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    • 5. 发明申请
    • System For Positioning a Product
    • 用于定位产品的系统
    • US20080144008A1
    • 2008-06-19
    • US10597708
    • 2005-01-25
    • Arjan Franklin Bakker
    • Arjan Franklin Bakker
    • G01N21/00
    • G03F7/70691
    • A system for positioning a product, comprising a chuck (71) for supporting the product, an intermediate stage (79) supporting said chuck (71), and a stationary base (72) supporting said intermediate stage (79). The chuck (71) can move with respect to the intermediate stage (79) in a first direction X (80), and the intermediate stage (79) can move with respect to said stationary base in a second direction Y (81). The system furthermore comprises at least one laser interferometer (73,74,75,76,77,78) for measuring the position of the chuck (71) relative to the stationary base (72). The main part (73,74,75,76,77,78) of said laser interferometer is attached to said intermediate stage (79), so that it can measure the distance between a reflector (83,84,85) on the chuck (71) and a reflector (82,87) on the stationary base (72).
    • 一种用于定位产品的系统,包括用于支撑产品的卡盘(71),支撑所述卡盘(71)的中间台(79)和支撑所述中间台(79)的固定基座(72)。 卡盘71可以在第一方向X(80)上相对于中间台(79)移动,并且中间台(79)可以在第二方向Y(81)上相对于所述固定基座移动。 该系统还包括用于测量卡盘(71)相对于固定基座(72)的位置的至少一个激光干涉仪(73,74,75,76,77,78)。 所述激光干涉仪的主要部分(73,74,75,76,77,78)附接到所述中间台(79),使得其可以测量卡盘上的反射器(83,84,85)之间的距离 (71)和在固定基座(72)上的反射器(82,87)。
    • 6. 发明授权
    • System and method for positioning a product using a laser interferometer
    • 使用激光干涉仪定位产品的系统和方法
    • US07903258B2
    • 2011-03-08
    • US10597708
    • 2005-01-25
    • Arjan Franklin Bakker
    • Arjan Franklin Bakker
    • G01B11/02
    • G03F7/70691
    • A system for positioning a product, comprising a chuck for supporting the product, an intermediate stage supporting said chuck, and a stationary base supporting said intermediate stage. The chuck can move with respect to the intermediate stage in a first direction X, and the intermediate stage can move with respect to said stationary base in a second direction Y. The system furthermore comprises at least one laser interferometer for measuring the position of the chuck relative to the stationary base. The main part of the laser interferometer is attached to the intermediate stage, so that it can measure the distance between a reflector on the chuck and a reflector on the stationary base.
    • 一种用于定位产品的系统,包括用于支撑产品的卡盘,支撑所述卡盘的中间台和支撑所述中间台的固定基座。 卡盘可以在第一方向X相对于中间台移动,并且中间台可以在第二方向Y上相对于所述固定基座移动。该系统还包括至少一个用于测量卡盘位置的激光干涉仪 相对于固定基座。 激光干涉仪的主要部分连接到中间阶段,从而可以测量卡盘上的反射器与固定基座上的反射器之间的距离。