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    • 5. 发明申请
    • Method of forming fine pattern
    • 形成精细图案的方法
    • US20050181304A1
    • 2005-08-18
    • US11057832
    • 2005-02-15
    • Takayuki ArakiTsuneo YamashitaTakuji IshikawaTomohiro YoshidaTakuya HagiwaraTakamitsu Furukawa
    • Takayuki ArakiTsuneo YamashitaTakuji IshikawaTomohiro YoshidaTakuya HagiwaraTakamitsu Furukawa
    • C08F214/18C08F232/08G03C1/492G03F7/004G03F7/033G03F7/039H01L21/027
    • G03F7/0046G03F7/0395G03F7/0397
    • There is provided a method of forming a fine pattern by using a highly practicable fluorine-containing polymer which has a high transparency to exposure light having a short wavelength such as F2 laser and can improve dry etching resistance without remarkably lowering transparency. The method comprises (I) a step for preparing a resist composition comprising (a) a fluorine-containing polymer having protective group, (b) a photoacid generator and (c) a solvent; (II) a step for forming a resist film comprising the above-mentioned resist composition on a substrate or on a given layer on the substrate; (III) a step for exposing by selectively irradiating given areas of the resist film with energy ray, and (IV) a step for subjecting the exposed resist film to developing treatment and selectively removing the exposed portions of the resist film to form a fine pattern, in which the fluorine-containing polymer (a) having protective group is a fluorine-containing polymer comprising a structural unit (M2-1A) derived from a norbornene derivative having OH group and a structural unit (M2-1B) derived from a norbornene derivative having a saturated hydrocarbon group containing bicyclo saturated hydrocarbon structure as a protective group.
    • 提供了一种通过使用对具有短波长的诸如F 2激光的曝光光具有高透明度的高度实用的含氟聚合物形成精细图案的方法,并且可以提高无干蚀刻电阻,而无需 显着降低透明度。 该方法包括(I)制备抗蚀剂组合物的步骤,其包含(a)具有保护基的含氟聚合物,(b)光致酸产生剂和(c)溶剂; (II)在衬底上或衬底上的给定层上形成包含上述抗蚀剂组合物的抗蚀剂膜的步骤; (III)通过用能量射线选择性地照射抗蚀剂膜的给定区域进行曝光的步骤,以及(IV)对曝光的抗蚀剂膜进行显影处理并选择性地除去抗蚀剂膜的曝光部分以形成精细图案的步骤 其中,具有保护基的含氟聚合物(a)为含有衍生自具有OH基的降冰片烯衍生物的结构单元(M2-1A)和来自降冰片烯的结构单元(M2-1B)的含氟聚合物 具有含有双环饱和烃结构的饱和烃基作为保护基的衍生物。
    • 8. 发明申请
    • PROCESS FOR PREPARING CHLORINE-CONTAINING FLUOROCARBON COMPOUND
    • 制备含氯化物氟化合物的方法
    • US20120065434A1
    • 2012-03-15
    • US13319564
    • 2010-05-12
    • Masatoshi NoseTsuneo YamashitaAtsushi Suzuki
    • Masatoshi NoseTsuneo YamashitaAtsushi Suzuki
    • C07C17/20
    • C07C17/35C07C17/206Y02P20/582C07C19/10C07C21/04C07C21/18
    • The present invention provides a process for preparing at least one chlorine-containing fluorocarbon compound selected from the group consisting of chlorine-containing fluoropropane compounds represented by Formula (1): CFnCl3-nCHClCH2—Cl, wherein n is 1 or 2, and chlorine-containing fluoropropene compounds represented by Formula (2): CFnCl3-nCCl═CH2, wherein n is 1 or 2, wherein the process includes the step of contacting at least one chlorine-containing compound selected from the group consisting of 1,1,1,2,3-pentachloropropane, 1,1,2,3-tetrachloropropene, and 2,3,3,3-tetrachloropropene with hydrogen fluoride in the absence of a catalyst while heating. According to the present invention, the chlorine-containing propane and propene compounds having 1 or 2 fluorine atoms can be prepared by an industrially applicable, simple and effective process.
