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    • 3. 发明申请
    • ZONE PLATE
    • 区域板块
    • US20140204463A1
    • 2014-07-24
    • US14240393
    • 2011-09-28
    • Ken HaradaTeruo Kohashi
    • Ken HaradaTeruo Kohashi
    • G02B5/18
    • G02B5/1876G02B27/42G02B27/4233G02B27/4266G02B27/44G21K1/06
    • Although, conventionally, there were two methods, (1) a wave was transmitted through a spiral phase plate and (2) a diffraction grating containing an edge dislocation was used, they incurred complication of a configuration and securement of a larger amount of space and were not efficient because each of the spiral wave generation methods needed an incident wave to be a plane wave and at least one time of imaging is necessary at the time of wave irradiation on an observation object. In order to efficiently generate the spiral wave having a sufficient intensity, a structure of edge dislocation is taken in into a pattern of the zone plate and a spiral pattern containing a discontinuous zone is formed. Moreover, a thickness and a quality of material that change the phase of the wave by an odd multiple of π are selected for a material of the wave-blocking section in the pattern.
    • 虽然通常有两种方法:(1)通过螺旋相板传播波,(2)使用包含边缘位错的衍射光栅,它们引起配置的复杂化并确保更大的空间, 不是有效的,因为每个螺旋波产生方法需要入射波为平面波,并且在观察对象上的波照射时需要至少一次成像时间。 为了有效地产生具有足够强度的螺旋波,边缘位错的结构被取入到区域板的图案中,并且形成包含不连续区域的螺旋图案。 此外,将波的相位改变为奇数倍的材料的厚度和质量; 被选择为图案中的波形阻挡部分的材料。
    • 9. 发明申请
    • INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN
    • 磁性样本检验仪器
    • US20070194230A1
    • 2007-08-23
    • US11672617
    • 2007-02-08
    • Teruo KOHASHITomokazu Shimakura
    • Teruo KOHASHITomokazu Shimakura
    • G21K7/00
    • H01J37/29H01J2237/2067H01J2237/24557H01J2237/24564H01J2237/2538
    • An inspection technique capable of observing a magnetic domain configuration which is formed on a magnetic specimen surface with a higher resolution and at a higher speed as never before. The inspection technique includes an SPLEEM observation unit including a spin polarized electron source, an irradiation optics that projects a spin polarized electron beam that is emitted from the spin polarized electron source to a magnetic specimen having a magnetic domain structure, a stage on which the magnetic specimen is mounted, an imaging optics that focuses and detects the electron beam that is reflected from the magnetic specimen; and cleaning means for cleaning the surface of the magnetic specimen to transfer the magnetic specimen to the SPLEEM observation unit, wherein the magnetic domain structure of the magnetic specimen surface is inspected on the basis of the reflected electron beam.
    • 一种能够以前所未有地观察以高分辨率和高速度形成在磁性试样表面上的磁畴结构的检查技术。 检查技术包括:包括自旋极化电子源的SPLEEM观察单元,将从自旋极化电子源发射的自旋极化电子束投射到具有磁畴结构的磁性试样的照射光学系统, 安装了样本,成像光学元件,聚焦并检测从磁性样本反射的电子束; 以及用于清洁磁性试样的表面以将磁性样本转移到SPLEEM观察单元的清洁装置,其中基于反射的电子束检查磁性试样表面的磁畴结构。