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1. 发明授权

US07016388B2 Laser lithography light source with beam delivery 有权
公开(公告)号：US07016388B2
公开(公告)日：2006-03-21
申请号：US10712688
申请日：2003-11-12
申请人： Brian Klene , Palash P. Das , Steve Grove , Alexander Ershov , Scot Smith , Xiaojiang Pan , Richard L. Sandstrom
发明人： Brian Klene , Palash P. Das , Steve Grove , Alexander Ershov , Scot Smith , Xiaojiang Pan , Richard L. Sandstrom
IPC分类号： H01S3/22
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source for a production line machine. The system includes an enclosed and purged beam path for delivery the laser beam to a desired location such as the entrance port of the production line machine. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.

2. 发明授权

US06693939B2 Laser lithography light source with beam delivery 有权
标题翻译：激光光刻光源带光束传输
公开(公告)号：US06693939B2
公开(公告)日：2004-02-17
申请号：US10141216
申请日：2002-05-07
申请人： Brian Klene , Palash P. Das , Steve Grove , Alexander Ershov , Scot Smith , Xiaojiang Pan , Richard L. Sandstrom
发明人： Brian Klene , Palash P. Das , Steve Grove , Alexander Ershov , Scot Smith , Xiaojiang Pan , Richard L. Sandstrom
IPC分类号： H01S322
CPC分类号： G03F7/70933 , G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source for a production line machine. The system includes an enclosed and purged beam path for delivery the laser beam to a desired location such as the entrance port of the production line machine. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.
摘要翻译：本发明提供一种用于生产线机器的模块化高重复率紫外线气体放电激光源。该系统包括用于将激光束传送到期望位置（例如生产线机器的入口）的封闭和清除的光束路径。在优选实施例中，生产线机器是光刻机，并且提供两个单独的放电室，其中之一是主振荡器的一部分，其产生在第二放电室中放大的非常窄的带状晶体束。该MOPA系统能够以大大提高的光束质量将输出脉冲能量大约增加到相当的单室激光器系统的两倍。与现有技术的激光系统相比，脉冲放大器使输出脉冲长度加倍，导致脉冲功率（mJ / ns）的降低。该优选实施例能够在光刻系统晶片平面处提供照明，其在光刻系统的整个使用寿命期间大致恒定，尽管光学部件的实质性劣化。

3. 发明申请

US20120138209A1 Methods of Manufacturing Paint Roller Covers From A Tubular Fabric Sleeve 有权
标题翻译：从管状织物套筒制造油漆滚筒盖的方法
公开(公告)号：US20120138209A1
公开(公告)日：2012-06-07
申请号：US13309020
申请日：2011-12-01
申请人： Daniel L. Sinykin , Randy Smith , Scot Smith
发明人： Daniel L. Sinykin , Randy Smith , Scot Smith
IPC分类号： A46D1/08 , B05C1/00
CPC分类号： B44D3/125 , B05C17/0207 , B29C63/10 , B29C63/18 , B29C63/48 , B29C2063/485 , B29C2793/009 , B29L2031/328 , D04B1/025
摘要： A method of manufacturing paint roller covers is disclosed in which the paint roller covers are manufactured from a seamless segment of tubular paint roller cover fabric that is placed onto a cylindrical forming tube having a segment of bonding material temporarily secured on its outer surface under the segment of tubular paint roller cover fabric. The cylindrical forming tube is placed on a heated mandrel to apply heat thereto to cause the bonding material to bond to the interior of the segment of tubular paint roller cover fabric. The cylindrical forming tube is removed from the mandrel and cooled, and the segment of tubular paint roller cover fabric becomes secured to the bonding material to produce a semi-rigid paint roller cover segment. The semi-rigid paint roller cover segment may be finished into paint roller covers.
摘要翻译：公开了一种制造油漆滚筒盖的方法，其中涂料辊盖由管状油漆辊覆盖织物的无缝段制成，其被放置在圆柱形成型管上，该圆筒形成管具有临时固定在其外表面下的粘结材料段的管状油漆辊盖面料。将圆柱形成型管放置在加热心轴上以对其施加热量，使粘合材料结合到管状油漆辊覆盖织物的段的内部。将圆筒形成形管从心轴上取出并冷却，并且将管状油漆辊覆盖织物的段固定到粘合材料上以产生半刚性涂料辊盖部分。半刚性涂料辊盖部分可以完成成油漆辊盖。

