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1. 发明授权

US08936685B2 Vitreous silica crucible for pulling silicon single crystal and method of manufacturing the same 有权
标题翻译：用于拉硅单晶的玻璃状硅石坩埚及其制造方法
公开(公告)号：US08936685B2
公开(公告)日：2015-01-20
申请号：US13394284
申请日：2010-08-20
申请人： Toshiaki Sudo , Makiko Kodama , Minoru Kanda , Hiroshi Kishi
发明人： Toshiaki Sudo , Makiko Kodama , Minoru Kanda , Hiroshi Kishi
IPC分类号： C30B15/10 , C03B19/09 , C30B29/06 , C30B35/00 , C30B29/18
CPC分类号： C03B19/095 , C30B15/10 , C30B29/06 , C30B29/18 , C30B35/002 , Y02P40/57 , Y10T117/1032
摘要： The present invention provides a vitreous silica crucible which can suppress the sidewall lowering of the crucible under high temperature during pulling a silicon single crystal, and a method of manufacturing such a vitreous silica crucible. The vitreous silica crucible 10 includes an opaque vitreous silica layer 11 provided on the outer surface side of the crucible and containing numerous bubbles, and a transparent vitreous silica layer 12 provided on the inner surface side. The opaque vitreous silica layer 11 includes a first opaque vitreous silica portion 11a provided on the crucible upper portion, and a second opaque vitreous silica portion 11b provided on the crucible lower portion. The specific gravity of the second opaque vitreous silica portion 11b is 1.7 to 2.1, and the specific gravity of the first opaque vitreous silica portion 11a is 1.4 to 1.8, and smaller than that of the second opaque vitreous silica portion. The particle size distribution of the material silica powder for the first opaque vitreous silica portion 11a is wider than that of the second opaque vitreous silica portion 11b, and the material silica powder for the first opaque vitreous silica portion 11a includes more fine powder than that for the second opaque vitreous silica portion 11b.
摘要翻译：本发明提供一种可以在拉拔硅单晶时抑制坩埚在高温下的侧壁降低的石英玻璃坩埚，以及制造这种石英玻璃坩埚的方法。玻璃状石英玻璃坩埚10包括设置在坩埚的外表面侧并且含有大量气泡的不透明玻璃状石英层11和设置在内表面侧的透明氧化硅玻璃层12。不透明玻璃状石英层11包括设置在坩埚上部的第一不透明玻璃状石英部分11a和设置在坩埚下部的第二不透明玻璃状石英部分11b。第二不透玻璃状二氧化硅部11b的比重为1.7〜2.1，第一不透明玻璃状石英部11a的比重为1.4〜1.8，小于第二不透明玻璃状二氧化硅部的比重。用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末的粒度分布比第二不透明玻璃状二氧化硅部分11b的粒度分布宽，并且用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末包含比第二不透明玻璃状石英部分11b。

2. 发明申请

US20120260852A1 VITREOUS SILICA CRUCIBLE 有权
标题翻译：紫外线可溶性
公开(公告)号：US20120260852A1
公开(公告)日：2012-10-18
申请号：US13148457
申请日：2010-12-13
申请人： Toshiaki Sudo , Hiroshi Kishi , Makiko Kodama
发明人： Toshiaki Sudo , Hiroshi Kishi , Makiko Kodama
IPC分类号： C30B15/10
CPC分类号： C30B35/002 , C03C19/00 , C03C23/0025 , C30B15/10 , Y10T117/1032
摘要： Provided is a vitreous silica crucible which has a special region for suppressing vibration of melt surface during pulling of a silicon single crystal and at the same time, a marking capable of accurately monitoring a changed position of the melt surface when passing through the special region. The special region for preventing sloshing of silicon melt is provided on an inner wall of a straight body portion, and the marking is provided at least at an upper end and a lower end of the special region.
摘要翻译：本发明提供一种玻璃状石英玻璃坩埚，其特征在于，在单晶硅拉拔期间具有抑制熔融表面的振动的特殊区域，同时具有能够精确地监测经过特殊区域时的熔融面的变化位置的标记。用于防止硅熔体晃动的特殊区域设置在直体部分的内壁上，并且标记至少设置在特殊区域的上端和下端。

