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    • 1. 发明授权
    • Tonneau cover apparatus
    • Tonneau盖装置
    • US08702150B2
    • 2014-04-22
    • US13350955
    • 2012-01-16
    • Kazunori SaitoTakahiro Yajima
    • Kazunori SaitoTakahiro Yajima
    • B60P7/02
    • B60R5/047
    • There is provided a tonneau cover apparatus including: a winding shaft that winds up a tonneau cover; an elongated shaped case that accommodates the winding shaft; support members provided at one end portion and another end portion of the case, and supporting the winding shaft; a retention member provided at the one end portion and/or the other end portion of the case and including an outer wall portion that covers the support member; and blocking portions provided at the support member and the retention member at the at least one end portion, the blocking portions being disposed at the inner side relative to the outer wall portion, and blocking movement of the retention member outward in the axial direction of the winding shaft from the engaging position by abutting against one another at the engaging position.
    • 提供了一种吨位覆盖装置,其包括:缠绕一吨吨盖的卷绕轴; 容纳卷绕轴的细长形状的壳体; 支撑构件设置在壳体的一个端部和另一个端部处,并且支撑卷绕轴; 保持构件,设置在所述壳体的一个端部和/或另一个端部,并且包括覆盖所述支撑构件的外壁部; 以及在所述至少一个端部处设置在所述支撑构件和所述保持构件处的阻挡部分,所述阻挡部分相对于所述外壁部分设置在所述内侧,并且所述保持构件在所述保持构件的轴向方向上向外阻挡 通过在接合位置处彼此抵靠而从接合位置卷绕轴。
    • 3. 发明授权
    • Deposition apparatus for manufacturing thin film
    • 用于制造薄膜的沉积装置
    • US06530341B1
    • 2003-03-11
    • US09257027
    • 1999-02-25
    • Yuzo KohdaShotaro OkabeMasahiro KanaiAkira SakaiTadashi HoriTomonori NishimotoTakahiro Yajima
    • Yuzo KohdaShotaro OkabeMasahiro KanaiAkira SakaiTadashi HoriTomonori NishimotoTakahiro Yajima
    • H05H100
    • H01J37/32009H01J37/32082H01J37/32541H01J37/3277H01L31/202H01L31/204H01L31/206Y02E10/50Y02P70/521
    • A deposition apparatus of the present invention is arranged so that a surface area of a radio-frequency power applying cathode electrode disposed in a glow discharge space, in a space in contact with discharge is greater than a surface area of the whole of a ground electrode (anode electrode) including a beltlike member in the discharge space. This structure can maintain the potential (self-bias) of the cathode electrode disposed in the glow discharge space automatically at a positive potential with respect to the ground (anode) electrode including the beltlike member. As a result, the bias is applied in the direction of irradiation of ions with positive charge to a deposit film on the beltlike member, so that the ions existing in the plasma discharge are accelerated more efficiently toward the beltlike member, thereby effectively giving energy to the surface of deposit film by ion bombardment. Accordingly, since the structural relaxation of film is promoted even at relatively high deposition rates, a microcrystal semiconductor film can be formed at the relatively high deposition rates with good efficiency, with high uniformity, and with good reproducibility.
    • 本发明的沉积装置被布置成使得设置在辉光放电空间中的与放电接触的空间中的射频施加电极的表面积大于接地电极整体的表面积 (阳极电极),其在放电空间中包括带状构件。该结构可以将设置在辉光放电空间中的阴极的电位(自偏压)自动保持在相对于包括 结果,将带正电荷的离子的照射方向施加到带状构件上的沉积膜上,使得存在于等离子体放电中的离子更有效地朝向带状构件加速,从而有效地 通过离子轰击给沉积膜表面赋予能量。 因此,即使在相对高的沉积速率下也能促进膜的结构弛豫,可以以较高的沉积速率以高的均匀性和高的再现性形成微晶半导体膜。
    • 7. 发明申请
    • COVER COUPLING STRUCTURE
    • 覆盖联轴器结构
    • US20120187714A1
    • 2012-07-26
    • US13357006
    • 2012-01-24
    • Kazunori SaitoTakahiro Yajima
    • Kazunori SaitoTakahiro Yajima
    • B60P7/02
    • B60R5/047
    • There is provided a cover coupling structure including: a coupling groove that is provided to an elongated shaped tonneau cover apparatus including a tonneau cover, the coupling groove including a coupling portion coupled to one end of a sheet-form cover, and an opening portion that is open to the outer peripheral side of the tonneau cover apparatus and is in communication with the coupling portion; an anchor portion provided to the one end of the cover and coupling the one end of the cover to the coupling portion by anchoring to the coupling portion; and a resiliently deformable portion that anchors the anchor portion to the coupling portion, and is set with an external profile dimension along a direction orthogonal to a first face of the cover that is larger than the height dimension of the opening portion when the resiliently deformable portion has been resiliently deformed.
