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1. 发明申请

US20070260437A1 Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation tool 有权
标题翻译：用于获得光刻模拟工具的短程火炬模型参数的方法，程序产品和设备
公开(公告)号：US20070260437A1
公开(公告)日：2007-11-08
申请号：US11415423
申请日：2006-05-02
申请人： Tamer Coskun , Sangbong Park , Jang Chen , Bernd Geh
发明人： Tamer Coskun , Sangbong Park , Jang Chen , Bernd Geh
IPC分类号： G06G7/48
CPC分类号： G03F7/70941 , G03F7/705
摘要： A process of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, is disclosed. Short-range flare is measured from the image to obtain measured short-range flare data. A simulation is performed based on short-range flare model parameters to obtain simulated short-range flare data. The simulated short-range flare data is compared with the measured short range flare data. It is determined whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result. The short-range flare model parameters is optimized according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
摘要翻译：公开了一种获得表示短距离火炬的短距离火炬模型参数的过程，其降低了由光刻工具产生的图像的对比度。从图像中测量短程光晕，以获得测量的短距离闪光数据。基于短距离火炬模型参数进行模拟，以获得模拟的短距离火炬数据。将模拟的短程火炬数据与测量的短距离火炬数据进行比较。根据比较结果确定模拟中使用的短程火炬模型参数是否合适。如果用于模拟的短距离火炬模型参数不合适，则根据测得的短距离数据和模拟的短距离火炬数据优化短距离火炬模型参数。

2. 发明授权

US07818151B2 Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation tool 有权
标题翻译：用于获得光刻模拟工具的短程火炬模型参数的方法，程序产品和设备
公开(公告)号：US07818151B2
公开(公告)日：2010-10-19
申请号：US11415423
申请日：2006-05-02
申请人： Tamer Coskun , Sangbong Park , Jang Fung Chen , Bernd Geh
发明人： Tamer Coskun , Sangbong Park , Jang Fung Chen , Bernd Geh
IPC分类号： G06F17/50
CPC分类号： G03F7/70941 , G03F7/705
摘要： A process of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, is disclosed. Short-range flare is measured from the image to obtain measured short-range flare data. A simulation is performed based on short-range flare model parameters to obtain simulated short-range flare data. The simulated short-range flare data is compared with the measured short range flare data. It is determined whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result. The short-range flare model parameters is optimized according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
摘要翻译：公开了一种获得表示短距离火炬的短距离火炬模型参数的过程，其降低了由光刻工具产生的图像的对比度。从图像中测量短程光晕，以获得测量的短距离闪光数据。基于短距离火炬模型参数进行模拟，以获得模拟的短距离火炬数据。将模拟的短程火炬数据与测量的短距离火炬数据进行比较。根据比较结果确定模拟中使用的短程火炬模型参数是否合适。如果用于模拟的短距离火炬模型参数不合适，则根据测得的短距离数据和模拟的短距离火炬数据优化短距离火炬模型参数。

3. 发明申请

US20060208205A1 Method, program product and apparatus for improving calibration of resist models used in critical dimension calculation 有权
公开(公告)号：US20060208205A1
公开(公告)日：2006-09-21
申请号：US11339827
申请日：2006-01-26
申请人： Jang Chen , Gabriel Berger , Tamer Coskun , Sangbong Park , Ting Chen
发明人： Jang Chen , Gabriel Berger , Tamer Coskun , Sangbong Park , Ting Chen
IPC分类号： H01J37/08 , G21K5/10 , G03B27/52 , H01L27/00 , G01N21/00
CPC分类号： G03F7/70625 , G03F1/36 , G03F1/68 , G03F7/705 , G03F7/70516
摘要： Improved calibration of a resist model used in critical dimension (CD) calculation is disclosed. A dose function is obtained based on optical tool to be used form the resist on a wafer. The dose function indicates the amount of energy in a resist. The dose function is convolved with a convolution kernel to obtain a modified dose function. The convolution kernel has variable diffusion lengths in different directions. The convolution kernel may include multiple Gaussian kernels each having variable diffusion lengths in different directions. The modified dose function is converted into a CD value which is compared with a target value. If necessary, the diffusion lengths of the Gaussian kernels are adjusted based on the comparison result.

4. 发明授权

US07494753B2 Method, program product and apparatus for improving calibration of resist models used in critical dimension calculation 有权
标题翻译：用于改进临界尺寸计算中使用的抗蚀剂模型校准的方法，程序产品和装置
公开(公告)号：US07494753B2
公开(公告)日：2009-02-24
申请号：US11339827
申请日：2006-01-26
申请人： Jang Fung Chen , Gabriel Berger , Tamer Coskun , Sangbong Park , Ting Chen
发明人： Jang Fung Chen , Gabriel Berger , Tamer Coskun , Sangbong Park , Ting Chen
IPC分类号： G03F9/00 , G03C5/00
CPC分类号： G03F7/70625 , G03F1/36 , G03F1/68 , G03F7/705 , G03F7/70516
摘要： Improved calibration of a resist model used in critical dimension (CD) calculation is disclosed. A dose function is obtained based on optical tool to be used form the resist on a wafer. The dose function indicates the amount of energy in a resist. The dose function is convolved with a convolution kernel to obtain a modified dose function. The convolution kernel has variable diffusion lengths in different directions. The convolution kernel may include multiple Gaussian kernels each having variable diffusion lengths in different directions. The modified dose function is converted into a CD value which is compared with a target value. If necessary, the diffusion lengths of the Gaussian kernels are adjusted based on the comparison result.
摘要翻译：公开了在关键尺寸（CD）计算中使用的抗蚀剂模型的改进的校准。基于晶片上的抗蚀剂使用的光学工具获得剂量函数。剂量函数表示抗蚀剂中的能量。剂量函数与卷积核卷积以获得修改的剂量函数。卷积核在不同方向具有可变扩散长度。卷积核可以包括在不同方向上具有可变扩散长度的多个高斯核。将修改的剂量函数转换为与目标值进行比较的CD值。如果需要，基于比较结果调整高斯核的扩散长度。

