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1. 发明申请

US20060066176A1 Piezoelectric/electrostrictive film type device and method of manufacturing the same 有权
标题翻译：压电/电致伸缩薄膜型器件及其制造方法
公开(公告)号：US20060066176A1
公开(公告)日：2006-03-30
申请号：US11233391
申请日：2005-09-22
申请人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
发明人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
IPC分类号： H01L41/18
CPC分类号： C04B35/495 , C04B2235/3201 , C04B2235/3203 , C04B2235/3251 , C04B2235/3291 , C04B2235/3294 , C04B2235/656 , C04B2235/6567 , C04B2235/785 , C04B2235/786 , H01L41/0973 , H01L41/1873 , H01L41/314 , Y10T29/42
摘要： There is disclosed a piezoelectric/electrostrictive film type device 1 provided with: a thin substrate 2 made of a ceramic; and a piezoelectric/electrostrictive operating portion 5 disposed on the substrate 2 and constituted by successively laminating a lower electrode film 3a, a piezoelectric/electrostrictive film 4 containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film 3b. The piezoelectric/electrostrictive composition contains one or more alkali metal elements selected from the group consisting of lithium (Li), potassium (K), and sodium (Na), and one or more metal elements selected from the group consisting of niobium (Nb), tantalum (Ta), antimony (Sb), and silver (Ag) (however, surely containing niobium (Nb), and circle equivalent diameters of 90% or more of the large number of crystal particles are in a range of 0.3 to 50 μm. It is possible to exhibit a superior piezoelectric/electrostrictive characteristic without containing lead (Pb) and obtain an especially large displacement.
摘要翻译：公开了一种压电/电致伸缩膜型器件1，其设置有：由陶瓷制成的薄基片2; 以及压电/电致伸缩操作部分5，其设置在基板2上，并且通过连续地层叠下电极膜3a，包含大量由压电/电致伸缩组合物构成的晶体颗粒和上电极的压电/电致伸缩膜4 电影3 b。压电/电致伸缩组合物含有一种或多种选自锂（Li），钾（K）和钠（Na）的碱金属元素，以及一种或多种选自铌（Nb），钽（Ta），锑（Sb）和银（Ag）（然而，确实含有铌（Nb），圆当量直径为90％以上的大量结晶粒子的范围为0.3〜50 可以显示出优异的压电/电致伸缩特性，而不含铅（Pb），并获得特别大的位移。

2. 发明申请

US20080095927A1 PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE ELEMENT AND MANUFACTURING METHOD THEREOF 有权
标题翻译：压电/电解膜型元件及其制造方法
公开(公告)号：US20080095927A1
公开(公告)日：2008-04-24
申请号：US11955716
申请日：2007-12-13
申请人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
发明人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
IPC分类号： B05D5/12
CPC分类号： C04B35/495 , C04B2235/3201 , C04B2235/3203 , C04B2235/3251 , C04B2235/3291 , C04B2235/3294 , C04B2235/656 , C04B2235/6567 , C04B2235/785 , C04B2235/786 , H01L41/0973 , H01L41/1873 , H01L41/314 , Y10T29/42
摘要： A piezoelectric/electrostrictive film type device including a thin substrate made of ceramic and a piezoelectric/electrostrictive operating portion disposed on the substrate and constituted by successively laminating a lower electrode film, a piezoelectric/electrostrictive film containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film. The piezoelectric/electrostrictive composition contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of 90% or more of the large number of crystal particles are in a range of 0.3 to 50 μm.
摘要翻译：一种压电/电致伸缩薄膜型器件，包括由陶瓷制成的薄基片和压电/电致伸缩操作部分，该压电/电致伸缩操作部分设置在基片上，并由下电极薄膜，含有大量由压电/电致伸缩组合物和上电极膜。压电/电致伸缩组合物包含一种或多种选自锂，钾和钠的碱金属元素，以及一种或多种选自铌，钽，锑和银的金属元素。大量晶体粒子的90％以上的圆当量直径在0.3〜50μm的范围内。

