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    • 1. 发明申请
    • INFORMATION PROCESSING TERMINAL AND FALSIFICATION VERIFICATION METHOD
    • 信息处理终端和伪造验证方法
    • US20100191949A1
    • 2010-07-29
    • US12666615
    • 2007-07-26
    • Takeshi ShishidoJun Anzai
    • Takeshi ShishidoJun Anzai
    • G06F9/24
    • G06F21/575
    • An information processing terminal that performs falsification verification at the time of bootstrapping thereof includes: a state sensor that senses a connection of an external connector or a data reception via the external connector, to judge whether or not a program stored in the information processing terminal is in a rewritable state; a flag storage that stores a flag referred to at the time of bootstrapping of the information processing terminal therein; a flag controller that turns on the flag according to a judged result that the program is in the rewritable state by the state sensor to record the turn-on flag in the flag storage; and a falsification verifier that judges whether or not it is necessary to carry out falsification verification according to a status of the flag, and performs falsification verification of the program only in the case in which the flag in the flag storage is turned on, at the time of bootstrapping of the information processing terminal.
    • 一种信号处理终端,在进行伪造时进行伪造验证,包括:状态传感器,其通过外部连接器感测外部连接器或数据接收的连接,判断存储在信息处理终端中的程序是否为 在可重写的状态; 标志存储器,其存储在其中信息处理终端自举时引用的标志; 标志控制器,其根据由所述状态传感器执行程序处于所述可重写状态的判断结果来接通所述标志,以将所述开启标志记录在所述标志存储器中; 以及伪造验证器,其判断是否需要根据标志的状态进行伪造验证,并且仅在标志存储器中的标志被打开的情况下执行程序的伪造验证,在 信息处理终端自举的时间。
    • 2. 发明授权
    • Apparatus and method for forming deposited film
    • 用于形成沉积膜的装置和方法
    • US06846521B2
    • 2005-01-25
    • US10650763
    • 2003-08-29
    • Takeshi ShishidoMasahiro KanaiYuzo KodaTakahiro Yajima
    • Takeshi ShishidoMasahiro KanaiYuzo KodaTakahiro Yajima
    • C23C16/503C23C16/509C23C16/54H01J37/32H01L21/205H01L31/04C23C16/00
    • H01J37/32009C23C16/5096C23C16/545H01J37/32532
    • A two-layer structured electric power application electrode including a non-split electrode consisting of a single planar plate and six split electrodes arranged on the non-split electrode so as to be electrically in contact with the non-split electrode is arranged on the upper side of a discharge chamber provided within a vacuum container such that the power application electrode faces a strip substrate in parallel. The split electrodes are arranged in such a manner as to form a planar plane, and the distance between the surfaces of the split electrodes facing the strip substrate and the strip substrate is uniform. The total area of the surfaces of the split electrodes facing the strip substrate is the same as the area of the non-split electrode on which the split electrodes are mounted. This improves the uniformity in plasma generated in the apparatus for forming a deposited film and enables cutting-down of the costs required to form deposited films.
    • 包括由单个平面板组成的非分裂电极和布置在非分离电极上以与非分离电极电接触的六个分离电极的双层结构电力施加电极设置在上部 设置在真空容器内的排出室的侧面,使得电力施加电极平行面对带状基板。 分割电极以形成平面的方式布置,并且分离电极的面对带状基板和带状基板的表面之间的距离是均匀的。 分离电极面对带状基板的表面的总面积与其上安装有分离电极的非分割电极的面积相同。 这提高了用于形成沉积膜的装置中产生的等离子体的均匀性,并且能够降低形成沉积膜所需的成本。
    • 5. 发明授权
    • Apparatus and method for forming a deposited film by a means of plasma CVD
    • 通过等离子体CVD形成沉积膜的装置和方法
    • US06470823B2
    • 2002-10-29
    • US09771650
    • 2001-01-30
    • Takahiro YajimaMasahiro KanaiYuzo KodaTakeshi Shishido
    • Takahiro YajimaMasahiro KanaiYuzo KodaTakeshi Shishido
    • C23C1600
    • H01J37/32009C23C16/4401C23C16/4412C23C16/455C23C16/509H01J37/32532
    • A film-forming apparatus comprising a vacuum chamber, a power application electrode, a raw material gas introduction portion through which a raw material gas is introduced into the vacuum chamber, and an exhaustion portion through which the vacuum chamber is exhausted, the power application electrode being arranged so as to oppose a substrate for film formation positioned in the vacuum chamber, characterized in that at least said raw material gas introduction portion or the exhaustion portion is provided with an opening adjusting member having a desired thickness for intercepting the plasma, and the power application electrode and the opening adjusting member are arranged to satisfy an equation a or c≧b, with a being a shortest distance between the power application electrode and the opening adjusting member provided at the raw material gas introduction portion, c being a shortest distance between the power application electrode and the opening adjusting member provided at the exhaustion portion, and b being an average distance between the substrate and a horizontal plane face of the power application electrode which is opposed to a face of the substrate.
    • 一种成膜设备,包括真空室,电力施加电极,原料气体引入到真空室中的原料气体引入部分和真空室排出的排气部分,电力施加电极 被布置成与位于真空室中的成膜用基板相对,其特征在于,至少所述原料气体导入部或者所述排气部设置有用于截取等离子体的期望厚度的开口调节部件, 电力施加电极和开口调整构件被布置成满足等式a或c> = b,其中电源施加电极和设置在原料气体导入部分的开口调节构件之间的距离最短,c是最短的 电力施加电极和设置在排气口处的开口调节构件之间的距离 离子部分,b是与基板的表面相对的电力施加电极的基板与水平面面之间的平均距离。