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1. 发明授权

US5341688A Force transducer 失效
标题翻译：力传感器
公开(公告)号：US5341688A
公开(公告)日：1994-08-30
申请号：US995826
申请日：1992-12-23
申请人： Takeshi Morikawa , Kouji Tsukada , Yutaka Nonomura , Yoshiteru Omura
发明人： Takeshi Morikawa , Kouji Tsukada , Yutaka Nonomura , Yoshiteru Omura
IPC分类号： G01L1/18 , H01L29/84 , G01L1/16
CPC分类号： G01L1/18
摘要： A force transducer comprises: an N-type silicon single crystal having a crystal face of (110) on which a force is applied; a pair of first electrodes and a pair of second electrodes mounted on the crystal face of (110) of the N-type silicon single crystal, the first electrodes facing in a direction angularly spaced by 135 degrees from a direction of of the crystal, and the second electrodes being angularly spaced by 90 degrees from the first electrodes, one of the pairs of first and second electrodes being adapted to serve as input electrodes and the other being adapted to serve as output electrodes; a force transmission block connected to the crystal face of (110) of the N-type silicon single crystal for transmitting the force perpendicularly to the crystal face; and a support bed supporting the N-type silicon single crystal and connected to the N-type silicon single crystal at a face opposite to the crystal face to which the force transmission block is connected, the support bed being in the form of a planar structure having a horizontal cross-sectional shape with a short axis and a long axis.
摘要翻译：力传感器包括：具有施加力的晶体面（110）的N型硅单晶; 一对第一电极和一对第二电极，其安装在所述N型硅单晶的（110）的晶面上，所述第一电极面向与所述N型单晶的（001）的方向成角度地间隔135度的方向并且所述第二电极与所述第一电极成角度地间隔90度，所述一对第一和第二电极中的一个适于用作输入电极，另一个适于用作输出电极; 连接到所述N型硅单晶的（110）的晶面的力传递块，用于垂直于所述晶面传递所述力; 以及支撑N型硅单晶并且在与所述力传递块连接的晶面相对的面上与所述N型硅单晶相连的支撑床，所述支撑床为平面结构具有短轴和长轴的水平横截面形状。

2. 发明授权

US5349873A Force transducer and pressure detecting circuit using the same 失效
标题翻译：力传感器和压力检测电路使用相同
公开(公告)号：US5349873A
公开(公告)日：1994-09-27
申请号：US92480
申请日：1993-07-16
申请人： Yoshiteru Omura , Kouji Tsukada , Yutaka Nonomura , Takeshi Morikawa
发明人： Yoshiteru Omura , Kouji Tsukada , Yutaka Nonomura , Takeshi Morikawa
IPC分类号： G01L1/16 , G01L1/18 , G01L9/00 , G01L9/06 , G01L9/08 , G01L23/10 , G01L23/22 , G01L9/04 , G01L1/75
CPC分类号： G01L9/0052 , G01L1/18 , G01L9/0058 , G01L9/065 , Y10S73/04
摘要： A force transducer comprising: a silicon semiconductor having a crystal face of (110); a pair of input-output shared electrodes mounted on the crystal face of the silicon semiconductor in mutual confronting relationship in a direction of of the crystal or a direction equivalent to the direction of ; a force transmission block connected to the crystal face of the silicon semiconductor for transmitting a force W perpendicularly to the crystal face; and a support bed supporting the silicon semiconductor and connected to the silicon semiconductor at a face opposite to the crystal face to which the force transmission block is connected, whereby a voltage corresponding to the force W and to be measured is output from the input-output shared electrodes when the force W is applied perpendicularly to the crystal face of the silicon semiconductor via the force transmission block while a current flows in the silicon semiconductor via the input-output shared electrodes.
摘要翻译：一种力传感器，包括：具有（110）的晶面的硅半导体; 在晶体的<110>方向或与<110>方向相等的方向上以相互面对的关系安装在硅半导体的晶面上的一对输入输出共享电极; 连接到所述硅半导体的所述晶面的力传递块，用于垂直于所述晶体面传递力W; 以及支撑硅半导体并且在与与所述力传递块连接的晶面相对的面处与所述硅半导体连接的支撑床，由此从所述输入输出输出与所述力W对应的电压当电流经由输入 - 输出共享电极在硅半导体中流动时，通过力传递块垂直于硅半导体的晶面施加力W时的共用电极。