3. 发明授权

US07943192B2 Piezoelectric/electrostrictive film type element and manufacturing method thereof 有权
标题翻译：压电/电致伸缩膜型元件及其制造方法
公开(公告)号：US07943192B2
公开(公告)日：2011-05-17
申请号：US11955716
申请日：2007-12-13
申请人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
发明人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
IPC分类号： B05D5/12
CPC分类号： C04B35/495 , C04B2235/3201 , C04B2235/3203 , C04B2235/3251 , C04B2235/3291 , C04B2235/3294 , C04B2235/656 , C04B2235/6567 , C04B2235/785 , C04B2235/786 , H01L41/0973 , H01L41/1873 , H01L41/314 , Y10T29/42
摘要： A piezoelectric/electrostrictive film type device including a thin substrate made of ceramic and a piezoelectric/electrostrictive operating portion disposed on the substrate and constituted by successively laminating a lower electrode film, a piezoelectric/electrostrictive film containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film. The piezoelectric/electrostrictive composition contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of 90% or more of the large number of crystal particles are in a range of 0.3 to 50 μm.
摘要翻译：一种压电/电致伸缩薄膜型器件，包括由陶瓷制成的薄基片和压电/电致伸缩操作部分，该压电/电致伸缩操作部分设置在基片上，并由下电极薄膜，含有大量由压电/电致伸缩组合物和上电极膜。压电/电致伸缩组合物包含一种或多种选自锂，钾和钠的碱金属元素，以及一种或多种选自铌，钽，锑和银的金属元素。大量晶体粒子的90％以上的圆当量直径在0.3〜50μm的范围内。

4. 发明授权

US07332851B2 Piezoelectric/electrostrictive film type device and method of manufacturing the same 有权
标题翻译：压电/电致伸缩薄膜型器件及其制造方法
公开(公告)号：US07332851B2
公开(公告)日：2008-02-19
申请号：US11233391
申请日：2005-09-22
申请人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
发明人： Tsutomu Nanataki , Hirofumi Yamaguchi , Toshikatsu Kashiwaya , Takaaki Koizumi
IPC分类号： H01L41/187
CPC分类号： C04B35/495 , C04B2235/3201 , C04B2235/3203 , C04B2235/3251 , C04B2235/3291 , C04B2235/3294 , C04B2235/656 , C04B2235/6567 , C04B2235/785 , C04B2235/786 , H01L41/0973 , H01L41/1873 , H01L41/314 , Y10T29/42
摘要： A piezoelectric/electrostrictive film device is provided including a thin ceramic substrate and a piezoelectric/electrostrictive operating portion disposed on the substrate. The piezoelectric/electrostrictive operating portion includes a lower electrode film, a piezoelectric/electrostrictive film including a large number of crystal particles having a piezoelectric/electrostrictive composition, and an upper electrode film successively laminated on the substrate. The piezoelectric/electrostrictive composition excludes lead and contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of at least 90% of the crystal particles in the piezoelectric/electrostrictive film are in a range of 0.3 to 50 μm.
摘要翻译：提供一种压电/电致伸缩膜装置，其包括薄陶瓷基板和设置在基板上的压电/电致伸缩操作部分。压电/电致伸缩操作部分包括下电极膜，包括大量具有压电/电致伸缩组合物的晶体颗粒的压电/电致伸缩膜以及依次层压在基板上的上电极膜。压电/电致伸缩组合物不包括铅，并含有一种或多种选自锂，钾和钠的碱金属元素，以及一种或多种选自铌，钽，锑和银的金属元素。压电/电致伸缩膜中晶体颗粒的至少90％的圆当量直径在0.3-50μm的范围内。