5. 发明授权

US08120753B2 Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process 有权
标题翻译：用于产生校准瞳孔核的方法，程序产品和装置及其在光刻仿真过程中的使用方法
公开(公告)号：US08120753B2
公开(公告)日：2012-02-21
申请号：US11979839
申请日：2007-11-08
申请人： Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
发明人： Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
IPC分类号： G03B27/32 , G03B27/54
CPC分类号： G03F7/70216 , G03F7/705 , G03F7/70675
摘要： A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance.
摘要翻译：一种生成用于模拟具有瞳孔的光学成像系统的成像性能的模型的方法。该方法包括以下步骤：定义光学成像系统和由光学成像系统利用的过程; 并且定义表示光学成像系统和过程的成像性能的模型方程，其中模型方程式包括校准的瞳孔核心。校准瞳孔代表瞳孔表现的线性模型。

6. 发明申请

US20080204690A1 Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process 有权
标题翻译：用于产生校准瞳孔核的方法，程序产品和装置及其在光刻仿真过程中的使用方法
公开(公告)号：US20080204690A1
公开(公告)日：2008-08-28
申请号：US11979839
申请日：2007-11-08
申请人： Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
发明人： Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
IPC分类号： G03B27/54
CPC分类号： G03F7/70216 , G03F7/705 , G03F7/70675
摘要： A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance.
摘要翻译：一种生成用于模拟具有瞳孔的光学成像系统的成像性能的模型的方法。该方法包括以下步骤：定义光学成像系统和由光学成像系统利用的过程; 并且定义表示光学成像系统和过程的成像性能的模型方程，其中模型方程式包括校准的瞳孔核心。校准瞳孔代表瞳孔表现的线性模型。

7. 发明授权

US08557769B2 Co-administration of FGF-21 and GLP-1 to treat diabetes and lower blood glucose 失效
标题翻译：共同施用FGF-21和GLP-1以治疗糖尿病和降低血糖
公开(公告)号：US08557769B2
公开(公告)日：2013-10-15
申请号：US13534322
申请日：2012-06-27
申请人： Tamer Coskun , Wolfgang Glaesner
发明人： Tamer Coskun , Wolfgang Glaesner
IPC分类号： A61K38/18 , A61K38/26
CPC分类号： A61K38/26 , A61K38/1825 , A61K2300/00
摘要： The present invention provides methods of lowering body weight by administering an FGF-21 compound in combination with a GLP-1 compound. In addition, the present invention also provides methods to treat obesity by administering an FGF-21 compound in combination with a GLP-1 compound. The present invention also discloses combinations useful in the methods of the present invention.
摘要翻译：本发明提供了通过与GLP-1化合物组合施用FGF-21化合物来降低体重的方法。此外，本发明还提供了通过与GLP-1化合物组合施用FGF-21化合物来治疗肥胖症的方法。本发明还公开了可用于本发明方法的组合。

8. 发明申请

US20120264683A1 USE OF AN FGF-21 COMPOUND AND A GLP-1 COMPOUND FOR THE TREATMENT OF OBESITY 失效
标题翻译：使用FGF-21化合物和GLP-1化合物治疗肥胖
公开(公告)号：US20120264683A1
公开(公告)日：2012-10-18
申请号：US13534322
申请日：2012-06-27
申请人： Tamer Coskun , Wolfgang Glaesner
发明人： Tamer Coskun , Wolfgang Glaesner
IPC分类号： A61K38/18 , A61P3/10
CPC分类号： A61K38/26 , A61K38/1825 , A61K2300/00
摘要： The present invention provides methods of lowering body weight by administering an FGF-21 compound in combination with a GLP-1 compound. In addition, the present invention also provides methods to treat obesity by administering an FGF-21 compound in combination with a GLP-1 compound. The present invention also discloses combinations useful in the methods of the present invention.
摘要翻译：本发明提供了通过与GLP-1化合物组合施用FGF-21化合物来降低体重的方法。此外，本发明还提供了通过与GLP-1化合物组合施用FGF-21化合物来治疗肥胖症的方法。本发明还公开了可用于本发明方法的组合。

9. 发明申请

US20110034373A1 USE OF AN FGF-21 COMPOUND AND A GLP-1 COMPOUND FOR THE TREATMENT OF OBESITY 审中-公开
标题翻译：使用FGF-21化合物和GLP-1化合物治疗肥胖
公开(公告)号：US20110034373A1
公开(公告)日：2011-02-10
申请号：US12668475
申请日：2008-07-30
申请人： Tamer Coskun , Wolfgang Glaesner
发明人： Tamer Coskun , Wolfgang Glaesner
IPC分类号： A61K38/16 , A61P3/04
CPC分类号： A61K38/26 , A61K38/1825 , A61K2300/00
摘要： The present invention provides methods of lowering body weight by administering an FGF-21 compound in combination with a GLP-1 compound. In addition, the present invention also provides methods to treat obesity by administering an FGF-21 compound in combination with a GLP-1 compound. The present invention also discloses combinations useful in the methods of the present invention.
摘要翻译：本发明提供了通过与GLP-1化合物组合施用FGF-21化合物来降低体重的方法。此外，本发明还提供了通过与GLP-1化合物组合施用FGF-21化合物来治疗肥胖症的方法。本发明还公开了可用于本发明方法的组合。

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