3. 发明授权

US09115445B2 Vitreous silica crucible 有权
标题翻译：石英玻璃坩埚
公开(公告)号：US09115445B2
公开(公告)日：2015-08-25
申请号：US13148457
申请日：2010-12-13
申请人： Toshiaki Sudo , Hiroshi Kishi , Makiko Kodama
发明人： Toshiaki Sudo , Hiroshi Kishi , Makiko Kodama
IPC分类号： C30B35/00 , C03C19/00 , C03C23/00 , C30B15/10
CPC分类号： C30B35/002 , C03C19/00 , C03C23/0025 , C30B15/10 , Y10T117/1032
摘要： Provided is a vitreous silica crucible which has a special region for suppressing vibration of melt surface during pulling of a silicon single crystal and at the same time, a marking capable of accurately monitoring a changed position of the melt surface when passing through the special region. The special region for preventing sloshing of silicon melt is provided on an inner wall of a straight body portion, and the marking is provided at least at an upper end and a lower end of the special region.
摘要翻译：本发明提供一种玻璃状石英玻璃坩埚，其特征在于，在单晶硅拉拔期间具有抑制熔融表面的振动的特殊区域，同时具有能够精确地监测经过特殊区域时的熔融面的变化位置的标记。用于防止硅熔体晃动的特殊区域设置在直体部分的内壁上，并且标记至少设置在特殊区域的上端和下端。

4. 发明申请

US20120160159A1 VITREOUS SILICA CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：用于拉丝硅单晶的耐火二氧化硅巧克力及其制造方法
公开(公告)号：US20120160159A1
公开(公告)日：2012-06-28
申请号：US13394284
申请日：2010-08-10
申请人： Toshiaki Sudo , Makiko Kodama , Minoru Kanda , Hiroshi Kishi
发明人： Toshiaki Sudo , Makiko Kodama , Minoru Kanda , Hiroshi Kishi
IPC分类号： C30B15/10 , C03B20/00
CPC分类号： C03B19/095 , C30B15/10 , C30B29/06 , C30B29/18 , C30B35/002 , Y02P40/57 , Y10T117/1032
摘要： The present invention provides a vitreous silica crucible which can suppress the sidewall lowering of the crucible under high temperature during pulling a silicon single crystal, and a method of manufacturing such a vitreous silica crucible. The vitreous silica crucible 10 includes an opaque vitreous silica layer 11 provided on the outer surface side of the crucible and containing numerous bubbles, and a transparent vitreous silica layer 12 provided on the inner surface side. The opaque vitreous silica layer 11 includes a first opaque vitreous silica portion 11a provided on the crucible upper portion, and a second opaque vitreous silica portion 11b provided on the crucible lower portion. The specific gravity of the second opaque vitreous silica portion 11b is 1.7 to 2.1, and the specific gravity of the first opaque vitreous silica portion 11a is 1.4 to 1.8, and smaller than that of the second opaque vitreous silica portion. The particle size distribution of the material silica powder for the first opaque vitreous silica portion 11a is wider than that of the second opaque vitreous silica portion 11b, and the material silica powder for the first opaque vitreous silica portion 11a includes more fine powder than that for the second opaque vitreous silica portion 11b.
摘要翻译：本发明提供一种可以在拉拔硅单晶时抑制坩埚在高温下的侧壁降低的石英玻璃坩埚，以及制造这种石英玻璃坩埚的方法。玻璃状石英玻璃坩埚10包括设置在坩埚的外表面侧并且含有大量气泡的不透明玻璃状石英层11和设置在内表面侧的透明氧化硅玻璃层12。不透明玻璃状石英层11包括设置在坩埚上部的第一不透明玻璃状石英部分11a和设置在坩埚下部的第二不透明玻璃状石英部分11b。第二不透玻璃状二氧化硅部11b的比重为1.7〜2.1，第一不透明玻璃状石英部11a的比重为1.4〜1.8，小于第二不透明玻璃状二氧化硅部的比重。用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末的粒度分布比第二不透明玻璃状二氧化硅部分11b的粒度分布宽，并且用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末包含比第二不透明玻璃状石英部分11b。

