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    • 5. 发明申请
    • Piezoelectric/electrostrictive device and method for manufacturing the same
    • 压电/电致伸缩器件及其制造方法
    • US20060119229A1
    • 2006-06-08
    • US11273828
    • 2005-11-15
    • Takaaki KoizumiHirofumi Yamaguchi
    • Takaaki KoizumiHirofumi Yamaguchi
    • H01L41/18
    • H01L41/314H01L41/0973H01L41/43Y10T29/42
    • A piezoelectric/electrostrictive device includes a substrate, an electrode layer adhering to the surface of the substrate, and a piezoelectric/electrostrictive layer adhering to the electrode layer. The electrode layer is deformed by high-temperature creep. A method for manufacturing the piezoelectric/electrostrictive device includes the cooling step of cooling the piezoelectric/electrostrictive device after firing at a temperature decreasing rate of at least the rate of natural cooling. The cooling step includes the sub-step of holding the piezoelectric/electrostrictive device at a constant temperature lower than the firing temperature. The holding temperature is set within the range of temperatures at which high-temperature creep occurs in the metal of the electrode layer. Thus, residual stress in the piezoelectric/electrostrictive layer can be reduced.
    • 压电/电致伸缩器件包括衬底,附着于衬底表面的电极层和粘附到电极层的压电/电致伸缩层。 电极层由高温蠕变变形。 制造压电/电致伸缩器件的方法包括:以至少自然冷却速率的降温速率在烧制后冷却压电/电致伸缩器件的冷却步骤。 冷却步骤包括将压电/电致伸缩装置保持在比烧制温度低的恒定温度的子步骤。 保持温度设定在电极层的金属中发生高温蠕变的温度的范围内。 因此,可以减小压电/电致伸缩层中的残余应力。
    • 10. 发明申请
    • PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT AND METHOD OF MANUFACTURING THE SAME
    • 压电/电气元件及其制造方法
    • US20120007474A1
    • 2012-01-12
    • US13235578
    • 2011-09-19
    • Takaaki KOIZUMIHideki Shimizu
    • Takaaki KOIZUMIHideki Shimizu
    • H01L41/04
    • H01L41/0533H01L41/23Y10T29/42
    • A piezoelectric/electrostrictive element with improved moisture resistance while having less degradation in its piezoelectric/electrostrictive properties and a method of manufacturing such a piezoelectric/electrostrictive element are provided. A laminated vibrator of a piezoelectric/electrostrictive element has a structure in which an electrode film, a piezoelectric/electrostrictive film, another electrode film, another piezoelectric/electrostrictive film, and another electrode film are laminated one above the other. In the manufacture of the piezoelectric/electrostrictive element, the laminated vibrator and a counter electrode are immersed in an electrodeposition coating fluid containing a coating component so that the electrodeposition coating fluid is brought into contact with the surfaces of the laminated vibrator and the counter electrode. Thereafter, voltage is applied between an internal electrode film and the counter electrode to induce electrophoresis of the coating component toward a surface-exposed defect, whereby the coating material is selectively electrodeposited on the surface-exposed defect.
    • 提供了具有改善的耐湿性同时具有较小的压电/电致伸缩性能降低的压电/电致伸缩元件以及制造这种压电/电致伸缩元件的方法。 压电/电致伸缩元件的叠层振动器具有其中电极膜,压电/电致伸缩膜,另一电极膜,另一压电/电致伸缩膜和另一电极膜层叠的结构。 在压电/电致伸缩元件的制造中,层压振动器和对电极浸渍在含有涂层成分的电沉积涂布液中,使得电沉积涂布液与层叠振动器和对电极的表面接触。 此后,在内部电极膜和对电极之间施加电压,以引起涂层组分向表面暴露的缺陷的电泳,由此将涂层材料选择性地电沉积在表面暴露的缺陷上。