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1. 发明授权

US06615465B2 Method for producing an acceleration sensor 失效
标题翻译：加速度传感器的制造方法
公开(公告)号：US06615465B2
公开(公告)日：2003-09-09
申请号：US09573542
申请日：2000-05-19
申请人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
发明人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H04R1700
CPC分类号： G01P15/0891 , G01L5/0052 , G01P1/127 , G01P15/0802 , G01P15/0922 , G01R31/2834 , G01R31/30 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49789
摘要： A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two opposing main surfaces. The piezoelectric element is formed by directly connecting one of the main surfaces of one of the at least two piezoelectric substrates with an opposing one of the main surfaces of another one of the at least two piezoelectric substrates. Supporters are provided to support the electromechanical transducer and are directly connected to the at least two piezoelectric substrates composing the piezoelectric element. Electrodes that extend continuously from the unconnected main surfaces of the at least two piezoelectric substrates composing the piezoelectric element to surfaces of the supporters are then formed.
摘要翻译：一种用于制造包括具有压电元件的机电换能器的加速度传感器的方法包括提供至少两个压电基片，其中每个具有两个相对的主表面。压电元件通过将至少两个压电基片之一的主表面中的一个直接连接到至少两个压电基片中另一个的相对的一个主表面而形成。提供支撑器以支持机电换能器并且直接连接到构成压电元件的至少两个压电基板。然后形成从构成压电元件的至少两个压电基板的未连接的主表面连续延伸到支撑体的表面的电极。

2. 发明授权

US6098460A Acceleration sensor and shock detecting device using the same 失效
标题翻译：加速度传感器和使用其的冲击检测装置
公开(公告)号：US6098460A
公开(公告)日：2000-08-08
申请号：US727302
申请日：1996-10-08
申请人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
发明人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： G01R31/26 , G01L5/00 , G01P1/12 , G01P15/08 , G01P15/09 , G01R31/28 , G01R31/30 , G01R31/317 , H01L21/66
CPC分类号： G01P15/0891 , G01L5/0052 , G01P1/127 , G01P15/0802 , G01P15/0922 , G01R31/2834 , G01R31/30 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49789
摘要： A small accelaration sensor which is highly sensitive over a large frequency region and which varies little in characteristics such as sensitivity. A piezoelectric element is formed by connecting two main faces of retangular LiNbO.sub.3 piezoelectric substrates, in which the polarization axes are directed oppositely. Supporters comprising LiNbO.sub.3 directly connected to one end of the piezoelectric element. Eletrodes of chromium-gold being 0.2 .mu.m are thick are successively connected to the two main faces of the piozoelectric element and to the supporters, thus to produce a cantilever structure bimorph electromechanical transducer.
摘要翻译：一种小型加速传感器，在大频率区域内具有高灵敏度，灵敏度等特性变化不大。压电元件通过连接偏振轴相对地指向的矩形LiNbO 3压电基板的两个主面而形成。包含直接与压电元件的一端连接的LiNbO 3的支撑体。铬 - 金的0.2微米厚的铁素体连续地连接到波氮元素的两个主面和支撑体上，从而产生悬臂结构双压电晶片机电换能器。