3. 发明授权

US5635642A Vibration-sensing device method of adjusting the same and angular velocity sensor taking advantage of the same 失效
标题翻译：振动感应装置的调整方法和角速度传感器的优点相同
公开(公告)号：US5635642A
公开(公告)日：1997-06-03
申请号：US518840
申请日：1995-08-24
申请人： Yutaka Nonomura , Takeshi Morikawa , Masayuki Okuwa , Kouji Tsukada
发明人： Yutaka Nonomura , Takeshi Morikawa , Masayuki Okuwa , Kouji Tsukada
IPC分类号： G01C19/56 , G01C19/5628 , G01P3/44
CPC分类号： G01C19/5607
摘要： A vibration-sensing device (10) with high sensitivity includes a torsion bar (16) fixed on both ends thereof to a frame, a tuning fork-shaped vibrating member (12) joined with and supported by the torsion bar (16), and first and second torsion vibrating bodies (14,15) symmetrically projected from the torsion bar (16). The torsion bar (16), the tuning fork-shaped vibrating member (12), and the torsion vibrating bodies (14,15) constitute a torsion vibrating system. The application of an angular velocity to the vibration-sensing device (10) under the condition of plane vibrations of first and second vibrating tines (12a, 12b) of the first tuning fork-shaped vibrating member (12) along an X axis generates Coriolis forces to drive torsion vibration of the first tuning fork-shaped vibrating member (12) round the torsion bar (16), thereby driving torsion vibration corresponding to the angular velocity in the torsion vibrating system. The torsion vibration is amplified by the first and second torsion vibrating bodies (14,15) and detected by torsion vibration-detecting piezoelectric elements (20a,20b) attached to the torsion vibrating bodies (14,15). An angular velocity sensor using the vibration-sensing device, and a method of adjusting the sensitivity of the device are also provided.
摘要翻译：具有高灵敏度的振动检测装置（10）包括固定在其框架上的扭杆（16），与扭杆（16）接合并由扭杆（16）支撑的音叉形振动件（12），以及从扭杆（16）对称地突出的第一和第二扭转振动体（14,15）。扭杆（16），音叉形振动部件（12）和扭转振动体（14,15）构成扭转振动系统。在第一音叉形振动件（12）的X轴的第一和第二振动尖（12a，12b）的平面振动的条件下，沿着X轴向角度速度施加角速度产生科里奥利驱动第一音叉形振动件（12）在扭力杆（16）周围的扭转振动的力，由此驱动与扭转振动系统中的角速度相对应的扭转振动。扭转振动由第一和第二扭转振动体（14,15）放大，并通过安装在扭转振动体（14,15）上的扭转振动检测压电元件（20a，20b）检测。还提供了使用振动感测装置的角速度传感器和调节装置的灵敏度的方法。

