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1. 发明申请

US20100151126A1 SUBSTRATE COATING METHOD AND SUBSTRATE COATING APPARATUS 审中-公开
标题翻译：基材涂料方法和基材涂料装置
公开(公告)号：US20100151126A1
公开(公告)日：2010-06-17
申请号：US12638418
申请日：2009-12-15
申请人： Tomohiro ISEKI , Kentaro YOSHIHARA , Tomohiro NODA , Kousuke YOSHIHARA
发明人： Tomohiro ISEKI , Kentaro YOSHIHARA , Tomohiro NODA , Kousuke YOSHIHARA
IPC分类号： B05D1/40 , B05C5/02
CPC分类号： B05D1/005 , G03F7/162 , H01L21/6715
摘要： There are provided a substrate coating method and a substrate coating apparatus to achieve the uniformity of a coating-liquid film and the improvement of the yield by inhibiting the bubbles generated during the application of a coating liquid. Also, there are provided a substrate coating method and a substrate coating apparatus to achieve the effective availability of the coating liquid and the uniformity of the coating-liquid film.According to one example, a substrate coating method includes forming a liquid pool of deionized water by rotating the substrate at low speed of a first rotation speed and supplying deionized water to the center of the substrate, mixing the water-soluble coating liquid with the deionized water by supplying the coating liquid to the center of the substrate in a state where the substrate is rotated at the first rotation speed, and forming the coating-liquid film by rotating the substrate at a second rotation speed higher than the first rotation speed.According to another example, a substrate coating method includes forming a liquid pool of the deionized water by rotating the substrate at low speed of a first rotation speed and supplying deionized water to the center of the substrate, mixing the water-soluble coating liquid with the deionized water by supplying the coating liquid to the center of the substrate in a state where the substrate is rotated at the first rotation speed, and forming the coating-liquid film by rotating the substrate at a second rotation speed higher than the first rotation speed. The discharge of the coating liquid (TARC) is set by controlling the time ratio of mixing the coating liquid with the deionized water to forming the coating-liquid film to be within a range of 1:3 to 3:1.
摘要翻译：提供了一种基板涂布方法和基材涂布装置，以实现涂布液膜的均匀性，并且通过抑制涂布液施加期间产生的气泡来提高产率。此外，提供了一种基板涂布方法和基材涂布装置，以实现涂布液的有效可用性和涂布液膜的均匀性。根据一个实例，基材涂布方法包括通过以低速旋转第一转速的方式形成去离子水的液体池，并将去离子水供应到基材的中心，将水溶性涂布液与去离子水在基板以第一转速旋转的状态下将涂布液供给到基板的中心，通过以比第一旋转速度高的第二旋转速度旋转基板来形成涂布液膜而形成涂布液。根据另一个实例，基材涂布方法包括通过以第一转速的低速旋转基板来形成去离子水的液体池，并将去离子水供给到基板的中心，将水溶性涂布液与在基板以第一旋转速度旋转的状态下将涂布液供给到基板的中心，通过以比第一旋转速度高的第二旋转速度旋转基板来形成涂布液膜而形成去离子水。涂布液（TARC）的排出是通过控制涂布液与去离子水的混合时间来形成涂布液膜而设定在1：3〜3：1的范围内。

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