu MakinoMutsunori Koyomogi
    • H01L21/306C23C16/00
    • F16K27/003
    • A body 2 comprises a center channel block 11 and side channel blocks 12, 13. Each of shut-off valves 5, 6 is removably mounted on both the center channel block and one of the side channel blocks. The center channel block has Y-shaped channels 22 identical in number with the number of the subgas inlets 23 and each comprising one common channel 22a and two branched channels 22b, 22c. The common channel 22a of the Y-shaped channel 22 has an opening serving as the subgas inlet 23 and the branched channels 22b, 22c of the Y-shaped channel 22 communicate with the inlet ports of the corresponding pair of shut-off valves 5, 6 to thereby provide the subgas inflow channels. The main gas channel 18 and the main channel communication passageways 19 are formed in one of the side channel blocks 12, and the vent gas channel 20 and the vent channel communication passageways 21 are formed on the other side channel block 13.
    • 主体2包括中心通道块11和侧通道块12,13。 每个截止阀5,6可拆卸地安装在中心通道块和侧通道块之一上。 中心通道块具有与子气体入口23的数量相同的Y形通道22,并且每个包括一个公共通道22a和两个分支通道22b,22c。 Y形通道22的公共通道22a具有用作副气体入口23的开口,Y形通道22的分支通道22b,22c与相应的一对关闭的入口连通 阀5,6,从而提供沼气流入通道。 主气体通道18和主通道连通通道19形成在一个侧通道块12中,并且排气通道20和通气通道连通通道21形成在另一侧通道块13上。
    • 10. 发明授权
    • Control valve
    • 控制阀
    • US5427357A
    • 1995-06-27
    • US209906
    • 1994-03-14
    • Mutsunori KoyomogiKunihiko DaidoMasahiko NakazawaYukio MinamiMasahiko SogaoKazuhiro YoshikawaShuhei OgawaTetsuya Kojima
    • Mutsunori KoyomogiKunihiko DaidoMasahiko NakazawaYukio MinamiMasahiko SogaoKazuhiro YoshikawaShuhei OgawaTetsuya Kojima
    • F16K1/10F16K41/10F16K3/00
    • F16K41/10F16K1/10Y10T137/6416
    • A control valve comprises a valve body having a fluid channel and a valve seat; a valve operating part; a valve stem supporting member having its upper end fixed to the valve operating part and its lower end fixed to the valve body; a valve stem penetrating the valve stem supporting member and having its upper end part connected to the valve operating part and its lower end part entering the valve body, the valve stem being movable upward or downward by the valve operating part; and a valve element attached to the lower end of the valve stem. The valve element is moved upward or downward by moving the valve stem upward or downward, the valve element being brought into contact with and seated in the valve seat to close a fluid channel as it is moved downward, the valve element being detached from the valve seat to open the fluid channel as it is moved upward. The valve stem supporting member has an upper tubular body and a lower tubular body, the upper tubular body having its upper end fixed to the valve operating part and its lower end detached from the valve body, the lower tubular body having its lower end fixed to the valve body and its upper end detached from the valve operating part, the two tubular bodies being spaced apart each other, the lower end part of the upper tubular body and the upper end part of the lower tubular body being connected by a connecting member.
    • 控制阀包括具有流体通道和阀座的阀体; 阀门操作部分; 阀杆支撑构件,其上端固定到阀操作部分,其下端固定到阀体; 阀杆贯穿阀杆支撑构件,其上端部分连接到阀操作部分,其下端部分进入阀体,阀杆可由阀操作部件向上或向下移动; 以及附接到阀杆的下端的阀元件。 阀元件通过向上或向下移动阀杆而向上或向下移动,阀元件与阀座接触并安置在阀座中,以在其向下移动时闭合流体通道,阀元件从阀门拆下 座椅向上移动以打开流体通道。 阀杆支撑构件具有上管状体和下管状体,上管状体的上端固定到阀操作部分,其下端与阀体分离,下管状体的下端固定到 阀体及其上端与阀操作部分脱离,两个管状体彼此间隔开,上管状体的下端部和下管状体的上端部通过连接部件连接。