3. 发明授权

US5994821A Displacement control actuator 失效
标题翻译：位移控制执行器
公开(公告)号：US5994821A
公开(公告)日：1999-11-30
申请号：US978422
申请日：1997-11-25
申请人： Katsumi Imada , Tetsuro Otsuchi , Masato Sugimoto , Yoshihiro Tomita , Osamu Kawasaki
发明人： Katsumi Imada , Tetsuro Otsuchi , Masato Sugimoto , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H01L41/09 , H01L41/04
CPC分类号： H01L41/094
摘要： Rectangular piezoelectric substrates each of which has main surfaces opposed to each other, measures 50 .mu.m thick by 1 mm wide by 8 mm long, and is made of lithium niobate (LiNbO.sub.3), are directly bonded on the main surfaces so that their axes of polarization are set in directions reverse to each other, thereby composing a piezoelectric element. Electrodes which are 0.2 .mu.m thick and made of chromium-nickel are formed on the two main surfaces of the piezoelectric element opposed to each other, thereby resulting in a precision displacement control actuator of a bimorph type mechanical-electrical converter element. This configuration makes it possible to provide a compact precision displacement control actuator which has a large displacement and extremely small variations of characteristics such as displacement and resonance frequency.
摘要翻译：矩形压电基板各自具有彼此相对的主表面，其厚度为50μm厚×1mm×8mm长，由铌酸锂（LiNbO 3）构成，直接接合在主表面上，使得它们的轴线极化被设置在彼此相反的方向上，从而构成压电元件。在压电元件的两个主表面上形成厚度为0.2μm，由铬镍制成的电极，从而形成双压电晶片式机电转换元件的精密位移控制致动器。这种构造使得可以提供一种紧凑的精确位移控制致动器，其具有大的位移和极小的位移和共振频率等特性的变化。

4. 发明授权

US06270202B1 Liquid jetting apparatus having a piezoelectric drive element directly bonded to a casing 失效
标题翻译：液体喷射装置具有直接结合到壳体的压电驱动元件
公开(公告)号：US06270202B1
公开(公告)日：2001-08-07
申请号：US09064848
申请日：1998-04-23
申请人： Akihiko Namba , Yoshihiro Tomita , Tetsuyoshi Ogura , Osamu Kawasaki , Masato Sugimoto , Katsumi Imada , Atsushi Komatsu , Kazuo Eda
发明人： Akihiko Namba , Yoshihiro Tomita , Tetsuyoshi Ogura , Osamu Kawasaki , Masato Sugimoto , Katsumi Imada , Atsushi Komatsu , Kazuo Eda
IPC分类号： B41J2045
CPC分类号： B41J2/1623 , B41J2/14282 , B41J2/1614 , B41J2/1626 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1646 , B41J2202/03
摘要： A liquid jetting apparatus has a concave casing having an opened flat face, and a piezoelectric drive element for at least partly sealing the opened flat face to form a liquid reservoir to store a liquid, such as ink. The reservoir has a liquid injection port for injecting a liquid and a liquid jet port for jetting the stored liquid. The piezoelectric drive element is directly bonded to the open flat face.
摘要翻译：液体喷射装置具有开口的平坦面的凹形外壳和用于至少部分地密封打开的平坦表面以形成液体储存器以储存诸如墨水的液体的压电驱动元件。储存器具有用于喷射液体的液体注入口和用于喷射储存液体的液体喷射口。压电驱动元件直接接合到开口平面上。

5. 发明授权

US06243933B1 Piezoelectric resonator and method for fabricating the same 有权
标题翻译：压电谐振器及其制造方法
公开(公告)号：US06243933B1
公开(公告)日：2001-06-12
申请号：US09303682
申请日：1999-05-03
申请人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
发明人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H04R1700
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02031 , H03H9/0207 , H03H9/176 , Y10T29/42 , Y10T29/49004
摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要翻译：对于两个压电单晶板制备具有反向畴的晶片，并且通过直接接合而没有任何粘合剂制备大约相同的厚度。在晶片的两个主平面上形成驱动电极，具有反向的畴，以提供压电谐振器。具有反极化结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，并且抑制具有反向偏振的畴的厚度的散射。在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。因此，以简单的方式抑制杂散模式。