4. 发明授权

US07600589B2 Rotary drill bits 有权
标题翻译：旋转钻头
公开(公告)号：US07600589B2
公开(公告)日：2009-10-13
申请号：US11947624
申请日：2007-11-29
申请人： Anton F. Zahradnik , Eric C. Sullivan , R. Scot Smith , Daniel E. Ruff , Danielle V. Roberts , Alan J. Massey
发明人： Anton F. Zahradnik , Eric C. Sullivan , R. Scot Smith , Daniel E. Ruff , Danielle V. Roberts , Alan J. Massey
IPC分类号： E21B10/36
CPC分类号： B23K31/02 , E21B10/00 , E21B10/42
摘要： A shank configuration for rotary drill bits, is disclosed for positioning of the shank in relation to the bit body. A tapered surface or feature of the shank may be configured and sized to matingly engage a complementarily shaped surface or feature of the drill bit body and thereby become centered or positioned in relation thereto. A deformable element may be disposed between the shank and bit body. Also, the shank may comprise a material having a carbon equivalent of less than about 0.35%. A multi-pass weld procedure may be employed to affix the shank and bit body to one another wherein welds may be formed so that one weld originates at a circumferential position that differs from the origination circumferential position of its immediately preceding weld by at least about 90%. Further, a stress state may be developed within the multi-pass weld. A method of manufacture is also disclosed.
摘要翻译：公开了一种用于旋转钻头的柄构造，用于相对于钻头体定位柄。柄的锥形表面或特征可以被构造和定尺寸成匹配地接合钻头体的互补成形的表面或特征，从而相对于钻头体中心或定位。可变形元件可以设置在柄和钻头体之间。另外，柄部可以包含碳当量小于约0.35％的材料。可以采用多通焊接方法将柄和钻头体彼此固定，其中可以形成焊缝，使得一个焊缝起始于不同于其紧接在前的焊缝的起始圆周位置的周向位置至少约90° ％。此外，可以在多遍焊缝内形成应力状态。还公开了一种制造方法。

5. 发明授权

US07472764B2 Rotary drill bit shank, rotary drill bits so equipped, and methods of manufacture 有权
标题翻译：旋转钻头柄，旋转钻头如此配备，以及制造方法
公开(公告)号：US07472764B2
公开(公告)日：2009-01-06
申请号：US11090932
申请日：2005-03-25
申请人： Anton F. Zahradnik , Eric C. Sullivan , R. Scot Smith , Daniel E. Ruff , Danielle V. Roberts , Alan J. Massey
发明人： Anton F. Zahradnik , Eric C. Sullivan , R. Scot Smith , Daniel E. Ruff , Danielle V. Roberts , Alan J. Massey
IPC分类号： E21B10/36
CPC分类号： B23K31/02 , E21B10/00 , E21B10/42
摘要： A shank configuration for rotary drill bits is disclosed for positioning of the shank in relation to the bit body. A tapered surface or feature of the shank may be configured and sized to matingly engage a complementarily shaped surface or feature of the drill bit body and thereby become centered or positioned in relation thereto. A deformable element may be disposed between the shank and bit body. Also, the shank may comprise a material having a carbon equivalent of less than about 0.35%. A multi-pass weld procedure may be employed to affix the shank and bit body to one another wherein welds may be formed so that one weld originates at a circumferential position that differs from the origination circumferential position of its immediately preceding weld by at least about 90°. Further, a stress state may be developed within the multi-pass weld. A method of manufacture is also disclosed.
摘要翻译：公开了一种用于旋转钻头的柄构造，用于相对于钻头体定位柄。柄的锥形表面或特征可以被构造和定尺寸成匹配地接合钻头体的互补成形的表面或特征，从而相对于钻头体中心或定位。可变形元件可以设置在柄和钻头体之间。另外，柄可以包含碳当量小于约0.35％的材料。可以采用多通焊接方法将柄和钻头体彼此固定，其中可以形成焊缝，使得一个焊缝起始于不同于其紧接在前的焊缝的起始圆周位置的周向位置至少约90° °。此外，可以在多遍焊缝内形成应力状态。还公开了一种制造方法。

