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1. 发明申请

US20060291517A1 High pulse repetition rate gas discharge laser 有权
公开(公告)号：US20060291517A1
公开(公告)日：2006-12-28
申请号：US11169203
申请日：2005-06-27
申请人： Walter Gillespie , Thomas Steiger , Richard Ujazdowski , William Partlo
发明人： Walter Gillespie , Thomas Steiger , Richard Ujazdowski , William Partlo
IPC分类号： H01S3/22 , H01S3/03 , H01S3/097
CPC分类号： H01S3/036 , H01S3/0384
摘要： A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise the high voltage electrode being disposed in an electrode receiving pocket in the main insulator and formed to present an elongated discharge receiving area facing another electrode within the gas discharge chamber, an aerodynamic fairing attached to the high voltage electrode and substantially closing the gas flow disturbance pocket and presenting an aerodynamically smooth surface to the gas flow.

2. 发明申请

US20070091972A1 Thermal-expansion tolerant, preionizer electrode for a gas discharge laser 有权
标题翻译：用于气体放电激光器的热膨胀容限预除电极
公开(公告)号：US20070091972A1
公开(公告)日：2007-04-26
申请号：US11237535
申请日：2005-09-27
申请人： Thomas Steiger , Richard Ujazdowski
发明人： Thomas Steiger , Richard Ujazdowski
IPC分类号： H01S3/22 , H01S3/03 , H01S3/097 , H01S3/223
CPC分类号： H01S3/09713 , H01S3/036 , H01S3/0384 , H01S3/0385 , H01S3/0388 , H01S3/225
摘要： A corona-discharge type, prelonizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated 0o conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.
摘要翻译：公开了一种用于气体放电激光器的电晕放电型预振器组件。组件可以包括限定管孔的电极和中空的电介质管。在一个方面，电极可以包括第一细长导电构件，其具有设置在管的孔中的第一端。此外，电极可以包括第二细长导电构件，其具有设置在孔中并与第一导电构件的第一端隔开的第一端。对于组件，第一和第二导电构件可以保持在相同的电压电位。

3. 发明申请

US20050226301A1 Gas discharge laser chamber improvements 有权
公开(公告)号：US20050226301A1
公开(公告)日：2005-10-13
申请号：US10815387
申请日：2004-03-31
申请人： William Partlo , Yoshiho Amada , James Carmichael , Timothy Dyer , Walter Gillespie , Bryan Moosman , Richard Morton , Curtis Rettig , Brian Strate , Thomas Steiger , Fedor Trintchouk , Richard Ujazdowski
发明人： William Partlo , Yoshiho Amada , James Carmichael , Timothy Dyer , Walter Gillespie , Bryan Moosman , Richard Morton , Curtis Rettig , Brian Strate , Thomas Steiger , Fedor Trintchouk , Richard Ujazdowski
IPC分类号： H01S3/03 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/225
CPC分类号： H01S3/036 , H01S3/0384 , H01S3/041 , H01S3/0971 , H01S3/225
摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

4. 发明申请

US20050047471A1 Halogen gas discharge laser electrodes 有权
公开(公告)号：US20050047471A1
公开(公告)日：2005-03-03
申请号：US10877737
申请日：2004-06-25
申请人： Thomas Steiger , Richard Ujazdowski , Timothy Dyer , Thomas Duffey , Walter Gillespie , Bryan Moosman , Richard Morton , Brian Strate
发明人： Thomas Steiger , Richard Ujazdowski , Timothy Dyer , Thomas Duffey , Walter Gillespie , Bryan Moosman , Richard Morton , Brian Strate
IPC分类号： H01S20060101 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/225
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.

