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    • 6. 发明授权
    • Reticle defect inspection apparatus and reticle defect inspection method
    • 光罩缺陷检查装置和掩模版缺陷检查方法
    • US07911599B2
    • 2011-03-22
    • US12047554
    • 2008-03-13
    • Toshiyuki WatanabeRiki Ogawa
    • Toshiyuki WatanabeRiki Ogawa
    • G01N21/00G01N21/88
    • G01N21/956G01N2021/95676G03F1/84
    • A reticle defect inspection apparatus that can carry out a defect inspection with high detection sensitivity are provided. The apparatus includes an optical system of transmitted illumination for irradiating one surface of a sample with a first inspection light, an optical system of reflected illumination for irradiating another surface of the sample with a second inspection light, and a detecting optical system that can simultaneously detect a transmitted light obtained by the first inspection light being passed through the sample and a reflected light obtained by the second inspection light being reflected by the sample. And the optical system of transmitted illumination includes a focusing lens driving mechanism for correcting a focal point shift of the transmitted light resulting from thickness of the sample.
    • 提供了能够进行高检测灵敏度的缺陷检查的掩模版缺陷检查装置。 该装置包括用于利用第一检查光照射样品的一个表面的透射照明的光学系统,用第二检查光照射样品的另一个表面的反射照明的光学系统,以及可以同时检测的检测光学系统 通过第一检查光通过样品而获得的透射光和由第二检查光获得的反射光被样品反射。 并且透射照明的光学系统包括用于校正由样品的厚度产生的透射光的焦点偏移的聚焦透镜驱动机构。
    • 8. 发明申请
    • IMAGE FORMING APPARATUS
    • 图像形成装置
    • US20100098457A1
    • 2010-04-22
    • US12580421
    • 2009-10-16
    • Toshiyuki Watanabe
    • Toshiyuki Watanabe
    • G03G21/16
    • G03G21/1853G03G21/1647G03G2221/1684
    • An image forming apparatus for forming an image on a recording material includes a cartridge, a main assembly including a positioner positioning the cartridge and an urger urging the cartridge to the positioner, a mover supporting the cartridge and movable between a pulled out position outside of the main assembly and an inside position inside the main assembly, and a gripper mounted to the mover and movable between a reference position and an outward position located outwardly with respect to the pull out direction of the mover. When the mover is at the inside position, the cartridge is positioned to the positioner by the urger to be placed in a positioning state when the gripper is at the reference position and the positioning state of the cartridge is released by moving the gripper from the reference position to the outward position.
    • 用于在记录材料上形成图像的图像形成装置包括:盒,主组件,其包括定位盒定位器和将盒推送到定位器的推动器;支撑盒的移动器, 主组件和主组件内部的内部位置,以及安装到移动器上并可在参考位置和相对于移动器的拉出方向向外定位的向外位置之间移动的夹具。 当移动器位于内部位置时,当夹持器处于基准位置时,墨盒定位在定位器上,以便在夹持器处于基准位置时被放置在定位状态,并且通过从夹持器移动夹具来释放墨盒的定位状态 位置向外位置。
    • 10. 发明申请
    • PATTERN INSPECTION METHOD
    • 模式检验方法
    • US20080151230A1
    • 2008-06-26
    • US12033599
    • 2008-02-19
    • Toru TojoToshiyuki WatanabeIkunao IsomuraAkihiko Sekine
    • Toru TojoToshiyuki WatanabeIkunao IsomuraAkihiko Sekine
    • G01N21/00
    • G01N21/956
    • A pattern inspection apparatus comprises an illumination optics applying a first inspection light on a predetermined wavelength to a surface opposite to a pattern formed surface of the substrate, and a second inspection light whose wavelength is equal to the wavelength of the first inspection light to the pattern formed surface, a detector independently detecting a transmitted light from the substrate by irradiation of the first inspection light and a reflected light from the substrate by irradiation of the second inspection light, and a space separation mechanism provided in the vicinity of an optical focal plane toward the pattern formed surface, and spatially separates an irradiation area of the first and second inspection lights such that the transmitted and reflected lights from the substrate are imaged in two discrete areas separated on the optical focal plane.
    • 图案检查装置包括将预定波长的第一检查光施加到与基板的图案形成表面相对的表面的照明光学器件以及其波长等于第一检查光的波长与图案的第二检查光 形成表面,检测器,通过照射第一检查光和通过照射第二检查光的来自基板的反射光独立地检测来自基板的透射光;以及空间分离机构,设置在光学焦平面附近,朝向 图案形成表面,并且在空间上分离第一和第二检查光的照射区域,使得来自基板的透射和反射光成像在在光学焦平面上分离的两个离散区域中。