5. 发明申请

US20120160155A1 COMPOSITE CRUCIBLE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING SILICON CRYSTAL 有权
标题翻译：复合硬质合金，其制造方法和制造硅晶体的方法
公开(公告)号：US20120160155A1
公开(公告)日：2012-06-28
申请号：US13394268
申请日：2010-08-20
申请人： Toshiaki Sudo , Takuma Yoshioka , Hiroshi Kishi , Takeshi Fujita , Minoru Kanda , Koichi Suzuki , Ken Kitahara
发明人： Toshiaki Sudo , Takuma Yoshioka , Hiroshi Kishi , Takeshi Fujita , Minoru Kanda , Koichi Suzuki , Ken Kitahara
IPC分类号： C30B15/10 , C03B19/02 , C03B20/00
CPC分类号： C04B41/5022 , C03B5/025 , C03B19/02 , C03B19/09 , C03B19/095 , C03C17/004 , C03C17/02 , C03C2217/213 , C03C2218/13 , C03C2218/17 , C04B35/185 , C04B41/009 , C04B41/86 , C04B2235/6027 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57 , Y10T117/1032 , C04B41/4527
摘要： The purpose of the present invention is to provide a crucible which has high viscosity at high temperature, and can be used for a long time, and can be manufactured at low cost, and a method of manufacturing the same. The composite crucible 10 is characterized in the use of mullite (3Al2O3.2SiO2) as the basic material of the crucible. The composite crucible 10 has the crucible body 11 made of mullite material whose main component is alumina and silica, and a transparent vitreous silica layer 12 formed on the inner surface of the crucible body 11. The thickness of the transparent vitreous silica layer 12 is smaller than that of the crucible body 11. The crucible body 11 can be formed by the slip casting method, and the transparent vitreous silica layer 12 can be formed by the thermal spraying method.
摘要翻译：本发明的目的是提供一种在高温下具有高粘度且长时间使用并且可以低成本制造的坩埚及其制造方法。复合坩埚10的特征在于使用莫来石（3Al2O3.2SiO2）作为坩埚的基本材料。复合坩埚10具有由主成分为氧化铝和二氧化硅的莫来石材料制成的坩埚体11和形成在坩埚体11的内表面上的透明玻璃状石英层12.透明玻璃状石英层12的厚度较小坩埚主体11可以通过流延法形成，透明玻璃状二氧化硅层12可以通过热喷涂法形成。

6. 发明授权

US09115019B2 Vitreous silica crucible and method of manufacturing the same 有权
标题翻译：石英玻璃坩埚及其制造方法
公开(公告)号：US09115019B2
公开(公告)日：2015-08-25
申请号：US13145094
申请日：2010-12-14
申请人： Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
发明人： Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
IPC分类号： C03B19/06 , C03B19/09 , C03C15/00 , C03C23/00 , C30B15/10 , C30B29/06 , C30B35/00 , C03C17/23
CPC分类号： C03B19/095 , C03C15/00 , C03C17/23 , C03C23/0025 , C03C23/007 , C03C2218/345 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57 , Y10T117/1032
摘要： Provided is a method of manufacturing a vitreous silica crucible for pulling a silicon single crystal which can suppress melt surface vibration of silicon melt filled therein and has a long lifetime. The crucible includes a peripheral wall portion, a curved portion and a bottom portion, and has a plurality of micro recesses on the specific region of the inner surface of the peripheral wall portion.
摘要翻译：提供一种制造用于拉制硅单晶的石英玻璃坩埚的方法，其可以抑制填充在其中的硅熔体的熔融表面振动并且具有长的寿命。坩埚包括周壁部分，弯曲部分和底部部分，并且在周壁部分的内表面的特定区域上具有多个微凹部。

7. 发明授权

US08769988B2 Method and apparatus for manufacturing vitreous silica crucible 有权
标题翻译：石英玻璃坩埚的制造方法和装置
公开(公告)号：US08769988B2
公开(公告)日：2014-07-08
申请号：US13308277
申请日：2011-11-30
申请人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
发明人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
IPC分类号： C03B19/09 , C03B29/02
CPC分类号： C03B19/095 , C03B29/02 , Y02P40/57
摘要： Provided is a method for manufacturing a vitreous silica crucible and a manufacturing apparatus for the same, which can reduce the amount of bubbles and impurities of a crucible inner surface and enhance a crystallization yield of silicon single crystal. A method for manufacturing a vitreous silica crucible of the invention includes a silica powder supplying process of supplying silica powder in a rotating mold to form a silica powder layer; an arc fusing process of fusing the silica powder layer by arc discharge generated by carbon electrodes; and a fire polishing process of throwing an arc flame toward a target surface of the silica powder layer for surface removal, wherein, in the fire polishing process, the distances from the tips of the carbon electrodes to the target surface is set to be equal.
摘要翻译：提供一种制造石英玻璃坩埚及其制造装置的方法，其可以减少坩埚内表面的气泡和杂质的量，并提高单晶硅的结晶产率。本发明的石英玻璃坩埚的制造方法包括在旋转模具中供给二氧化硅粉末以形成二氧化硅粉末层的二氧化硅粉末供给工序; 通过由碳电极产生的电弧放电使二氧化硅粉末层熔融的电弧熔合工艺; 以及向二氧化硅粉末层的靶表面投射弧形火焰以进行表面去除的火抛光处理，其中，在火焰研磨处理中，将从碳电极的前端到目标表面的距离设定为相等。

