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    • 6. 发明授权
    • Method of manufacturing a semiconductor device using a trench isolation
technique
    • 使用沟槽隔离技术制造半导体器件的方法
    • US6143626A
    • 2000-11-07
    • US330068
    • 1999-06-11
    • Toshiki YabuTakashi UeharaMizuki SegawaTakashi Nakabayashi
    • Toshiki YabuTakashi UeharaMizuki SegawaTakashi Nakabayashi
    • H01L21/762H01L21/76
    • H01L21/76229
    • On a semiconductor substrate are successively deposited a silicon dioxide film and a silicon nitride film. The silicon nitride film, the silicon dioxide film, and the semiconductor substrate are sequentially etched using a photoresist film with an opening corresponding to an isolation region, thereby forming a trench. After depositing a diffusion preventing film, there is deposited an insulating film for isolation having reflowability. Although a void is formed in the insulating film for isolation in the isolation region, the insulating film for isolation is caused to reflow, thereby eliminating the void. After that, the whole substrate is planarized by CMP so as to remove the silicon nitride film and the silicon dioxide film, followed by the formation of gate insulating films, gate electrodes, sidewalls, and source/drain regions in respective element formation regions. Thus, in a highly integrated semiconductor device having a trench isolation, degradation of reliability resulting from the opening of the void in the surface of isolation is prevented.
    • 在半导体衬底上依次沉积二氧化硅膜和氮化硅膜。 使用具有对应于隔离区域的开口的光致抗蚀剂膜,依次蚀刻氮化硅膜,二氧化硅膜和半导体衬底,从而形成沟槽。 在沉积防扩散膜之后,沉积具有可回流性的用于隔离的绝缘膜。 虽然在隔离区域中用于隔离的绝缘膜中形成空隙,但是使用于隔离的绝缘膜回流,从而消除空隙。 之后,通过CMP对整个基板进行平坦化,以除去氮化硅膜和二氧化硅膜,然后在各个元件形成区域中形成栅极绝缘膜,栅极电极,侧壁和源极/漏极区域。 因此,在具有沟槽隔离的高度集成的半导体器件中,防止了由于隔离表面中的空隙的打开引起的可靠性降低。
    • 10. 发明申请
    • IMAGE FORMING APPARATUS AND CONTROL METHOD THEREOF
    • 图像形成装置及其控制方法
    • US20090060558A1
    • 2009-03-05
    • US12199426
    • 2008-08-27
    • Takashi Uehara
    • Takashi Uehara
    • G03G15/00
    • G03G15/5004
    • An image forming apparatus which is capable of reducing the number of times a second member is separated from a first member upon entry into power-save mode, thereby minimizing failures of a separation unit. A pressure-roller separating mechanism is provided so as to abut and separate a pressure roller and a fixing roller against/from each other. The image forming apparatus is controlled to change to a power-save mode in which power consumption of the image forming apparatus is reduced. The pressure-roller separating mechanism is controlled to separate the pressure roller and the fixing roller from each other in the power-save mode based on a measurement result measured by a timer, and the power-save mode is maintained after the pressure roller and the fixing roller are separated from each other.
    • 一种图像形成装置,其能够减少在进入省电模式时第二构件与第一构件分离的次数,从而使分离单元的故障最小化。 压辊分离机构设置成抵靠和分离加压辊和定影辊。 控制图像形成装置转换成图像形成装置的功耗降低的省电模式。 根据由定时器测量的测量结果,压力辊分离机构被控制为在节电模式下将压力辊和定影辊彼此分开,并且在压力辊和 定影辊彼此分离。