    • 提供了一种盖结合结构,其包括:联接槽,其设置于包括吨位盖的细长形状的吨位覆盖装置,所述联接槽包括联接到片状盖的一端的联接部和开口部, 并且与所述联轴器部分相连通; 锚固部分​​,其设置在所述盖的一端,并且通过锚固到所述联接部分将所述盖的一端连接到所述联接部; 以及可弹性变形部分,其将所述锚定部分锚固到所述联接部分,并且当所述可弹性变形部分被设置为具有与所述盖子的第一面垂直的方向的外部轮廓尺寸,所述外部轮廓尺寸大于所述开口部分的高度尺寸 已经弹性变形。
    • 8. 发明申请
    • TONNEAU COVER APPARATUS
    • TONNEAU盖装置
    • US20120181813A1
    • 2012-07-19
    • US13350955
    • 2012-01-16
    • Kazunori SaitoTakahiro Yajima
    • Kazunori SaitoTakahiro Yajima
    • B60P7/04
    • B60R5/047
    • There is provided a tonneau cover apparatus including: a winding shaft that winds up a tonneau cover; an elongated shaped case that accommodates the winding shaft; support members provided at one end portion and another end portion of the case, and supporting the winding shaft; a retention member provided at the one end portion and/or the other end portion of the case and including an outer wall portion that covers the support member; and blocking portions provided at the support member and the retention member at the at least one end portion, the blocking portions being disposed at the inner side relative to the outer wall portion, and blocking movement of the retention member outward in the axial direction of the winding shaft from the engaging position by abutting against one another at the engaging position.
    • 提供了一种吨位覆盖装置,其包括:缠绕一吨吨盖的卷绕轴; 容纳卷绕轴的细长形状的壳体; 支撑构件设置在壳体的一个端部和另一个端部处,并且支撑卷绕轴; 保持构件,设置在所述壳体的一个端部和/或另一个端部,并且包括覆盖所述支撑构件的外壁部; 以及在所述至少一个端部处设置在所述支撑构件和所述保持构件处的阻挡部分,所述阻挡部分相对于所述外壁部分设置在所述内侧,并且所述保持构件在所述保持构件的轴向方向上向外阻挡 通过在接合位置处彼此抵靠而从接合位置卷绕轴。
    • 9. 发明授权
    • Apparatus and method for forming deposited film
    • 用于形成沉积膜的装置和方法
    • US06846521B2
    • 2005-01-25
    • US10650763
    • 2003-08-29
    • Takeshi ShishidoMasahiro KanaiYuzo KodaTakahiro Yajima
    • Takeshi ShishidoMasahiro KanaiYuzo KodaTakahiro Yajima
    • C23C16/503C23C16/509C23C16/54H01J37/32H01L21/205H01L31/04C23C16/00
    • H01J37/32009C23C16/5096C23C16/545H01J37/32532
    • A two-layer structured electric power application electrode including a non-split electrode consisting of a single planar plate and six split electrodes arranged on the non-split electrode so as to be electrically in contact with the non-split electrode is arranged on the upper side of a discharge chamber provided within a vacuum container such that the power application electrode faces a strip substrate in parallel. The split electrodes are arranged in such a manner as to form a planar plane, and the distance between the surfaces of the split electrodes facing the strip substrate and the strip substrate is uniform. The total area of the surfaces of the split electrodes facing the strip substrate is the same as the area of the non-split electrode on which the split electrodes are mounted. This improves the uniformity in plasma generated in the apparatus for forming a deposited film and enables cutting-down of the costs required to form deposited films.
    • 包括由单个平面板组成的非分裂电极和布置在非分离电极上以与非分离电极电接触的六个分离电极的双层结构电力施加电极设置在上部 设置在真空容器内的排出室的侧面,使得电力施加电极平行面对带状基板。 分割电极以形成平面的方式布置,并且分离电极的面对带状基板和带状基板的表面之间的距离是均匀的。 分离电极面对带状基板的表面的总面积与其上安装有分离电极的非分割电极的面积相同。 这提高了用于形成沉积膜的装置中产生的等离子体的均匀性,并且能够降低形成沉积膜所需的成本。
    • 10. 发明授权
    • Thin film formation method
    • 薄膜形成方法
    • US06800539B2
    • 2004-10-05
    • US09900043
    • 2001-07-09
    • Takahiro YajimaMasahiro KanaiShuichiro Sugiyama
    • Takahiro YajimaMasahiro KanaiShuichiro Sugiyama
    • H01L2120
    • C23C16/509C23C16/24H01L31/202Y02E10/50Y02P70/521
    • In a discharge space, a substrate 201 and a cathode 206 are disposed a distance d (cm) apart from each other, and gas containing one or more silicon compounds and hydrogen are introduced into the discharge space, and a product Pd of a film forming pressure P (Pa) and d, and a hydrogen flow rate M (SLM) are set so as to meet a relation: 80M+200≦Pd≦160M+333, and an RF power is applied to generate a plasma and a non-monocrystal silicon thin film is formed on the substrate 201 in the discharge space. Thereby, there is provided a thin film formation method making it possible to form an amorphous silicon film in which both a uniform film forming rate of a film distribution facilitating an implementation of a large area and a high conversion efficiency can be obtained while achieving an increase in the film forming rate.
    • 在放电空间中,衬底201和阴极206彼此间隔d(cm)设置,含有一个或多个硅化合物和氢的气体被引入到放电空间中,并且成膜的产物Pd 压力P(Pa)和d,氢气流量M(SLM)设定为满足关系:80M + 200 <= Pd <= 160M + 333,并且施加RF功率以产生等离子体和 在放电空间中的基板201上形成非单晶硅薄膜。 因此,提供了一种薄膜形成方法,使得可以形成非晶硅膜,其中可以获得均匀的薄膜分布成膜速率,从而可以获得促进大面积实现和高转换效率,同时实现增加 在成膜率上。