8. 发明申请

US20120255487A1 VITREOUS SILICA CRUCIBLE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：维生素二氧化硅可溶性及其制造方法
公开(公告)号：US20120255487A1
公开(公告)日：2012-10-11
申请号：US13145094
申请日：2010-12-14
申请人： Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
发明人： Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
IPC分类号： C30B15/10 , C03B19/09
CPC分类号： C03B19/095 , C03C15/00 , C03C17/23 , C03C23/0025 , C03C23/007 , C03C2218/345 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57 , Y10T117/1032
摘要： Provided is a method of manufacturing a vitreous silica crucible for pulling a silicon single crystal which can suppress melt surface vibration of silicon melt filled therein and has a long lifetime. The crucible includes a peripheral wall portion, a curved portion and a bottom portion, and has a plurality of micro recesses on the specific region of the inner surface of the peripheral wall portion.
摘要翻译：提供一种制造用于拉制硅单晶的石英玻璃坩埚的方法，其可以抑制填充在其中的硅熔体的熔融表面振动并且具有长的寿命。坩埚包括周壁部分，弯曲部分和底部部分，并且在周壁部分的内表面的特定区域上具有多个微凹部。

9. 发明申请

US20120137964A1 VITREOUS SILICA CRUCIBLE 有权
标题翻译：紫外线可溶性
公开(公告)号：US20120137964A1
公开(公告)日：2012-06-07
申请号：US13308344
申请日：2011-11-30
申请人： Toshiaki Sudo , Hiroshi Kishi , Ken Kitahara
发明人： Toshiaki Sudo , Hiroshi Kishi , Ken Kitahara
IPC分类号： C30B15/10
CPC分类号： C30B15/10 , C03B19/095 , Y10T117/10 , Y10T117/1024 , Y10T117/1032
摘要： The present invention provides a vitreous silica crucible which can suppress buckling and sidewall lowering of the crucible and the generation of cracks. According to the present invention, a vitreous silica crucible is provided for pulling a silicon single crystal having a wall, the wall including a non-doped inner surface layer made of natural vitreous silica or synthetic vitreous silica, a mineralizing element-maldistributed vitreous silica layer containing dispersed island regions each containing a mineralizing element, and wherein the vitreous silica of the island regions and the vitreous silica of a surrounding region of the island regions is a combination of mineralizing element-doped natural vitreous silica and non-doped synthetic vitreous silica, or a combination of mineralizing element-doped synthetic vitreous silica and non-doped natural vitreous silica, and the inner surface layer is made of vitreous silica of a different kind from that of the island region.
摘要翻译：本发明提供一种可以抑制坩埚的翘曲和侧壁降低以及产生裂纹的石英玻璃坩埚。根据本发明，提供一种玻璃状石英坩埚，用于拉拔具有壁的硅单晶，所述壁包括由天然氧化硅玻璃或合成玻璃态二氧化硅制成的非掺杂内表面层，矿化元素分布不均的玻璃状石英层含有各自含有矿化元素的分散的岛状区域，岛状区域的石英二氧化硅和岛状区域的周围区域的玻璃态二氧化硅是矿化元素掺杂天然玻璃质石英和非掺杂合成玻璃态二氧化硅的组合，或矿化元素掺杂的合成玻璃体二氧化硅和非掺杂天然玻璃体二氧化硅的组合，并且内表面层由与岛状区域不同种类的玻璃态二氧化硅制成。

10. 发明授权

US09797063B2 Vitreous silica crucible 有权
公开(公告)号：US09797063B2
公开(公告)日：2017-10-24
申请号：US13307253
申请日：2011-11-30
申请人： Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
发明人： Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
IPC分类号： C30B15/10 , C03B19/09
CPC分类号： C30B15/10 , C03B19/095 , Y10T117/1032
摘要： The present invention provides a vitreous silica crucible which can suppress buckling and sidewall lowering of the crucible without fear of mixing of impurities into silicon melt. According to the present invention, provided is a vitreous silica crucible for pulling a silicon single crystal, wherein a ratio I2/I1 is 0.67 to 1.17, where I1 and I2 are area intensities of the peaks at 492 cm−1 and 606 cm−1, respectively, in Raman spectrum of vitreous silica of the region having a thickness of 2 mm from an outer surface to an inner surface of a wall of the crucible.

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