5. 发明申请

US20060222034A1 6 Khz and above gas discharge laser system 审中-公开
标题翻译： 6 Khz及以上气体放电激光系统
公开(公告)号：US20060222034A1
公开(公告)日：2006-10-05
申请号：US11095976
申请日：2005-03-31
申请人： Richard Ujazdowski , Richard Ness , J. Algots , Vladimir Fleurov , Frederick Palenschat , Walter Gillespie , Bryan Moosman , Thomas Steiger , Brett Smith , Thomas McKelvey
发明人： Richard Ujazdowski , Richard Ness , J. Algots , Vladimir Fleurov , Frederick Palenschat , Walter Gillespie , Bryan Moosman , Thomas Steiger , Brett Smith , Thomas McKelvey
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/036 , H01F3/10 , H01F27/22 , H01F27/266 , H01F38/10 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/225 , H01S3/2308
摘要： A high pulse repetition rate gas discharge laser system pulse power system magnetic reactor may comprise a housing comprising a core containing compartment between an inner wall of the housing, an outer wall and a bottom wall of the housing; a cooling mechanism operative to withdraw heat from the at least one of the inner wall, outer wall and bottom of the housing; at least one two magnetic cores contained within the core containing compartment; a cooling fin disposed between each of the at least two magnetic cores; and a thermal conductivity enhancement mechanism intermediate at least one of each respective cooling fin and each respective core and a respective one of the inner wall, the outer wall or the bottom wall, the thermal conductivity enhancement mechanism comprising a band comprising a plurality of torsion spring or leaf spring elements.
摘要翻译：高脉冲重复率气体放电激光系统脉冲功率系统磁反应器可以包括壳体，该壳体包括在壳体的内壁，外壁和壳体的底壁之间的容纳核心的隔间; 冷却机构，用于从壳体的内壁，外壁和底部中的至少一个中提取热量; 至少一个两个磁芯包含在所述芯容纳室内; 设置在所述至少两个磁芯中的每一个之间的冷却翅片; 以及在每个相应的冷却翅片和每个相应的芯部以及内壁，外壁或底壁中的相应的一个中的至少一个的热导率增强机构，所述热导率增强机构包括包括多个扭转弹簧或板簧元件。

6. 发明申请

US20060126697A1 Very narrow band, two chamber, high rep-rate gas discharge laser system 有权
公开(公告)号：US20060126697A1
公开(公告)日：2006-06-15
申请号：US11346519
申请日：2006-02-01
申请人： David Knowles , Daniel Brown , Herve Besaucele , David Myers , Alexander Ershov , William Partlo , Richard Sandstrom , Palash Das , Stuart Anderson , Igor Fomenkov , Richard Ujazdowski , Eckehard Onkels , Richard Ness , Scott Smith , William Hulburd , Jeffrey Oicles
发明人： David Knowles , Daniel Brown , Herve Besaucele , David Myers , Alexander Ershov , William Partlo , Richard Sandstrom , Palash Das , Stuart Anderson , Igor Fomenkov , Richard Ujazdowski , Eckehard Onkels , Richard Ness , Scott Smith , William Hulburd , Jeffrey Oicles
IPC分类号： H01S3/22
CPC分类号： G01J1/4257 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the first discharge region containing the lasing gas medium, a line narrowing unit for narrowing a spectral bandwidth of output laser light pulse beam pulses produced in said first discharge region; a second laser unit which may comprise a second discharge chamber which may contain an excimer or molecular fluorine lasing gas medium; a second pair of electrodes defining the second discharge region containing the lasing gas medium; a pulse power system providing electrical pulses to the first pair of electrodes and to the second pair of electrodes producing gas discharges in the lasing gas medium between the respective first and second pair of electrodes, and laser parameter control mechanism modifying a selected parameter of a selected laser output light pulse beam pulse produced by said gas discharge laser system by controlling the timing of the occurrence of the gas discharge between the first pair of electrodes and the occurrence of the gas discharge between the second pair of electrodes.

7. 发明申请

US20070253459A1 Extendable electrode for gas discharge laser 有权
标题翻译：气体放电激光可扩展电极
公开(公告)号：US20070253459A1
公开(公告)日：2007-11-01
申请号：US11787463
申请日：2007-04-16
申请人： Richard Sandstrom , Tae (Mark) Chung , Richard Ujazdowski
发明人： Richard Sandstrom , Tae (Mark) Chung , Richard Ujazdowski
IPC分类号： H01S3/097 , H01S3/038
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.
摘要翻译：本文公开了用于在横向放电气体激光室中延伸一个或两个放电电极的系统和方法，其中一个或两个电极由于侵蚀而经受尺寸变化。可以执行电极延伸以增加室的寿命，在室的寿命或两者都增加激光器性能。可操作地，可以调整电极间间隔以维持电极之间的特定目标间隙距离或者优化激光输出光束的特定参数，例如带宽，脉冲到脉冲能量稳定性，光束尺寸等。