4. 发明授权

US5773728A Force transducer and method of fabrication thereof 失效
标题翻译：力传感器及其制造方法
公开(公告)号：US5773728A
公开(公告)日：1998-06-30
申请号：US625528
申请日：1996-03-29
申请人： Kouji Tsukada , Takeshi Morikawa , Yutaka Nonomura , Sanae Tokumitsu , Masaharu Takeuchi , Kazuyoshi Kawaguchi
发明人： Kouji Tsukada , Takeshi Morikawa , Yutaka Nonomura , Sanae Tokumitsu , Masaharu Takeuchi , Kazuyoshi Kawaguchi
IPC分类号： G01B7/16 , G01L1/18 , G01L9/00 , G01L9/04 , H01L29/84 , G01L1/16
CPC分类号： G01L1/18
摘要： the present invention provides a force transducer having high compression fracture strength and high detection sensitivity, thus satisfying both detection precision and reliability, and also a method of fabricating such a force transducer. The force transducer is so constructed that a compression force is transferred via a pressure transfer block to narrow strain gages, which protrude from the surface of a silicon substrate and provide a small pressure-bearing area. Therefore, large compression strains act on the strain gages and thus the detection sensitivity is increased. When the compression force exceeds a predetermined value, the pressure transfer block comes into contact with the surface of the silicon crystal, thus improving the fracture strength of the strain gages. These narrow, protruding strain gages can be fabricated easily by a single mesa etching process.
摘要翻译：本发明提供一种具有高压缩断裂强度和高检测灵敏度的力传感器，从而满足检测精度和可靠性，以及制造这种力传感器的方法。力传感器被构造成通过压力传递块将压缩力传递到从硅衬底的表面突出的窄应变计，并提供小的承压面积。因此，大的压缩应变作用在应变片上，因此检测灵敏度增加。当压缩力超过预定值时，压力传递块与硅晶体的表面接触，从而提高应变计的断裂强度。这些窄的，突出的应变计可以通过单个台面蚀刻工艺容易地制造。

5. 发明授权

US5585562A Vibration-sensing gyro 无效
标题翻译：振动陀螺仪
公开(公告)号：US5585562A
公开(公告)日：1996-12-17
申请号：US640399
申请日：1996-04-30
申请人： Nobuo Kurata , Nobuyoshi Sugitani , Takashi Ozaki , Kenji Harada , Kimitoshi Tsuji , Yutaka Nonomura , Takeshi Morikawa , Masayuki Okuwa , Kouji Tsukada
发明人： Nobuo Kurata , Nobuyoshi Sugitani , Takashi Ozaki , Kenji Harada , Kimitoshi Tsuji , Yutaka Nonomura , Takeshi Morikawa , Masayuki Okuwa , Kouji Tsukada
IPC分类号： G01C19/5607 , G01P9/04
CPC分类号： G01C19/5607
摘要： A vibration-sensing gyro composed of a light alloy such as duralumin includes a base and a first pair of tines projecting parallel to each other from the base. Piezoelectric elements are mounted on the root of the side faces of the first pair of tines to excite the first pair of tines along an X axis. The vibrations of the first pair of tines along the X axis are then propagated to a second pair of tines to vibrate the second pair of tines along the X axis. Piezoelectric elements are mounted on the root of the upper and the lower faces of the second pair of tines to detect vibrations of the second pair of tines along an Y axis. When the second pair of tines receives the Coriolis force based on an angular velocity .omega. around a Z axis and vibrates along the Y axis, the vibrations along the Y axis are detected as electric signals (alternating current voltages) by piezoelectric effects of the piezoelectric elements.
摘要翻译：由诸如硬铝的轻合金构成的振动感测陀螺包括基部和从底部彼此平行地突出的第一对尖齿。压电元件安装在第一对尖齿的侧面的根部上，以沿X轴激发第一对尖齿。沿着X轴的第一对尖齿的振动然后传播到第二对尖齿，以使第二对尖齿沿X轴振动。压电元件安装在第二对尖齿的上表面和下表面的根部上，以检测第二对尖齿沿着Y轴的振动。当第二对尖齿接收基于围绕Z轴的角速度ω的科里奥利力并且沿着Y轴振动时，通过压电元件的压电效应将沿着Y轴的振动检测为电信号（交流电压）。

