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    • 1. 发明授权
    • Heating apparatus, heating method, and computer readable storage medium
    • 加热装置,加热方法和计算机可读存储介质
    • US07992318B2
    • 2011-08-09
    • US12007975
    • 2008-01-17
    • Tatsuya KawajiYuichi SakaiMasatoshi Kaneda
    • Tatsuya KawajiYuichi SakaiMasatoshi Kaneda
    • F26B11/02
    • H01L21/67109H01L21/6838H01L21/6875
    • A disclosed heating apparatus for heating a substrate on which a film is coated includes a process chamber having a gas supply opening for supplying a first gas to the process chamber and a gas evacuation opening for evacuating the first gas from the process chamber; a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate; plural protrusions arranged on the heating plate so as to support the substrate; plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate; and a gas inlet adapted to supply a second gas to a gap between the heating plate and the substrate supported by the plural protrusions.
    • 公开的用于加热其上涂覆有薄膜的基板的加热装置包括具有用于向处理室供应第一气体的气体供给开口的处理室和用于从处理室排出第一气体的排气开口; 加热板,其设置在所述处理室中并且包括用于加热所述基板的加热元件; 多个突起,布置在所述加热板上以支撑所述基板; 多个吸入孔,形成在加热板中,以便通过吸引衬底吸引加热板; 以及气体入口,其适于将第二气体供应到由所述多个突起支撑的所述加热板和所述基板之间的间隙。
    • 3. 发明授权
    • Heating apparatus, heating method, and computer readable storage medium
    • 加热装置,加热方法和计算机可读存储介质
    • US08186077B2
    • 2012-05-29
    • US13153660
    • 2011-06-06
    • Tatsuya KawajiYuichi SakaiMasatoshi Kaneda
    • Tatsuya KawajiYuichi SakaiMasatoshi Kaneda
    • F26B11/05
    • H01L21/67109H01L21/6838H01L21/6875
    • A disclosed heating apparatus for heating a substrate on which a film is coated includes a process chamber having a gas supply opening for supplying a first gas to the process chamber and a gas evacuation opening for evacuating the first gas from the process chamber; a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate; plural protrusions arranged on the heating plate so as to support the substrate; plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate; and a gas inlet adapted to supply a second gas to a gap between the heating plate and the substrate supported by the plural protrusions.
    • 公开的用于加热其上涂覆有薄膜的基板的加热装置包括具有用于向处理室供应第一气体的气体供给开口的处理室和用于从处理室排出第一气体的排气开口; 加热板,其设置在所述处理室中并且包括用于加热所述基板的加热元件; 多个突起,布置在所述加热板上以支撑所述基板; 多个吸入孔,形成在加热板中,以便通过吸引衬底吸引加热板; 以及气体入口,其适于将第二气体供应到由所述多个突起支撑的所述加热板和所述基板之间的间隙。
    • 6. 发明授权
    • Signal processing apparatus, signal processing method, and recording medium
    • 信号处理装置,信号处理方法和记录介质
    • US07954113B2
    • 2011-05-31
    • US11336284
    • 2006-01-20
    • Kosei YamashitaYasushi MiyajimaMotoyuki TakaiYoichiro SakoToshiro TerauchiToru SasakiYuichi Sakai
    • Kosei YamashitaYasushi MiyajimaMotoyuki TakaiYoichiro SakoToshiro TerauchiToru SasakiYuichi Sakai
    • G06F3/00G06F9/44G06F9/46G06F13/00
    • G06F8/20
    • A signal processing apparatus includes the following elements. A plurality of signal processing software modules perform unit signal-processing steps of signal processing by means of software processing. An instruction input receiving unit receives an instruction. A virtual connecting unit sets up a virtual connection between inputs and outputs of the signal processing software modules in response to the received instruction. A circuit structure information storing and managing unit stores and manages the virtually connected signal processing software modules. A path routing unit routes a signal processing path to determine the order in which the stored signal processing software modules perform the signal processing. A signal processing executing unit performs the signal processing by sequentially executing the signal processing software modules in the determined order. The path routing unit determines whether a feedback loop including no delay element is generated in a circuit composed of the signal processing software modules.
    • 信号处理装置包括以下元件。 多个信号处理软件模块通过软件处理执行信号处理的单元信号处理步骤。 指令输入接收单元接收指令。 虚拟连接单元响应于接收到的指令在信号处理软件模块的输入和输出之间建立虚拟连接。 电路结构信息存储和管理单元存储和管理虚拟连接的信号处理软件模块。 路径路由单元路由信号处理路径以确定存储的信号处理软件模块执行信号处理的顺序。 信号处理执行单元通过以确定的顺序依次执行信号处理软件模块来执行信号处理。 路径路由单元确定在由信号处理软件模块组成的电路中是否产生不包括延迟元件的反馈回路。