5. 发明申请

US20060138907A1 Production methods of dielectric layer and dielectric element, dielectric element, and piezoelectric transformer 有权
标题翻译：电介质层和电介质元件，介质元件和压电变压器的生产方法
公开(公告)号：US20060138907A1
公开(公告)日：2006-06-29
申请号：US11301711
申请日：2005-12-13
申请人： Takaaki Koizumi , Hirofumi Yamaguchi , Iwao Ohwada , Tsutomu Nanataki
发明人： Takaaki Koizumi , Hirofumi Yamaguchi , Iwao Ohwada , Tsutomu Nanataki
IPC分类号： H01L41/08 , H01L41/04
CPC分类号： H01L41/107 , H01L41/273 , H01L41/43
摘要： Heat-treating niobium pentoxide powder causes the powder to become agglutinated and bonded while phase transformation from an orthorhombic crystal to a monoclinic crystal occurs and resultantly bar-shaped c-axis-oriented niobium pentoxide particles, the longitudinal direction of which is identical to the c axis direction, are formed. A slurry is produced by mixing the c-axis-oriented niobium pentioxide particles with lithium carbonate and a binder and is molded as a tape by a doctor blade method to form a sheet-shaped compact. By so doing, bar-shaped or columnar c-axis oriented niobium pentoxide particles are aligned in the direction of forming the tape and in the meantime a compact filled with lithium carbonate is produced. By heating the compact, a dielectric layer including a c-axis-oriented lithium niobate polycrystalline material is produced.
摘要翻译：热处理五氧化二铌粉末会导致粉末凝结和结合，同时发生从正交晶体到单斜晶体的相转变，导致棒形c轴取向的五氧化二铌颗粒，其纵向方向与c相同轴方向。通过将c轴取向的二氧化铌颗粒与碳酸锂和粘合剂混合制成浆料，并通过刮刀法将其模制成带，以形成片状压块。通过这样做，棒状或柱状的c轴取向的五氧化二铌颗粒沿着形成带的方向排列，同时产生填充有碳酸锂的压块。通过加热该压块，产生包含c轴取向的铌酸锂多晶材料的电介质层。

6. 发明授权

US07651655B2 Production methods of dielectric layer and dielectric element, dielectric element, and piezoelectric transformer 有权
标题翻译：电介质层和电介质元件，介质元件和压电变压器的生产方法
公开(公告)号：US07651655B2
公开(公告)日：2010-01-26
申请号：US11301711
申请日：2005-12-13
申请人： Takaaki Koizumi , Hirofumi Yamaguchi , Iwao Ohwada , Tsutomu Nanataki
发明人： Takaaki Koizumi , Hirofumi Yamaguchi , Iwao Ohwada , Tsutomu Nanataki
IPC分类号： H01L41/00 , H01L41/22
CPC分类号： H01L41/107 , H01L41/273 , H01L41/43
摘要： A method of producing a dielectric layer made of a polycrystalline dielectric material having anisotropy in the coefficient of thermal expansion is provided, including the steps of providing a raw material powder, and heat treating the raw material powder at least to a temperature sufficient to cause a phase change from a first crystal orientation at room temperature to a different crystal orientation to provide an aggregate of oriented raw material particles having the same chemical composition as the raw material powder but having the different crystal orientation. The method also includes a step of forming a compact from the aggregate of oriented raw material particles, including a step of applying a shearing force to the aggregate and firing the compact to form the dielectric layer.
摘要翻译：提供一种制造由具有各向异性热膨胀系数的多晶介电材料制成的电介质层的方法，包括提供原料粉末和将原料粉末热处理至少达到足以引起在室温下从第一晶体取向相变到不同的晶体取向，以提供与原料粉末具有相同化学成分但具有不同晶体取向的取向原料颗粒的聚集体。该方法还包括从定向原料颗粒的聚集体形成压块的步骤，包括向聚集体施加剪切力并焙烧该压块以形成电介质层的步骤。