6. 发明授权

US08698315B2 Semiconductor device 有权
标题翻译：半导体器件
公开(公告)号：US08698315B2
公开(公告)日：2014-04-15
申请号：US13596859
申请日：2012-08-28
申请人： Yoshiyuki Hata , Yutaka Nonomura , Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yoshiteru Omura
发明人： Yoshiyuki Hata , Yutaka Nonomura , Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yoshiteru Omura
IPC分类号： H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： B81C1/00825 , B81B2201/0235 , B81B2203/033 , B81B2203/0392 , G01C19/5762 , G01C19/5769 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/084
摘要： When forming a trench of a narrow width in a thick semiconductor layer, a trench can be formed without the occurrence of semiconductor residue. In this Specification, a semiconductor device in which a trench is formed in a semiconductor layer is disclosed. In the semiconductor layer of the semiconductor device, a compensation pattern which compensates for sudden changes in the width of the trench is formed at a place at which the width of the trench changes suddenly. In the semiconductor layer of the above-described semiconductor device, since a compensation pattern is formed at a place at which the trench width changes suddenly, in the case where forming the trench using a deep RIE method, the occurrence of steep inclined portions arising from semiconductor residue can be prevented. Consequently, when forming a trench of a narrow width in a thick semiconductor layer, the occurrence of semiconductor residue can be prevented.
摘要翻译：当在厚半导体层中形成窄宽度的沟槽时，可以形成沟槽而不会发生半导体残渣。在本说明书中，公开了在半导体层中形成沟槽的半导体器件。在半导体器件的半导体层中，在沟槽宽度急剧变化的地方形成补偿沟槽宽度突然变化的补偿图案。在上述半导体器件的半导体层中，由于在沟槽宽度突然变化的地方形成补偿图案，所以在使用深RIE法形成沟槽的情况下，由于可以防止半导体残渣。因此，当在厚半导体层中形成窄宽度的沟槽时，可以防止发生半导体残渣。

7. 发明授权

US08707784B2 Laminated structure provided with movable portion 有权
标题翻译：层压结构设有可动部分
公开(公告)号：US08707784B2
公开(公告)日：2014-04-29
申请号：US13047274
申请日：2011-03-14
申请人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi , Yoshiyuki Hata , Yoshiteru Omura
发明人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi , Yoshiyuki Hata , Yoshiteru Omura
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.
摘要翻译：具有垂直于基板表面移动的第一可移动部分和平行于基板表面移动的第二可移动部分的结构通过采用用于第一部分和第二部分的嵌套结构的层压结构实现。层叠结构设置有内部和外部可移动部分。 y弹簧连接到外部，并且外部部分通过y弹簧以与外部基板隔开的高度在y轴方向上支撑。 z弹簧连接到内部，并且内部通过z弹簧以与外基板隔开的高度在z轴方向上支撑。外部部分和z弹簧与基板处于不同的高度，并且z弹簧在与外部可移动部分分开的高度处超过外部部分。

8. 发明授权

US5945599A Resonance type angular velocity sensor 失效
标题翻译：共振型角速度传感器
公开(公告)号：US5945599A
公开(公告)日：1999-08-31
申请号：US989911
申请日：1997-12-12
申请人： Motohiro Fujiyoshi , Yoshiteru Omura , Yutaka Nonomura , Norio Fujitsuka
发明人： Motohiro Fujiyoshi , Yoshiteru Omura , Yutaka Nonomura , Norio Fujitsuka
IPC分类号： G01C19/5719 , G01P9/04
CPC分类号： G01C19/5719
摘要： A resonance type angular velocity sensor is provided with a mass displacement supporting beam (20, 21, 22, 23) for supporting a vibration in a detecting direction due to a Coriolis force of a mass portion (1) and a mass excitation supporting beam for supporting a mass displacement supporting base portion (24, 25) in such a manner as to allow the mass portion (1) to vibrate away from the beam in an excitation direction. When the mass displacement supporting base portion (24) is excited in the excitation direction by an opposing comb exciting electrode (51), the mass portion (1) vibrates. A projecting electrode (31) is provided in a side surface of the Coriolis force detecting direction of the mass portion (1) and capacity detecting electrodes (30, 32) are disposed in such a manner as to oppose this. When the Coriolis force acts on the mass portion (1) vibrating in the excitation direction, the mass portion (1) vibrates also in the detecting direction so that the capacity change is detected by the capacity detecting electrodes (30, 32). In such a case, it is possible to provide a mechanism for applying a stress to the beam members (10, 11, 12, 13, 14, 15, 16, 17) so as to adjust the exciting frequency.
摘要翻译：共振型角速度传感器设有质量位移支撑梁（20,21,22,23），用于由于质量部分（1）的科里奥利力和用于支撑梁的质量激励支撑梁而支撑在检测方向上的振动支撑质量位移支撑基部（24,25），以允许质量部分（1）在激励方向上离开光束振动。当质量位移支撑基部（24）通过相对的梳齿形激励电极（51）在激励方向被激发时，质量部分（1）振动。在质量部（1）的科里奥利力检测方向的侧面设置有突出电极（31），并且以相反的方式设置容量检测电极（30,32）。当科里奥利力作用于在激励方向上振动的质量部分（1）时，质量部分（1）也沿检测方向振动，从而通过容量检测电极（30,32）检测容量变化。在这种情况下，可以提供一种用于向梁构件（10,11,12,13,14,15,16,17）施加应力以调节激励频率的机构。

