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1. 发明授权

US08276402B2 Method and apparatus for manufacturing vitreous silica crucible 有权
标题翻译：石英玻璃坩埚的制造方法和装置
公开(公告)号：US08276402B2
公开(公告)日：2012-10-02
申请号：US13095431
申请日：2011-04-27
申请人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
发明人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
IPC分类号： C03B19/06 , C03B19/09 , C03B20/00
CPC分类号： C03B19/095
摘要： Provided is a method of manufacturing a vitreous silica crucible, including: an arc fusing process for fusing the silica powder molded body by using arc flames generated from the plurality of carbon electrodes, wherein the arc fusing process is performed in a state of disposing tips of at least a pair of carbon electrodes of the plurality of carbon electrodes closer to a target surface of the silica powder molded body than other carbon electrode tips, and setting distances from each of the tips of the closer carbon electrodes to the target surface, to be equal, and the arc fusing process is performed by heating and fusing the silica powder molded body while performing fire polishing, which partially removes an inner surface of the silica powder molded body by using arc flames generated by the closer carbon electrodes.
摘要翻译：本发明提供一种石英玻璃坩埚的制造方法，其特征在于，包括：通过使用由所述多个碳电极产生的电弧火焰来熔融所述二氧化硅粉末成形体的电弧熔合法，其中，所述电弧定影处理以多个碳电极中的至少一对碳电极比其他碳电极端部更靠近二氧化硅粉末成形体的目标表面，并且将距离更近的碳电极的每个尖端到目标表面的距离设定为相等，通过在进行火抛光的同时对二氧化硅粉末成形体进行加热熔融来进行电弧定影处理，通过使用由较近的碳电极产生的电弧火来部分除去二氧化硅粉末成形体的内表面。

2. 发明申请

US20120137733A1 METHOD AND APPARATUS FOR MANUFACTURING VITREOUS SILICA CRUCIBLE 有权
标题翻译：用于制造维生素二氧化硅可溶性的方法和装置
公开(公告)号：US20120137733A1
公开(公告)日：2012-06-07
申请号：US13308277
申请日：2011-11-30
申请人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
发明人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
IPC分类号： C03B20/00 , C03B19/09
CPC分类号： C03B19/095 , C03B29/02 , Y02P40/57
摘要： Provided is a method for manufacturing a vitreous silica crucible and a manufacturing apparatus for the same, which can reduce the amount of bubbles and impurities of a crucible inner surface and enhance a crystallization yield of silicon single crystal. A method for manufacturing a vitreous silica crucible of the invention includes a silica powder supplying process of supplying silica powder in a rotating mold to form a silica powder layer; an arc fusing process of fusing the silica powder layer by arc discharge generated by carbon electrodes; and a fire polishing process of throwing an arc flame toward a target surface of the silica powder layer for surface removal, wherein, in the fire polishing process, the distances from the tips of the carbon electrodes to the target surface is set to be equal.
摘要翻译：提供一种制造石英玻璃坩埚及其制造装置的方法，其可以减少坩埚内表面的气泡和杂质的量，并提高单晶硅的结晶产率。本发明的石英玻璃坩埚的制造方法包括在旋转模具中供给二氧化硅粉末以形成二氧化硅粉末层的二氧化硅粉末供给工序; 通过由碳电极产生的电弧放电使二氧化硅粉末层熔融的电弧熔合工艺; 以及向二氧化硅粉末层的靶表面投射弧形火焰以进行表面去除的火抛光处理，其中，在火焰研磨处理中，将从碳电极的前端到目标表面的距离设定为相等。

3. 发明授权

US08769988B2 Method and apparatus for manufacturing vitreous silica crucible 有权
标题翻译：石英玻璃坩埚的制造方法和装置
公开(公告)号：US08769988B2
公开(公告)日：2014-07-08
申请号：US13308277
申请日：2011-11-30
申请人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
发明人： Toshiaki Sudo , Hiroshi Kishi , Kouta Hasebe
IPC分类号： C03B19/09 , C03B29/02
CPC分类号： C03B19/095 , C03B29/02 , Y02P40/57
摘要： Provided is a method for manufacturing a vitreous silica crucible and a manufacturing apparatus for the same, which can reduce the amount of bubbles and impurities of a crucible inner surface and enhance a crystallization yield of silicon single crystal. A method for manufacturing a vitreous silica crucible of the invention includes a silica powder supplying process of supplying silica powder in a rotating mold to form a silica powder layer; an arc fusing process of fusing the silica powder layer by arc discharge generated by carbon electrodes; and a fire polishing process of throwing an arc flame toward a target surface of the silica powder layer for surface removal, wherein, in the fire polishing process, the distances from the tips of the carbon electrodes to the target surface is set to be equal.
摘要翻译：提供一种制造石英玻璃坩埚及其制造装置的方法，其可以减少坩埚内表面的气泡和杂质的量，并提高单晶硅的结晶产率。本发明的石英玻璃坩埚的制造方法包括在旋转模具中供给二氧化硅粉末以形成二氧化硅粉末层的二氧化硅粉末供给工序; 通过由碳电极产生的电弧放电使二氧化硅粉末层熔融的电弧熔合工艺; 以及向二氧化硅粉末层的靶表面投射弧形火焰以进行表面去除的火抛光处理，其中，在火焰研磨处理中，将从碳电极的前端到目标表面的距离设定为相等。

4. 发明申请

US20110197631A1 METHOD AND APPARATUS FOR MANUFACTURING VITREOUS SILICA CRUCIBLE 有权
标题翻译：用于制造维生素二氧化硅可溶性的方法和装置
公开(公告)号：US20110197631A1
公开(公告)日：2011-08-18
申请号：US13095431
申请日：2011-04-27
申请人： Toshiaki SUDO , Hiroshi KISHI , Kouta HASEBE
发明人： Toshiaki SUDO , Hiroshi KISHI , Kouta HASEBE
IPC分类号： C03B19/09 , C03B29/00
CPC分类号： C03B19/095
摘要： Provided is a method of manufacturing a vitreous silica crucible, including: an arc fusing process for fusing the silica powder molded body by using arc flames generated from the plurality of carbon electrodes, wherein the arc fusing process is performed in a state of disposing tips of at least a pair of carbon electrodes of the plurality of carbon electrodes closer to a target surface of the silica powder molded body than other carbon electrode tips, and setting distances from each of the tips of the closer carbon electrodes to the target surface, to be equal, and the arc fusing process is performed by heating and fusing the silica powder molded body while performing fire polishing, which partially removes an inner surface of the silica powder molded body by using arc flames generated by the closer carbon electrodes.
摘要翻译：本发明提供一种石英玻璃坩埚的制造方法，其特征在于，包括：通过使用由所述多个碳电极产生的电弧火焰来熔融所述二氧化硅粉末成形体的电弧熔合法，其中，所述电弧定影处理以多个碳电极中的至少一对碳电极比其他碳电极端部更靠近二氧化硅粉末成形体的目标表面，并且将距离更近的碳电极的每个尖端到目标表面的距离设定为相等，通过在进行火抛光的同时对二氧化硅粉末成形体进行加热熔融来进行电弧定影处理，通过使用由较近的碳电极产生的电弧火来部分除去二氧化硅粉末成形体的内表面。

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