8. 发明申请

US20050271109A1 VERY NARROW BAND, TWO CHAMBER, HIGH REP-RATE GAS DISCHARGE LASER SYSTEM 有权
标题翻译：非常窄带，两个室，高倍率气体放电激光系统
公开(公告)号：US20050271109A1
公开(公告)日：2005-12-08
申请号：US11199691
申请日：2005-08-09
申请人： David Knowles , Daniel Brown , Herve Besaucele , David Myers , Alexander Ershov , William Partlo , Richard Sandstrom , Palash Das , Stuart Anderson , Igor Fomenkov , Richard Ujazdowski , Eckehard Onkels , Richard Ness , Scot Smith , William Hulburd , Jeffrey Oicles
发明人： David Knowles , Daniel Brown , Herve Besaucele , David Myers , Alexander Ershov , William Partlo , Richard Sandstrom , Palash Das , Stuart Anderson , Igor Fomenkov , Richard Ujazdowski , Eckehard Onkels , Richard Ness , Scot Smith , William Hulburd , Jeffrey Oicles
IPC分类号： H01S1/00 , G01J1/42 , G01J9/00 , G03F7/20 , H01S3/00 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/0943 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/131 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： G01J1/4257 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the first discharge region containing the lasing gas medium, a line narrowing unit for narrowing a spectral bandwidth of output laser light pulse beam pulses produced in said first discharge region; a second laser unit which may comprise a second discharge chamber which may contain an excimer or molecular fluorine lasing gas medium; a second pair of electrodes defining the second discharge region containing the lasing gas medium; a pulse power system providing electrical pulses to the first pair of electrodes and to the second pair of electrodes producing gas discharges in the lasing gas medium between the respective first and second pair of electrodes, and laser parameter control mechanism modifying a selected parameter of a selected laser output light pulse beam pulse produced by said gas discharge laser system by controlling the timing of the occurrence of the gas discharge between the first pair of electrodes and the occurrence of the gas discharge between the second pair of electrodes.
摘要翻译：公开了一种振荡放大器气体放电激光器系统和方法，其可以包括第一激光器单元，该第一激光器单元可以包括可包含受激准分子或分子氟激光气体介质的第一放电区域; 限定含有激光气体介质的第一放电区域的第一对电极，用于使在所述第一放电区域中产生的输出激光脉冲光束脉冲的光谱带宽变窄的线窄化单元; 第二激光单元，其可以包括可包含受激准分子或分子氟激光气体介质的第二放电室; 限定包含所述激光气体介质的所述第二放电区域的第二对电极; 脉冲功率系统，其向所述第一对电极和所述第二对电极提供电脉冲，在所述相应的第一和第二对电极之间的所述激光气体介质中产生气体放电，以及激光参数控制机构修改所选择的所选择的参数通过控制第一对电极之间的气体放电的发生时间和第二对电极之间的气体放电的发生的时间，由所述气体放电激光系统产生的激光输出光脉冲束脉冲。

9. 发明授权

US5548234A System and method for control of a Pockel's cell 失效
标题翻译：用于控制普克尔细胞的系统和方法
公开(公告)号：US5548234A
公开(公告)日：1996-08-20
申请号：US361739
申请日：1994-12-21
申请人： Laszlo Turi , Richard Ujazdowski , Tibor Juhasz
发明人： Laszlo Turi , Richard Ujazdowski , Tibor Juhasz
IPC分类号： G02F1/03 , H03K3/57 , H03K17/10 , H03K17/691 , H03K3/00
CPC分类号： G02F1/0327 , H03K17/102 , H03K17/691 , H03K3/57
摘要： A two-step solid state optical switch system includes an electro-optical material positioned between a first electrode and a grounded second electrode. A voltage source is electrically connectable to the first electrode by an ON switch. When the ON switch is closed, a plurality of field effect transistors establish electrical contact between the voltage source and the first electrode to charge the first electrode and change the optical characteristics of the electro-optical material. An OFF switch, which is also electrically connectable to the first electrode, includes a plurality of field effect transistors, which establish electrical contact between ground and the first electrode when the OFF switch is closed. With the closing of the OFF switch, any voltage on the first electrode is removed to restore the optical characteristics of the electro-optical material. Electronic components of the system selectively activate the ON switch and the OFF switch in a sequence so that both switches are never simultaneously closed.
摘要翻译：两步固态光开关系统包括位于第一电极和接地的第二电极之间的电光材料。电压源通过ON开关电连接到第一电极。当ON开关闭合时，多个场效应晶体管建立电压源和第一电极之间的电接触，以对第一电极充电并改变电光材料的光学特性。也可电连接到第一电极的OFF开关包括多个场效应晶体管，当OFF开关闭合时，该场效应晶体管在地与第一电极之间建立电接触。随着OFF开关的关闭，去除第一电极上的任何电压以恢复电光材料的光学特性。系统的电子部件按顺序选择性地激活ON开关和OFF开关，使得两个开关从不同时关闭。

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