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1. 发明授权

US06486084B2 Composite material and method of producing the same 失效
标题翻译：复合材料及其制造方法
公开(公告)号：US06486084B2
公开(公告)日：2002-11-26
申请号：US09789318
申请日：2001-02-20
申请人： Toshio Oda , Hiromichi Kobayashi , Tsuneaki Ohashi , Shinji Kawasaki
发明人： Toshio Oda , Hiromichi Kobayashi , Tsuneaki Ohashi , Shinji Kawasaki
IPC分类号： C03C306
CPC分类号： C04B35/575 , C03B19/06 , C03C14/004 , C03C2214/04 , C03C2214/30 , C04B35/56 , C04B35/5611 , C04B35/565 , C04B35/58014 , C04B35/584
摘要： A composite material has a quartz glass phase and a complex compound phase compounded with the quartz glass phase, which is made of one or more compounds selected from a group of silicon carbide, silicon nitride, silicon, titanium nitride and titanium carbide, as a main ingredient. The composite material can be used instead of quartz glass, and can prevent the generations of microcrack, tipping and particles after the mechanical working.
摘要翻译：复合材料具有石英玻璃相和与石英玻璃相复合的复合化合物相，其由选自碳化硅，氮化硅，硅，氮化钛和碳化钛的一种或多种化合物制成，作为主要成分。可以使用复合材料代替石英玻璃，并且可以防止在机械加工之后的几代微裂纹，倾翻和颗粒。

2. 发明授权

US06706428B2 Ceramic sintered bodies and a method of producing the same 失效
标题翻译：陶瓷烧结体及其制造方法
公开(公告)号：US06706428B2
公开(公告)日：2004-03-16
申请号：US10059053
申请日：2002-01-28
申请人： Hiromichi Kobayashi , Tsuneaki Ohashi , Toshio Oda , Hiroshi Furukubo
发明人： Hiromichi Kobayashi , Tsuneaki Ohashi , Toshio Oda , Hiroshi Furukubo
IPC分类号： B32B1800
CPC分类号： C04B35/6303 , B32B18/00 , B32B2309/12 , C04B35/10 , C04B35/111 , C04B35/575 , C04B35/581 , C04B2235/3217 , C04B2235/3821 , C04B2235/3826 , C04B2235/3865 , C04B2235/422 , C04B2235/5427 , C04B2235/5436 , C04B2235/5445 , C04B2235/658 , C04B2235/72 , C04B2235/721 , C04B2235/77 , C04B2235/96 , C04B2237/586 , Y10T428/249953 , Y10T428/249956 , Y10T428/30
摘要： A ceramic sintered body has a dense portion and a porous portion. The dense portion is formed from sintered ceramic fine particles, and the porous portion is formed from sintered ceramic coarse particles. The fine particles and coarse particles are simultaneously subjected to pressure sintering to form the dense portion and porous portion.
摘要翻译：陶瓷烧结体具有致密部分和多孔部分。致密部分由烧结的陶瓷细颗粒形成，多孔部分由烧结的陶瓷粗颗粒形成。同时对细颗粒和粗颗粒进行加压烧结以形成致密部分和多孔部分。

3. 发明申请

US20070243415A1 SINTERED BODY, ARC TUBE, AND MANUFACTURING METHOD OF SINTERED BODY 审中-公开
标题翻译：烧结体，弧管和烧结体的制造方法
公开(公告)号：US20070243415A1
公开(公告)日：2007-10-18
申请号：US11688997
申请日：2007-03-21
申请人： Kunihiko YOSHIOKA , Kazuhi Matsumoto , Tsuneaki Ohashi , Masakatsu Inoue , Toshiichi Ikami , Keiichiro Watanabe
发明人： Kunihiko YOSHIOKA , Kazuhi Matsumoto , Tsuneaki Ohashi , Masakatsu Inoue , Toshiichi Ikami , Keiichiro Watanabe
IPC分类号： B22F7/00 , B32B9/00
CPC分类号： H01J61/302 , C04B35/115 , C04B35/6264 , C04B35/62655 , C04B35/632 , C04B35/6342 , C04B37/005 , C04B2235/3206 , C04B2235/6023 , C04B2235/6582 , C04B2235/661 , C04B2235/786 , C04B2235/94 , C04B2235/963 , C04B2235/9653 , C04B2235/9661 , C04B2237/064 , C04B2237/343 , C04B2237/55 , C04B2237/708 , C04B2237/76 , C04B2237/765 , C04B2237/78 , H01J9/247
摘要： The present invention provides a sintered body of a joined body including two or more inorganic powder-molded bodies. The sintered body includes first components corresponding to the two or more inorganic powder-molded bodies in the joined body; and a second component corresponding to a junction in the joined body, and has one or both of the features (a) and (b): (a) the second component has a surface roughness equal to or lower than that of each of the first components; and (b) the second component has, in the vicinity of a width center thereof, a transmittance equal to or higher than that of each of the first components.
摘要翻译：本发明提供一种包含两个或更多个无机粉末成型体的接合体的烧结体。所述烧结体包括与所述接合体中的两种以上无机粉体成型体对应的第一成分，以及与所述接合体中的接合部对应的第二部件，并且具有特征（a）和（b）中的一个或两个：（a）所述第二部件的表面粗糙度等于或低于所述第一部件组件; 和（b）第二部件在其宽度中心附近具有等于或高于每个第一部件的透射率的透射率。