    • 本发明提供一种制备选自由式(1)表示的含氯氟代丙烷化合物中的至少一种含氯碳氟化合物的方法:其中n为1或2的CF nCl 3 -NCHClCH 2 Cl,和氯 - (2)表示的氟代丙烯化合物:CF nCl 3 -nCCl = CH 2,其中n为1或2,其中所述方法包括使至少一种选自1,1,1, 2,3,5-三氯丙烷,1,1,2,3-四氯丙烯和2,3,3,3-四氯丙烯与氟化氢在不存在催化剂的同时加热。 根据本发明,具有1或2个氟原子的含氯丙烷和丙烯化合物可以通过工业上可应用的简单有效的方法制备。
    • 9. 发明申请
    • PROCESS FOR PREPARING 2-CHLORO-3,3,3-TRIFLUOROPROPENE
    • 制备2-氯-3,3,3-三氟苯酚的方法
    • US20120022303A1
    • 2012-01-26
    • US13259828
    • 2010-04-21
    • Masatoshi NoseAtsushi SuzukiTsuneo YamashitaKenichi Katsukawa
    • Masatoshi NoseAtsushi SuzukiTsuneo YamashitaKenichi Katsukawa
    • C07C17/25C07C17/23C07C17/20
    • C07C21/18C07C17/206C07C17/25Y02P20/582
    • The present invention provides a process for preparing 2-chloro-3,3,3-trifluoropropene including subjecting, in the absence of a catalyst, at least one chlorine-containing compound selected from the group consisting of chloropropane represented by formula (1): CClX2CHClCH2Cl, wherein each X is the same or different and each represents Cl or F, chloropropene represented by formula (2): CClY2CCl═CH2, wherein each Y is the same or different and each represents Cl or F, and chloropropene represented by formula (3): CZ2═CClCH2Cl, wherein each Z is the same or different and each represents Cl or F, to a reaction with hydrogen fluoride under heating in a gas phase. According to the present invention, 2-chloro-3,3,3-trifluoropropene (HCFC-1233xf) can be effectively prepared by an easy and economically advantageous process that is suitable for industrial scale production.
    • 本发明提供一种制备2-氯-3,3,3-三氟丙烯的方法,包括在不存在催化剂的情况下,使用至少一种选自由式(1)表示的氯代丙烷的含氯化合物: CClX 2 CHClCH 2 Cl,其中每个X相同或不同,并且各自表示Cl或F,由式(2)表示的氯丙烯:CClY 2 CCl = CH 2,其中每个Y相同或不同,各自表示Cl或F,和由式 3):CZ2 = CClCH2Cl,其中每个Z相同或不同,并且各自表示Cl或F,以在气相中加热时与氟化氢反应。 根据本发明,2-氯-3,3,3-三氟丙烯(HCFC-1233xf)可以通过适用于工业规模生产的容易且经济上有利的方法有效地制备。
    • 10. 发明授权
    • Process for preparing chlorine-containing fluorocarbon compound
    • 制备含氯氟碳化合物的方法
    • US08779219B2
    • 2014-07-15
    • US13319564
    • 2010-05-12
    • Masatoshi NoseTsuneo YamashitaAtsushi Suzuki
    • Masatoshi NoseTsuneo YamashitaAtsushi Suzuki
    • C07C17/087
    • C07C17/35C07C17/206Y02P20/582C07C19/10C07C21/04C07C21/18
    • The present invention provides a process for preparing at least one chlorine-containing fluorocarbon compound selected from the group consisting of chlorine-containing fluoropropane compounds represented by Formula (1): CFnCl3-nCHClCH2—Cl, wherein n is 1 or 2, and chlorine-containing fluoropropene compounds represented by Formula (2): CFnCl3-nCCl═CH2, wherein n is 1 or 2, wherein the process includes the step of contacting at least one chlorine-containing compound selected from the group consisting of 1,1,1,2,3-pentachloropropane, 1,1,2,3-tetrachloropropene, and 2,3,3,3-tetrachloropropene with hydrogen fluoride in the absence of a catalyst while heating. According to the present invention, the chlorine-containing propane and propene compounds having 1 or 2 fluorine atoms can be prepared by an industrially applicable, simple and effective process.
    • 本发明提供一种制备选自由式(1)表示的含氯氟代丙烷化合物中的至少一种含氯碳氟化合物的方法:其中n为1或2的CF nCl 3 -NCHClCH 2 Cl,和氯 - (2)表示的氟代丙烯化合物:CF nCl 3 -nCCl = CH 2,其中n为1或2,其中所述方法包括使至少一种选自1,1,1, 2,3,5-三氯丙烷,1,1,2,3-四氯丙烯和2,3,3,3-四氯丙烯与氟化氢在不存在催化剂的同时加热。 根据本发明,具有1或2个氟原子的含氯丙烷和丙烯化合物可以通过工业上可应用的简单有效的方法制备。