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    • 7. 发明授权
    • Electron beam lithography apparatus and method for compensating for electron beam misalignment
    • 电子束光刻装置及补偿电子束失准的方法
    • US07807988B2
    • 2010-10-05
    • US11851188
    • 2007-09-06
    • Toshihiro UsaKazunori Komatsu
    • Toshihiro UsaKazunori Komatsu
    • H01J3/26G11B9/10
    • H01J37/3026B82Y10/00B82Y40/00H01J37/1472H01J37/3045H01J37/3174H01J2237/30461Y10S430/143
    • Linear movement direction of the stage and the actual deflection direction of the electron beam deflected by the first command signal for deflecting the electron beam in the linear movement direction of the stage do not necessarily align with each other for reasons such as the disposition precision of the stage driving device, a lens system, and the deflecting device. Therefore, the first command signal output from the first command device is processed based on the angle between the linear movement direction of the stage driven by the stage driving device and the deflection direction of the electron beam deflected by the first command signal so that the deflection direction of the electron beam aligns with the linear movement direction of the stage. With this processed first command signal, the deflection direction of the electron beam can be changed (rotated) to align with the linear movement direction of the stage.
    • 由于第一命令信号偏转的电子束的线性运动方向和用于使电子束沿着平台的线性移动方向偏转的实际偏转方向,不一定对准,原因如 舞台驱动装置,透镜系统和偏转装置。 因此,从第一指令装置输出的第一命令信号基于由载物台驱动装置驱动的载物台的线性移动方向与由第一命令信号偏转的电子束的偏转方向之间的角度被处理,使得偏转 电子束的方向与载物台的线性运动方向对齐。 利用该处理的第一命令信号,可以改变(旋转)电子束的偏转方向以与平台的线性移动方向对齐。
    • 9. 发明授权
    • Electron beam lithography method
    • 电子束光刻法
    • US07141356B2
    • 2006-11-28
    • US11169575
    • 2005-06-30
    • Toshihiro UsaKazunori Komatsu
    • Toshihiro UsaKazunori Komatsu
    • G03C5/00G11B7/00
    • B82Y10/00B82Y40/00H01J37/3174Y10S430/143
    • Deflecting means, for deflecting an electron beam in a radial direction and the circumferential direction, and blanking means, for shielding irradiation of the electron beam at portions other than drawing portions, are provided. While the disk is rotated unidirectionally, the electron beam is repeatedly deflected in a figure 8 pattern, in which the electron beam is deflected toward the next deflection initiation point in the radial direction at track edge portions, such that the deflected directions toward the inner periphery of the disk and toward the outer periphery of the disk intersect each other. Parallel scanning is performed alternately toward the outer periphery and the inner periphery of the disk. Elements of a transfer pattern, having lengths which are integer multiples of a reference value, are drawn by performing scanning a number of times equal to the integer that the reference value is multiplied by.
    • 提供用于使电子束沿径向和圆周方向偏转的偏转装置,以及用于屏蔽除了拉伸部分之外的部分处的电子束照射的消隐装置。 当盘被单向旋转时,电子束在图8 图案中被重复地偏转,其中电子束在径向方向上沿着径向方向偏转到下一个偏转起始点 边缘部分,使得朝向盘的内周和朝向盘的外周的偏转方向彼此相交。 交替地向盘的外周和内周进行并行扫描。 通过执行等于参考值乘以的整数的次数来绘制具有作为参考值的整数倍的长度的传送图案的元素。