4. 发明授权

US07138192B2 Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation 有权
标题翻译：氧化钇 - 氧化铝复合氧化物的膜，其制造方法，喷涂膜，耐腐蚀构件和有效减少颗粒产生的构件
公开(公告)号：US07138192B2
公开(公告)日：2006-11-21
申请号：US10633906
申请日：2003-08-04
申请人： Hirotake Yamada , Tsuneaki Ohashi
发明人： Hirotake Yamada , Tsuneaki Ohashi
IPC分类号： B32B9/00
CPC分类号： C23C4/11 , Y10T428/249953 , Y10T428/25 , Y10T428/26
摘要： The invention provides a film of an yttria-alumina complex oxide having a high peel strength with respect to a substrate. A mixed powder of powdery materials of yttria and alumina is sprayed on a substrate to form a sprayed film made of an yttria-alumina complex oxide. Preferably, the powdery material of yttria has a 50 percent mean particle diameter of not smaller than 0.1 μm and not larger than 100 μm, and the powdery material of alumina has a 50 percent mean particle diameter of not smaller than 0.1 μm and not larger than 100 μm. Preferably, the yttria-alumina complex oxide contains at least a garnet phase, and may further contain a perovskite phase.
摘要翻译：本发明提供了相对于基材具有高剥离强度的氧化钇 - 氧化铝复合氧化物膜。将氧化钇和氧化铝的粉末状材料的混合粉末喷涂在基材上以形成由氧化钇 - 氧化铝复合氧化物制成的喷涂膜。优选地，氧化钇的粉末状材料具有不小于0.1μm和不大于100μm的50％平均粒径，并且氧化铝的粉末材料具有不小于0.1μm的平均粒径的50％且不大于 100个妈妈优选地，氧化钇 - 氧化铝复合氧化物至少含有石榴石相，并且还可以含有钙钛矿相。

5. 发明授权

US07019956B2 Electrostatic chuck having bonded structure and method of manufacturing the same 有权
标题翻译：具有接合结构的静电卡盘及其制造方法
公开(公告)号：US07019956B2
公开(公告)日：2006-03-28
申请号：US10044500
申请日：2002-01-10
申请人： Tomoyuki Fujii , Tsuneaki Ohashi
发明人： Tomoyuki Fujii , Tsuneaki Ohashi
IPC分类号： H02N13/00
CPC分类号： H01L21/6831 , C04B35/6455 , C04B37/028 , C04B2235/963 , C04B2237/09 , C04B2237/343 , C04B2237/346 , C04B2237/366 , C04B2237/402 , C04B2237/407 , C04B2237/62 , C04B2237/708 , C04B2237/72 , H01L21/6833 , Y10T279/27
摘要： An electrostatic chuck and a method for manufacturing the same are provided. The electrostatic chuck has a bonded structure comprising a ceramic electrostatic chuck member, a metal member and a bonding layer. The bonding layer has at least a first outermost bonding layer joined to the ceramic electrostatic chuck member, a second outermost bonding layer joined to the metal member, and an intermediate polyimide layer disposed between the first and second outermost bonding layers. Each of the outermost bonding layers are made of a silicone layer or an acrylic.
摘要翻译：提供一种静电卡盘及其制造方法。静电卡盘具有包括陶瓷静电卡盘部件，金属部件和接合层的接合结构。所述接合层至少具有与所述陶瓷静电卡盘部件接合的第一最外侧接合层，与所述金属部件接合的第二最外侧接合层，以及设置在所述第一和第二最外侧接合层之间的中间聚酰亚胺层。每个最外面的粘合层由硅树脂层或丙烯酸制成。