6. 发明授权

US5929555A Piezoelectric resonator and method for fabricating the same 失效
标题翻译：压电谐振器及其制造方法
公开(公告)号：US5929555A
公开(公告)日：1999-07-27
申请号：US834207
申请日：1997-04-15
申请人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
发明人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H03H3/04 , H03H9/02 , H03H9/17 , H03H9/56 , H01L41/08
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02031 , H03H9/0207 , H03H9/176 , Y10T29/42 , Y10T29/49004
摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates 11 and 12 having about the same thickness as each other by using direct bonding without any adhesive. Then, driving electrodes 13 are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reverses polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要翻译：通过使用没有任何粘合剂的直接粘合，为具有彼此具有大致相同厚度的两个压电单晶板11和12制备具有反向畴的晶片。然后，驱动电极13形成在具有反向域的晶片的两个主平面上，以提供压电谐振器。具有反转偏振结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，抑制具有反向偏振的畴的厚度的散射。在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。因此，以简单的方式抑制杂散模式。

7. 发明授权

US5910699A Method of manufacturing a composite substrate and a piezoelectric device using the substrate 失效
标题翻译：使用该基板的复合基板和压电元件的制造方法
公开(公告)号：US5910699A
公开(公告)日：1999-06-08
申请号：US876287
申请日：1997-06-16
申请人： Akihiko Namba , Tetsuyoshi Ogura , Yoshihiro Tomita , Kazuo Eda
发明人： Akihiko Namba , Tetsuyoshi Ogura , Yoshihiro Tomita , Kazuo Eda
IPC分类号： H01L41/312 , H01L41/39 , H03H3/02 , H03H9/05 , H03H9/19 , H01L41/08
CPC分类号： H03H9/0519 , H01L41/312 , H03H3/04 , H03H9/19 , Y10S148/012 , Y10T156/1052 , Y10T156/1082
摘要： A method of manufacturing a composite substrate and the composite substrate manufactured thereby wherein surfaces of first and second substrates having different thermal expansion coefficients are mirror finished and layered on each other. A first heat treatment is applied after which a part of the second substrate is removed to a depth sufficient to expose the first substrate. A final second heat treatment directly bonds the substrates.
摘要翻译：一种制造复合基板的方法和由此制造的复合基板，其中具有不同热膨胀系数的第一和第二基板的表面被镜面化并且彼此层叠。施加第一热处理之后，将第二基板的一部分去除足以露出第一基板的深度。最终的第二次热处理直接粘合基材。

8. 发明授权

US5969463A Energy trapping piezoelectric device and producing method thereof 失效
标题翻译：能量捕获压电器件及其制造方法
公开(公告)号：US5969463A
公开(公告)日：1999-10-19
申请号：US891132
申请日：1997-07-10
申请人： Yoshihiro Tomita , Tetsuyoshi Ogura , Atsushi Komatsu , Shinji Itamochi
发明人： Yoshihiro Tomita , Tetsuyoshi Ogura , Atsushi Komatsu , Shinji Itamochi
IPC分类号： H03H3/02 , H03H9/02 , H03H9/10 , H03H9/56 , H01L41/08
CPC分类号： H03H9/562 , H03H3/02 , H03H9/02118 , H03H9/177 , H03H2003/0428
摘要： An energy trapping piezoelectric device trapping a thickness vibration into projections which suppress a reflection of a vibration from end portions of electrodes provided substantially on a piezoelectric plate, and which suppress unnecessary spurious vibrations, low impedance and higher frequency, and a method of easily producing such a piezoelectric device are provided. The piezoelectric device has an energy trapping projection provided over a piezoelectric plate, and a top electrode is divided into a exciting electrode and dummy electrode. A small gap is provided between the divided electrodes, and the electrodes are electrically insulated from each other. The thickness vibration is not generally reflected, and vibrating energies due to the thickness vibrations are substantially trapped into the projections provided on the piezoelectric plate.
摘要翻译：将厚度振动捕获到突起中的能量捕获压电器件，其抑制基本上在压电板上提供的电极的端部的振动的反射，并且抑制不必要的寄生振动，低阻抗和更高的频率，以及容易地产生这样的方法提供压电装置。压电装置具有设置在压电板上的能量捕获突起，顶电极被分成激励电极和虚拟电极。在分割电极之间设置小间隙，电极彼此电绝缘。厚度振动通常不被反射，并且由于厚度振动引起的振动能量基本上被捕获到设置在压电板上的突起中。