7. 发明授权

US08080923B2 Piezoelectric/electrostrictive membrane element 有权
标题翻译：压电/电致伸缩膜元件
公开(公告)号：US08080923B2
公开(公告)日：2011-12-20
申请号：US12316079
申请日：2008-12-09
申请人： Takaaki Koizumi , Toshikatsu Kashiwaya
发明人： Takaaki Koizumi , Toshikatsu Kashiwaya
IPC分类号： H01L41/187
CPC分类号： C04B35/493 , C04B35/6262 , C04B2235/3206 , C04B2235/3251 , C04B2235/3279 , C04B2235/5445 , C04B2235/6562 , C04B2235/6565 , C04B2235/75 , C04B2235/76 , C04B2235/761 , C04B2235/762 , C04B2235/765 , C04B2235/768 , H01L41/0973 , H01L41/1876 , H01L41/314 , H01L41/43
摘要： A piezoelectric/electrostrictive membrane element is provided, including a ceramic substrate, a membranous piezoelectric/electrostrictive portion including a piezoelectric/electrostrictive body made of a large number of crystal particles having a lead zirconate titanate based piezoelectric/electrostrictive ceramic composition, and membranous electrodes electrically connected to the piezoelectric/electrostrictive portion. The crystal particles include crystal main body portions, and surface layer portions arranged in at least a part of the outer periphery of crystal main body portions and having a crystal structure which is different from that of the crystal main body portions. The piezoelectric/electrostrictive portion is bonded in a solid state to the substrate directly or via electrodes.
摘要翻译：提供一种压电/电致伸缩膜元件，包括陶瓷基板，膜压电/电致伸缩部分，其包括由具有锆钛酸铅基压电/电致伸缩陶瓷组合物的大量晶体颗粒制成的压电/电致伸缩体，以及电极连接到压电/电致伸缩部分。晶体颗粒包括晶体主体部分和布置在晶体主体部分的外周的至少一部分上并具有与晶体主体部分不同的晶体结构的表面层部分。压电/电致伸缩部分以固态直接或通过电极接合到衬底上。

8. 发明申请

US20090152996A1 Piezoelectric/electrostrictive membrane element 有权
标题翻译：压电/电致伸缩膜元件
公开(公告)号：US20090152996A1
公开(公告)日：2009-06-18
申请号：US12316079
申请日：2008-12-09
申请人： Takaaki Koizumi , Toshikatsu Kashiwaya
发明人： Takaaki Koizumi , Toshikatsu Kashiwaya
IPC分类号： H01L41/04 , H01L41/09
CPC分类号： C04B35/493 , C04B35/6262 , C04B2235/3206 , C04B2235/3251 , C04B2235/3279 , C04B2235/5445 , C04B2235/6562 , C04B2235/6565 , C04B2235/75 , C04B2235/76 , C04B2235/761 , C04B2235/762 , C04B2235/765 , C04B2235/768 , H01L41/0973 , H01L41/1876 , H01L41/314 , H01L41/43
摘要： Disclosed is a piezoelectric/electrostrictive membrane element having a large flexural displacement with suppressed disadvantages such as the generation of a micro crack and a lattice defect due to a concentrated stress. The element includes a substrate of a ceramic material, a membranous piezoelectric/electrostrictive portion including a piezoelectric/electrostrictive body constituted of a large number of crystal particles 10, 20 of a lead zirconate titanate based piezoelectric/electrostrictive ceramic composition, and membranous electrodes electrically connected to the piezoelectric/electrostrictive portion. The crystal particles 10, 20 include crystal main body portions 13, 23, and surface layer portions 15, 25 arranged in at least a part of the outer periphery of crystal main body portions 13, 23 and having a crystal structure which is different from that of the crystal main body portions 13, 23, and the piezoelectric/electrostrictive portion is bonded in a solid state to the substrate directly or via electrodes.
摘要翻译：公开了一种具有大弯曲位移的压电/电致伸缩膜元件，其具有诸如由于集中应力而产生微裂纹和晶格缺陷等缺点。该元件包括陶瓷材料的基材，膜压电/电致伸缩部分，包括由锆钛酸铅基压电/电致伸缩陶瓷组合物的大量晶体颗粒10,20构成的压电/电致伸缩体，以及电连接的膜电极到压电/电致伸缩部分。晶体颗粒10,20包括晶体主体部分13,23和布置在晶体主体部分13,23的外周的至少一部分上的表面层部分15,25，并且具有不同于晶体主体部分13,23的晶体结构。的晶体主体部分13,23，并且压电/电致伸缩部分以固态直接或通过电极接合到衬底。