6. 发明授权

US06783875B2 Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members 有权
标题翻译：卤素气体等离子体构件及其制造方法，层压板和耐腐蚀构件
公开(公告)号：US06783875B2
公开(公告)日：2004-08-31
申请号：US09835857
申请日：2001-04-16
申请人： Hirotake Yamada , Yuji Katsuda , Tsuneaki Ohashi , Masaaki Masuda , Masashi Harada , Hiroyuki Iwasaki , Shigenori Ito
发明人： Hirotake Yamada , Yuji Katsuda , Tsuneaki Ohashi , Masaaki Masuda , Masashi Harada , Hiroyuki Iwasaki , Shigenori Ito
IPC分类号： B32B904
CPC分类号： C04B41/009 , B32B18/00 , C04B35/63 , C04B35/63416 , C04B35/63424 , C04B35/6365 , C04B37/005 , C04B41/5045 , C04B41/52 , C04B41/87 , C04B41/89 , C04B2111/00405 , C04B2111/20 , C04B2235/656 , C04B2235/6567 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/52 , C04B2237/704 , C04B2237/708 , C23C4/00 , C23C4/18 , C23C16/40 , C23C16/4404 , C23C24/08 , C23C26/00 , C23C30/00 , Y10T428/249953 , Y10T428/26 , Y10T428/263 , C04B41/0072 , C04B41/4527 , C04B41/5031 , C04B41/4556 , C04B41/5032 , C04B41/522 , C04B41/5011 , C04B35/10 , C04B35/48 , C04B38/00
摘要： A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa.
摘要翻译：要暴露于卤素气体等离子体的卤素等离子体的构件包括所述构件的主体，以及形成在所述主体的至少表面上的耐腐蚀膜，其中所述腐蚀性膜对所述主体不低于15MPa。

7. 发明授权

US06541406B1 Silicon nitride sintered material and process for production thereof 有权
公开(公告)号：US06541406B1
公开(公告)日：2003-04-01
申请号：US09680137
申请日：2000-10-04
申请人： Kiyoshi Araki , Tsuneaki Ohashi , Katsuhiro Inoue , Masaaki Masuda
发明人： Kiyoshi Araki , Tsuneaki Ohashi , Katsuhiro Inoue , Masaaki Masuda
IPC分类号： C04B35587
CPC分类号： C04B35/584 , C04B35/5935 , C04B2235/3206 , C04B2235/3217 , C04B2235/3224 , C04B2235/3826 , C04B2235/3839 , C04B2235/3878 , C04B2235/3882 , C04B2235/3895 , C04B2235/5445 , C04B2235/604 , C04B2235/668 , C04B2235/766 , C04B2235/77 , C04B2235/80 , C04B2235/96 , C04B2235/9607
摘要： A silicon nitride sintered material includes a polycrystal material having silicon nitride crystal grains and a grain boundary phase. The sintered material contains a Yb element in an amount of 2 to 30% by weight in terms of its oxide and an Al element in an amount of 1 to 20% by weight in terms of its oxide and has a thermal conductivity of 40 W/mK or less at room temperature, a resistivity of 1×105 to 1×1012 &OHgr;·cm at room temperature, and a porosity of 0.5% or less.

8. 发明授权

US06261708B1 Joined body of aluminum nitride series ceramics, method of joining aluminum nitride series ceramics and joining agent 失效
标题翻译：氮化铝系列陶瓷的接合体，氮化铝系陶瓷的接合方法和接合剂
公开(公告)号：US06261708B1
公开(公告)日：2001-07-17
申请号：US09013042
申请日：1998-01-26
申请人： Tsuneaki Ohashi , Tsutomu Imai
发明人： Tsuneaki Ohashi , Tsutomu Imai
IPC分类号： B32B516
CPC分类号： C04B35/645 , C04B37/005 , C04B2235/6562 , C04B2235/658 , C04B2237/06 , C04B2237/064 , C04B2237/08 , C04B2237/10 , C04B2237/366 , C04B2237/708 , C04B2237/765 , Y10T403/479 , Y10T428/256
摘要： A novel method is provided for joining substrates made of aluminum nitride series ceramics to each other, which can perform the joining substantially without leaving an intervening third phase other than aluminum nitride series ceramics at the joining interface of the substrates. The method is performed, for example, by providing a joining agent 3 containing at least an aluminum nitride series ceramics and a flux between the substrates 1 and 2, heat treating the joining agent to eutectically melt the aluminum nitride series ceramics and the flux, then precipitating a reprecipitated phase of the aluminum nitride series ceramics at the joining interface of the substrates. Alternatively, the method is performed by providing a joining agent 3 containing at least an aluminum nitride series ceramics and a flux between the substrates 1 and 2, heating the joining agent to a temperature range T1 which is higher than the melting point of the flux, subsequently heating the joining agent to a temperature range T2 which is higher than the temperature range T1 to exit the components of the flux from the joining interface, ten precipitating the reprecipitated phase of the aluminum nitride series ceramics at the joining interface.
摘要翻译：提供了一种用于将由氮化铝系列陶瓷制成的衬底彼此接合的新方法，其可以在基板的接合界面处基本上不会留下除氮化铝系列陶瓷之外的中间第三相而进行接合。该方法例如通过提供至少包含氮化铝系陶瓷的接合剂3和在基板1和2之间的焊剂，对接合剂进行热处理以使氮化铝系列陶瓷和焊剂共晶化，然后在基板的接合界面处沉淀出氮化铝系陶瓷的再沉淀相。或者，该方法通过提供至少包含氮化铝系陶瓷的接合剂3和在基板1和2之间的焊剂，将接合剂加热到高于焊剂的熔点的温度范围T1，随后将接合剂加热到高于温度范围T1的温度范围T2以从接合界面离开焊剂的组分，在接合界面处使氮化铝系陶瓷的再沉淀相沉淀10次。