9. 发明授权

US5759753A Piezoelectric device and method of manufacturing the same 失效
公开(公告)号：US5759753A
公开(公告)日：1998-06-02
申请号：US677548
申请日：1996-07-18
申请人： Akihiko Namba , Tetsuyoshi Ogura , Yoshihiro Tomita , Kazuo Eda
发明人： Akihiko Namba , Tetsuyoshi Ogura , Yoshihiro Tomita , Kazuo Eda
IPC分类号： H01L41/22 , H01L41/312 , H01L41/338 , H03H3/02 , H01L21/20 , H01L21/302 , H01L21/463 , H01L21/76
CPC分类号： H03H3/02 , H01L41/312 , H01L41/338
摘要： A piezoelectric device is manufactured by: (1) mirror finishing surfaces of a first substrate and a second substrate made of a piezoelectric element; (2) forming grooves on at least one of the two surfaces of the first and second substrates; (3) joining the mirror-finished surfaces of the first substrate and the second substrate; (4) applying heat to the joined substrates and bonding them; (5) forming an opening on the first substrate so that a part of the exposed areas of the second substrate is exposed through the opening; (6) forming piezoelectric devices by forming electrodes on at least one of the second substrate through the opening and a corresponding area to the exposed area on the rear side of the second substrate; and (7) dividing the bonded substrates into portions each having one of the piezoelectric devices. Through this manufacturing method, piezoelectric devices with high yield ratios and high reliability can be obtained.

10. 发明授权

US5982010A Piezoelectric device and method of manufacturing the same 失效
标题翻译：压电元件及其制造方法
公开(公告)号：US5982010A
公开(公告)日：1999-11-09
申请号：US976452
申请日：1997-11-25
申请人： Akihiko Namba , Tetsuyoshi Ogura , Yoshihiro Tomita , Kazuo Eda
发明人： Akihiko Namba , Tetsuyoshi Ogura , Yoshihiro Tomita , Kazuo Eda
IPC分类号： H01L41/22 , H01L41/312 , H01L41/338 , H03H3/02 , H01L29/84
CPC分类号： H03H3/02 , H01L41/312 , H01L41/338
摘要： A piezoelectric device is manufactured by: (1) mirror finishing surfaces of a first substrate and a second substrate made of a piezoelectric element; (2) forming grooves on at least one of the two surfaces of the first and second substrates; (3) joining the mirror-finished surfaces of the first substrate and the second substrate; (4) applying heat to the joined substrates and bonding them; (5) forming an opening on the first substrate so that a part of the exposed areas of the second substrate is exposed through the opening; (6) forming piezoelectric devices by forming electrodes on at least one of the second substrate through the opening and a corresponding area to the exposed area on the rear side of the second substrate; and (7) dividing the bonded substrates into portions each having one of the piezoelectric devices. Through this manufacturing method, piezoelectric devices with high yield ratios and high reliability can be obtained.
摘要翻译：压电器件通过以下制造：（1）第一衬底和由压电元件制成的第二衬底的镜面精加工表面; （2）在第一和第二基板的两个表面中的至少一个上形成凹槽; （3）连接第一基板和第二基板的镜面抛光面; （4）向接合的基片施加热量并将其粘合; （5）在所述第一基板上形成开口，使得所述第二基板的所述暴露区域的一部分通过所述开口露出; （6）通过在所述第二基板中的至少一个上通过所述开口形成电极并形成与所述第二基板的后侧上的暴露区域相对应的区域来形成压电装置; 和（7）将接合的衬底分成各自具有一个压电器件的部分。通过该制造方法，可以获得高屈服比和高可靠性的压电装置。

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