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    • 4. 发明授权
    • Phase noise compensation in an interferometric system
    • 干涉系统中的相位噪声补偿
    • US06900895B2
    • 2005-05-31
    • US10006490
    • 2001-12-06
    • Gregory D. Van Wiggeren
    • Gregory D. Van Wiggeren
    • G01B9/02G01B11/14G01B11/24G01N21/00G01R29/26
    • G01B9/02004G01B2290/60
    • Phase noise is at least partially cancelled for an interferometric system by using a delay/phase cross-correlation approach for two interferometers within the system. The cross-correlation approach may be used in measuring group delay of a device under test and includes determining the differences between the phase of the output of each interferometer at time t and the phase of the same output at the time t minus the delay of the other interferometer. In one embodiment, the first phase difference is the difference between the phase of a test interferometer output at time t and the phase of the test interferometer output at the time t offset by the known delay of a reference interferometer. The second phase difference is calculated using the same technique, but the time offset is a delay representative of the relative delay of two light propagations within the test interferometer. A noise-cancelled time series output that is indicative of group delay can then be generated by determining the difference between the first and second differences.
    • 通过对系统内的两个干涉仪使用延迟/相位互相关方法,干涉系统至少部分消除相位噪声。 互相关方法可用于测量被测器件的组延迟,并且包括确定在时间t的每个干涉仪的输出相位与在时间t的相同输出的相位之间的差异减去 其他干涉仪。 在一个实施例中,第一相位差是时间t的测试干涉仪输出的相位与在时间t偏移下的测试干涉仪输出的相位与参考干涉仪的已知延迟之间的差。 使用相同的技术计算第二相位差,但是时间偏移是表示测试干涉仪内的两个光传播的相对延迟的延迟。 然后可以通过确定第一和第二差异之间的差异来产生指示组延迟的噪声消除时间序列输出。