9. 发明授权

US5128288A Phosphate compounds, sintered bodies thereof and manufacture of the sintered bodies 失效
标题翻译：磷酸盐化合物，其烧结体和烧结体的制造
公开(公告)号：US5128288A
公开(公告)日：1992-07-07
申请号：US627412
申请日：1990-12-14
申请人： Tsuneaki Ohashi , Keiji Matsuhiro
发明人： Tsuneaki Ohashi , Keiji Matsuhiro
IPC分类号： C01B25/45 , C04B35/447
CPC分类号： C04B35/447 , C01B25/45
摘要： A heat resistant, low expansion phosphate compound and sintered bodies thereof, having a composition of RZr.sub.4 P.sub.6 O.sub.24 (R is one or more cations of IIa group in the periodic table, such as Ba, Sr and Ca): an average thermal expansion coefficient between room temperature and 1,400.degree. C. of -10.about.+10.times.10.sup.-7 /.degree.C.; and having a high temperature type crystalline structure having R3c symmetry at room temperature. The sintered body of the invention can be manufactured by mixing and shaping starting materials, firing the resulting shaped body at 1,400.degree. C..about.1,700.degree. C. to provide a sintered body with a composition of RZr.sub.4 P.sub.6 O.sub.24 and then, keeping the obtained sintered body at a high temperature of not lower than a temperature of phase transition between a high temperature type and a low temperature type crystalline structure, followed by quenching.
摘要翻译：具有RZr4P6O24组成的耐热，低膨胀的磷酸盐化合物及其烧结体（R是周期表中的IIa族的一种或多种阳离子，例如Ba，Sr和Ca）：室温下的平均热膨胀系数和-100℃-10℃〜10℃/ 10℃。并且在室温下具有R3c对称性的高温型晶体结构。本发明的烧结体可以通过将原料混合和成形来制造，在1400℃的温度下烧结所得到的成型体，提供具有RZr4P6O24组成的烧结体，然后将得到的烧结体保持在不低于高温型和低温型结晶结构之间的相变温度的高温，然后淬火。

10. 发明授权

US4968648A Heat-resisting phosphate based compound sintered bodies and production thereof 失效
标题翻译：耐热磷酸盐基复合烧结体及其制备
公开(公告)号：US4968648A
公开(公告)日：1990-11-06
申请号：US379676
申请日：1989-07-10
申请人： Keiichiro Watanabe , Tsuneaki Ohashi , Tadaaki Matsuhisa
发明人： Keiichiro Watanabe , Tsuneaki Ohashi , Tadaaki Matsuhisa
IPC分类号： C04B35/48
CPC分类号： C04B35/481
摘要： Heat-resisting phosphate based compound sintered bodies are disclosed, which each contain not less than 10% by weight of a crystalline phase of RZr.sub.4 (PO.sub.4).sub.6 in which R is an element in Group IIa of the Periodic Table. A weight-reduced percentage of the sintered body when being thermally treated at 1,400.degree. C. for 100 hours is not more than 10%. A process for producing such phosphate based compound sintered bodies is also disclosed.
摘要翻译：公开了耐热磷酸盐系复合烧结体，其各自含有不少于10重量％的RZr4（PO4）6的结晶相，其中R为元素周期表IIa族元素。当在1400℃下热处理100小时时，烧结体的重量减少百分比不大于10％。还公开了一种生产这种磷酸盐基复合烧结体的方法。

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