9. 发明授权

US08816451B2 MEMS structure and manufacturing method thereof 有权
标题翻译： MEMS结构及其制造方法
公开(公告)号：US08816451B2
公开(公告)日：2014-08-26
申请号：US13035186
申请日：2011-02-25
申请人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
发明人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H01L21/02 , H01L29/84
摘要： In a MEMS structure, a first trench which penetrates the first layer, the second layer and the third layer is formed, and a second trench which penetrates the fifth layer, the forth layer and the third layer is formed. The first trench forms a first part of an outline of the movable portion in a view along the stacked direction. The second trench forms a second part of the outline of the movable portion in the view along the stacked direction. At least a part of the first trench overlaps with the first extending portion in the view along the stacked direction.
摘要翻译：在MEMS结构中，形成贯穿第一层，第二层和第三层的第一沟槽，形成贯穿第五层，第四层和第三层的第二沟槽。第一沟槽沿着堆叠的方向形成可动部分的轮廓的第一部分。第二沟槽沿着堆叠方向在视图中形成可动部分的轮廓的第二部分。第一沟槽的至少一部分沿着堆叠方向在视图中与第一延伸部分重叠。

10. 发明授权

US6158280A Detector for detecting angular velocities about perpendicular axes 有权
标题翻译：用于检测关于垂直轴的角速度的检测器
公开(公告)号：US6158280A
公开(公告)日：2000-12-12
申请号：US218151
申请日：1998-12-22
申请人： Yutaka Nonomura , Motohiro Fujiyoshi , Yoshiteru Omura , Norio Fujitsuka
发明人： Yutaka Nonomura , Motohiro Fujiyoshi , Yoshiteru Omura , Norio Fujitsuka
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5719
摘要： A detector has first and second excitation beams extending along X-axis and Y-axis directions. These beams are fixed to a substrate via an intersecting portion. Mass portions are disposed at free ends of the beams. Sensing electrodes are disposed at the central portions of the mass portions to face the mass portions. By electrostatic force generated between the excitation electrodes and the mass portions, two mass portions vibrate in the Y-axis direction, while the remaining two mass portions vibrate in the X-axis direction. When an angular velocity .OMEGA..sub.x acts about the X axis, Z-axis Coriolis forces F.sub.1a and F.sub.1b act on the mass portions that are vibrating in the Y-axis direction. When an angular velocity .OMEGA..sub.y acts about the Y axis, Z-axis Coriolis forces F.sub.2a and F.sub.2b act on the mass portions that are vibrating in the X-axis direction. These vibrations are detected by the sensing electrodes in order to detect the angular velocities .OMEGA..sub.x and .OMEGA..sub.y.
摘要翻译：检测器具有沿X轴和Y轴方向延伸的第一和第二激发光束。这些光束经由交叉部分固定在基板上。质量部分设置在梁的自由端。传感电极设置在质量部分的中心部分以面对质量部分。通过在激励电极和质量部分之间产生的静电力，两个质量部分在Y轴方向上振动，而剩余的两个质量部分在X轴方向上振动。当角速度OMEGA x围绕X轴作用时，Z轴科里奥利力F1a和F1b作用在沿Y轴方向振动的质量部分上。当角速度OMEGA y围绕Y轴作用时，Z轴科里奥利力F2a和F2b作用在沿X轴方向振动的质量部分上。这些振动由感测电极检测，以便检测角速度OMEGA x和OMEGA y。

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