9. 发明申请

US20060119229A1 Piezoelectric/electrostrictive device and method for manufacturing the same 失效
标题翻译：压电/电致伸缩器件及其制造方法
公开(公告)号：US20060119229A1
公开(公告)日：2006-06-08
申请号：US11273828
申请日：2005-11-15
申请人： Takaaki Koizumi , Hirofumi Yamaguchi
发明人： Takaaki Koizumi , Hirofumi Yamaguchi
IPC分类号： H01L41/18
CPC分类号： H01L41/314 , H01L41/0973 , H01L41/43 , Y10T29/42
摘要： A piezoelectric/electrostrictive device includes a substrate, an electrode layer adhering to the surface of the substrate, and a piezoelectric/electrostrictive layer adhering to the electrode layer. The electrode layer is deformed by high-temperature creep. A method for manufacturing the piezoelectric/electrostrictive device includes the cooling step of cooling the piezoelectric/electrostrictive device after firing at a temperature decreasing rate of at least the rate of natural cooling. The cooling step includes the sub-step of holding the piezoelectric/electrostrictive device at a constant temperature lower than the firing temperature. The holding temperature is set within the range of temperatures at which high-temperature creep occurs in the metal of the electrode layer. Thus, residual stress in the piezoelectric/electrostrictive layer can be reduced.
摘要翻译：压电/电致伸缩器件包括衬底，附着于衬底表面的电极层和粘附到电极层的压电/电致伸缩层。电极层由高温蠕变变形。制造压电/电致伸缩器件的方法包括：以至少自然冷却速率的降温速率在烧制后冷却压电/电致伸缩器件的冷却步骤。冷却步骤包括将压电/电致伸缩装置保持在比烧制温度低的恒定温度的子步骤。保持温度设定在电极层的金属中发生高温蠕变的温度的范围内。因此，可以减小压电/电致伸缩层中的残余应力。

10. 发明授权

US06531070B1 Piezoelectric body 有权
标题翻译：压电体
公开(公告)号：US06531070B1
公开(公告)日：2003-03-11
申请号：US09643116
申请日：2000-08-21
申请人： Hirofumi Yamaguchi , Takaaki Koizumi
发明人： Hirofumi Yamaguchi , Takaaki Koizumi
IPC分类号： C04B3547
CPC分类号： H01L41/43 , C04B35/475 , C04B35/6264 , C04B35/62675 , C04B2235/3201 , C04B2235/5436 , C04B2235/604 , C04B2235/666 , C04B2235/768 , C04B2235/94 , H01L41/1871
摘要： A piezoelectric body is provided, including (Bi½Na½)TiO3 as a main component which is obtained by forming and sintering powders. A heterogeneous phase, other than (Bi½Na½)TiO3 system perovskite phase, in the powders has a peak ratio relative to the strongest peak of the perovskite phase of 5% or lower as determined by powder X-ray diffraction. As a result, the frequency of the dielectric breakdown in a sintered piezoelectric body during polarization can be dramatically reduced to 0.1 to 2% of that experienced in prior art compositions The manufacturing yield can be increased, manufacturing costs can be reduced, and the overall reliability of products manufactured therefrom can be improved.
摘要翻译：提供了一种压电体，其包括通过形成和烧结粉末而获得的（Bi 1/2 Na 1/2）TiO 3作为主要成分。如粉末X射线衍射测定，粉末中除（Bi 1/2 Na 1/2）TiO 3体系钙钛矿相以外的非均相相对于钙钛矿相的最强峰为5％以下。结果，在极化期间，烧结的压电体中的电介质击穿的频率可以显着地降低到现有技术组合中经历的0.1至2％。可以提高制造成品率，降低制造成本和整体可靠性可以提高由其制造的产品。

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