6. 发明申请

US20050286599A1 Method and apparatus for gas discharge laser output light coherency reduction 审中-公开
公开(公告)号：US20050286599A1
公开(公告)日：2005-12-29
申请号：US10881533
申请日：2004-06-29
申请人： Robert Rafac , Scot Smith
发明人： Robert Rafac , Scot Smith
IPC分类号： G01J1/42 , G01J3/02 , G01J3/12 , G01J3/26 , G01J9/02 , G02B5/04 , G02B5/28 , G02B27/48 , G03F7/20 , H01S3/00 , H01S3/08 , H01S3/22
CPC分类号： G01J3/02 , G01J1/4257 , G01J3/0205 , G01J3/027 , G01J3/0291 , G01J3/0297 , G01J3/1256 , G01J3/26 , G01J9/02 , G01J2009/0249 , G01J2009/0257 , G02B5/04 , G02B5/284 , G02B27/48 , G03F7/70025 , G03F7/70583 , H01S3/005
摘要： A method and apparatus for producing with a gas discharge laser an output laser beam comprising output laser light pulses, for delivery as a light source to a utilizing tool is disclosed which may comprise a beam path and a beam homogenizer in the beam path. The beam homogenizer may comprise at least one beam image inverter or spatial rotator, which may comprise a spatial coherency cell position shifter. The homogenizer may comprise a delay path which is longer than, but approximately the same delay as the temporal coherence length of the source beam. The homogenizer may comprise a pair of conjoined dove prisms having a partially reflective coating at the conjoined surfaces of each, a right triangle prism comprising a hypotenuse face facing the source beam and fully reflective adjoining side faces or an isosceles triangle prism having a face facing the source beam and fully reflective adjoining side faces or combinations of these, which may serve as a source beam multiple alternating inverted image creating mechanism. The beam path may be part of a bandwidth measuring the bandwidths of an output laser beam comprising output laser light in the range of below 500 femtometers at accuracies within tens of femtometers. The homogenizer may comprise a rotating diffuser which may be a ground glass diffuser which may also be etched. The wavemeter may also comprise a collimator in the beam path collimating the diffused light; a confocal etalon creating an output based upon the collimated light entering the confocal etalon; and a detector detecting the output of the confocal etalon and may also comprise a scanning mechanism scanning the angle of incidence of the collimated light entering the confocal etalon which may scan the collimated light across the confocal etalon or scan the etalon across the collimated light, and may comprise an acousto-optical scanner. The confocal etalon may have a free spectral range approximately equal to the E95 width of the beam being measured. The detector may comprise a photomultiplier detecting an intensity pattern of the output of the confocal etalon.

