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    • 8. 发明授权
    • Method and a device for the positioning of a displaceable component in an examining system
    • 用于在检查系统中定位可移位部件的方法和装置
    • US07934323B2
    • 2011-05-03
    • US11992850
    • 2006-09-29
    • Detlef KnebelTorsten Jähnke
    • Detlef KnebelTorsten Jähnke
    • G01B5/00
    • G01Q70/04G01N35/04G01N2035/0491G01Q10/04
    • The invention relates to a method and a device for the positioning of a displaceable component in an examining system, particularly a measuring or an analytic system wherein, during the process, the displaceable component is displaced with the support of an actuating element coupled to the displaceable component from a home position into an end position, wherein the actuating element is moved by means of a drive force and the displaceable component is impacted with a fixation force fixating the displaceable component in the end position by way of a fixation component connected to the displaceable component, where the fixation component is submerged at least partially in a reservoir of a medium and is fixated in the medium by means of the transformation of the medium from a liquid state into a solidified state, wherein the medium is transformed from the liquid state into the solidified state by means of the impact-application with a manipulating variable.
    • 本发明涉及一种用于在检查系统中定位可移动部件的方法和装置,特别是测量系统或分析系统,其中在该过程期间,可移位部件与致动元件的支撑件相接触, 组件从原始位置到终端位置,其中致动元件通过驱动力移动,并且可移动部件用固定力冲击,固定力通过连接到可移位的固定部件固定到终止位置 组分,其中固定组分至少部分地浸没在介质的储存器中,并且通过将介质从液态转变为固化状态而固定在介质中,其中介质从液态转变为 通过具有操纵变量的冲击应用的固化状态。
    • 10. 发明授权
    • Method for examining a measurement object, and apparatus
    • 用于检查测量对象的方法及装置
    • US08769711B2
    • 2014-07-01
    • US12083303
    • 2006-06-30
    • Torsten Jähnke
    • Torsten Jähnke
    • G01Q60/24
    • G01Q10/06G01Q30/025G01Q30/06
    • The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.
    • 本发明涉及一种用于检查测量对象(2,12)的方法,其中使用扫描探针测量装置的测量探针(10)通过扫描探针显微镜检查测量对象(2,12),以及 其中所述测量对象(2,12)的至少一个子部分(1)由与所述光学测量系统相关联的观察区域中的光学测量系统进行光学检查,其中所述至少一个子部分(1)的位移 通过扫描探针显微镜检查引起的观察区域外的测量对象(2,12)被校正为使得测量对象(2,12)的至少一个移位子部分(1) )通过处理表征位移的数据信号的重新调整装置布置在观察区域中。