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    • 3. 发明申请
    • INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN
    • 磁性样本检验仪器
    • US20070194230A1
    • 2007-08-23
    • US11672617
    • 2007-02-08
    • Teruo KOHASHITomokazu Shimakura
    • Teruo KOHASHITomokazu Shimakura
    • G21K7/00
    • H01J37/29H01J2237/2067H01J2237/24557H01J2237/24564H01J2237/2538
    • An inspection technique capable of observing a magnetic domain configuration which is formed on a magnetic specimen surface with a higher resolution and at a higher speed as never before. The inspection technique includes an SPLEEM observation unit including a spin polarized electron source, an irradiation optics that projects a spin polarized electron beam that is emitted from the spin polarized electron source to a magnetic specimen having a magnetic domain structure, a stage on which the magnetic specimen is mounted, an imaging optics that focuses and detects the electron beam that is reflected from the magnetic specimen; and cleaning means for cleaning the surface of the magnetic specimen to transfer the magnetic specimen to the SPLEEM observation unit, wherein the magnetic domain structure of the magnetic specimen surface is inspected on the basis of the reflected electron beam.
    • 一种能够以前所未有地观察以高分辨率和高速度形成在磁性试样表面上的磁畴结构的检查技术。 检查技术包括:包括自旋极化电子源的SPLEEM观察单元,将从自旋极化电子源发射的自旋极化电子束投射到具有磁畴结构的磁性试样的照射光学系统, 安装了样本,成像光学元件,聚焦并检测从磁性样本反射的电子束; 以及用于清洁磁性试样的表面以将磁性样本转移到SPLEEM观察单元的清洁装置,其中基于反射的电子束检查磁性试样表面的磁畴结构。
    • 6. 发明授权
    • Charged particle beam device
    • 带电粒子束装置
    • US08410438B2
    • 2013-04-02
    • US13099438
    • 2011-05-03
    • Tomokazu ShimakuraMasaki Hasegawa
    • Tomokazu ShimakuraMasaki Hasegawa
    • G01N23/00G21K7/00
    • H01J37/29H01J37/265H01J2237/2482H01J2237/2811
    • A charged particle beam device has a tilt detection unit that detects a tilt of a sample surface and an E×B deflector in which an electric field and a magnetic field are overlapped with each other and which causes, according to the detected tilt of the sample surface, the sample surface to be perpendicularly irradiated with an irradiation charged particle beam while, at the same time, aligning the trajectory of the charged particle beam with the optical axis centers of an irradiation optical system and an imaging optical system; thereby, the charged particle beam device can prevent problems possibly occurring in cases where a sample stage is tilted or a sample surface is undulating and can enable an accurate image to be acquired.
    • 带电粒子束装置具有检测样品表面的倾斜的倾斜检测单元和其中电场和磁场彼此重叠的E×B偏转器,并且根据检测到的样品的倾斜 表面,待照射带电粒子束垂直照射的样品表面,同时使带电粒子束的轨迹与照射光学系统和成像光学系统的光轴中心对准; 因此,带电粒子束装置可以防止在样品台倾斜或样品表面波动的情况下可能发生的问题,并且可以获得准确的图像。