7. 发明申请

US20050271109A1 VERY NARROW BAND, TWO CHAMBER, HIGH REP-RATE GAS DISCHARGE LASER SYSTEM 有权
标题翻译：非常窄带，两个室，高倍率气体放电激光系统
公开(公告)号：US20050271109A1
公开(公告)日：2005-12-08
申请号：US11199691
申请日：2005-08-09
申请人： David Knowles , Daniel Brown , Herve Besaucele , David Myers , Alexander Ershov , William Partlo , Richard Sandstrom , Palash Das , Stuart Anderson , Igor Fomenkov , Richard Ujazdowski , Eckehard Onkels , Richard Ness , Scot Smith , William Hulburd , Jeffrey Oicles
发明人： David Knowles , Daniel Brown , Herve Besaucele , David Myers , Alexander Ershov , William Partlo , Richard Sandstrom , Palash Das , Stuart Anderson , Igor Fomenkov , Richard Ujazdowski , Eckehard Onkels , Richard Ness , Scot Smith , William Hulburd , Jeffrey Oicles
IPC分类号： H01S1/00 , G01J1/42 , G01J9/00 , G03F7/20 , H01S3/00 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/0943 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/131 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： G01J1/4257 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the first discharge region containing the lasing gas medium, a line narrowing unit for narrowing a spectral bandwidth of output laser light pulse beam pulses produced in said first discharge region; a second laser unit which may comprise a second discharge chamber which may contain an excimer or molecular fluorine lasing gas medium; a second pair of electrodes defining the second discharge region containing the lasing gas medium; a pulse power system providing electrical pulses to the first pair of electrodes and to the second pair of electrodes producing gas discharges in the lasing gas medium between the respective first and second pair of electrodes, and laser parameter control mechanism modifying a selected parameter of a selected laser output light pulse beam pulse produced by said gas discharge laser system by controlling the timing of the occurrence of the gas discharge between the first pair of electrodes and the occurrence of the gas discharge between the second pair of electrodes.
摘要翻译：公开了一种振荡放大器气体放电激光器系统和方法，其可以包括第一激光器单元，该第一激光器单元可以包括可包含受激准分子或分子氟激光气体介质的第一放电区域; 限定含有激光气体介质的第一放电区域的第一对电极，用于使在所述第一放电区域中产生的输出激光脉冲光束脉冲的光谱带宽变窄的线窄化单元; 第二激光单元，其可以包括可包含受激准分子或分子氟激光气体介质的第二放电室; 限定包含所述激光气体介质的所述第二放电区域的第二对电极; 脉冲功率系统，其向所述第一对电极和所述第二对电极提供电脉冲，在所述相应的第一和第二对电极之间的所述激光气体介质中产生气体放电，以及激光参数控制机构修改所选择的所选择的参数通过控制第一对电极之间的气体放电的发生时间和第二对电极之间的气体放电的发生的时间，由所述气体放电激光系统产生的激光输出光脉冲束脉冲。

8. 发明申请

US20050259709A1 Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate 审中-公开
标题翻译：用于实现形成为线束的激光与沉积在衬底上的膜之间的相互作用的系统和方法
公开(公告)号：US20050259709A1
公开(公告)日：2005-11-24
申请号：US11138001
申请日：2005-05-26
申请人： Palash Das , Thomas Hofmann , Jesse Davis , Scot Smith , William Partlo
发明人： Palash Das , Thomas Hofmann , Jesse Davis , Scot Smith , William Partlo
IPC分类号： B23K26/04 , B23K26/06 , B23K26/073 , C30B1/02 , C30B13/24 , H01S3/10 , H01S3/13
CPC分类号： B23K26/043 , B23K26/04 , B23K26/0622 , B23K26/0738 , C30B1/023 , C30B13/24
摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.
摘要翻译：公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。

9. 发明申请

US20100012392A1 SHANK STRUCTURE FOR ROTARY DRILL BITS 有权
标题翻译：旋转钻机组的SHANK结构
公开(公告)号：US20100012392A1
公开(公告)日：2010-01-21
申请号：US12566922
申请日：2009-09-25
申请人： Anton F. Zahradnik , Eric C. Sullivan , R. Scot Smith , Daniel E. Ruff , Danielle V. Roberts , Alan J. Massey
发明人： Anton F. Zahradnik , Eric C. Sullivan , R. Scot Smith , Daniel E. Ruff , Danielle V. Roberts , Alan J. Massey
IPC分类号： E21B10/42
CPC分类号： B23K31/02 , E21B10/00 , E21B10/42
摘要： A shank configuration for rotary drill bits is disclosed for positioning of the shank in relation to the bit body. A tapered surface or feature of the shank may be configured and sized to matingly engage a complementarily shaped surface or feature of the drill bit body and thereby become centered or positioned in relation thereto. A deformable element may be disposed between the shank and bit body. Also, the shank may comprise a material having a carbon equivalent of less than about 0.35%. A multi-pass weld procedure may be employed to affix the shank and bit body to one another wherein welds may be formed so that one weld originates at a circumferential position that differs from the origination circumferential position of its immediately preceding weld by at least about 90°. Further, a stress state may be developed within the multi-pass weld. A method of manufacture is also disclosed.
摘要翻译：公开了一种用于旋转钻头的柄构造，用于相对于钻头体定位柄。柄的锥形表面或特征可以被构造和定尺寸成匹配地接合钻头体的互补成形的表面或特征，从而相对于钻头体中心或定位。可变形元件可以设置在柄和钻头体之间。另外，柄可以包含碳当量小于约0.35％的材料。可以采用多通焊接方法将柄和钻头体彼此固定，其中可以形成焊缝，使得一个焊缝起始于不同于其紧接在前的焊缝的起始圆周位置的周向位置至少约90° °。此外，可以在多遍焊缝内形成应力状态。还公开了一种制造方法。

10. 发明授权

US08882957B2 Methods of manufacturing paint roller covers from a tubular fabric sleeve 有权
标题翻译：从管状织物套筒制造漆辊盖的方法
公开(公告)号：US08882957B2
公开(公告)日：2014-11-11
申请号：US13309020
申请日：2011-12-01
申请人： Daniel L. Sinykin , Randy Smith , Scot Smith
发明人： Daniel L. Sinykin , Randy Smith , Scot Smith
IPC分类号： B29C65/00 , B32B37/00 , C08J5/00 , A01B29/00 , B21B1/40 , E01C19/23 , B05C11/00 , B25F5/00 , B05C1/00 , B05C17/02 , B24D13/14 , B44D5/00 , B29C63/18 , B29C63/48 , D04B1/02 , B29C63/10 , B29L31/32
CPC分类号： B44D3/125 , B05C17/0207 , B29C63/10 , B29C63/18 , B29C63/48 , B29C2063/485 , B29C2793/009 , B29L2031/328 , D04B1/025
摘要： A method of manufacturing paint roller covers is disclosed in which the paint roller covers are manufactured from a seamless segment of tubular paint roller cover fabric that is placed onto a cylindrical forming tube having a segment of bonding material temporarily secured on its outer surface under the segment of tubular paint roller cover fabric. The cylindrical forming tube is placed on a heated mandrel to apply heat thereto to cause the bonding material to bond to the interior of the segment of tubular paint roller cover fabric. The cylindrical forming tube is removed from the mandrel and cooled, and the segment of tubular paint roller cover fabric becomes secured to the bonding material to produce a semi-rigid paint roller cover segment. The semi-rigid paint roller cover segment may be finished into paint roller covers.
摘要翻译：公开了一种制造油漆滚筒盖的方法，其中涂料辊盖由管状油漆辊覆盖织物的无缝段制成，其被放置在圆柱形成型管上，该圆筒形成管具有临时固定在其外表面下的粘结材料段的管状油漆辊盖面料。将圆柱形成型管放置在加热心轴上以对其施加热量，使粘合材料结合到管状油漆辊覆盖织物的段的内部。将圆筒形成形管从心轴上取出并冷却，并且将管状油漆辊覆盖织物的段固定到粘合材料上以产生半刚性涂料辊盖部分。半刚性涂料辊盖部分可以完成成油漆辊盖。

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