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    • 7. 发明授权
    • Positive resist composition comprising a quinone diazide sulfonic acid
ester, a novolak resin and a polyphenol compound.
    • 包含醌二叠层磺酸酯,酚醛清漆树脂和多酚化合物的正型抗蚀剂组合物。
    • US5413895A
    • 1995-05-09
    • US931316
    • 1992-08-18
    • Jun TomiokaKoji KuwanaHirotoshi NakanishiYasunori UetaniAyako Ida
    • Jun TomiokaKoji KuwanaHirotoshi NakanishiYasunori UetaniAyako Ida
    • G03F7/022H01L21/027G03F7/023G03F7/30
    • G03F7/0226
    • A positive resist composition comprising an alkali-soluble resin containing a novolak resin which is obtained by a condensation reaction of a phenol compound and a carbonyl compound and has an area in a GPC pattern of a range in that a molecular weight as converted to polystyrene is not larger than 900 not exceeding 20% of a whole pattern area excluding the unreacted phenol compound, a quinonediazide compound and a polyphenol compound of the formula: ##STR1## in which R.sub.1 and R.sub.2 are independently a hydrogen atom, a halogen atom, an alkyl group, an alkoxy group or a group: --OCOR.sub.3 in which R.sub.3 is an alkyl group or a phenyl group, x and y are independently an integer of 1 to 3, and m is an integer of 0 to 4, wherein a weight ratio of said polyphenol compound (I) to said alkali-soluble resin is from 3:10 to 5:10, which is excellent in heat resistance, sensitivity, resolution and a depth of focus and leaves no scum after development.
    • 含有通过酚化合物与羰基化合物的缩合反应得到的酚醛清漆树脂的碱溶性树脂的正型抗蚀剂组合物,其GPC图案的面积为转化为聚苯乙烯的分子量的范围为 不大于900不超过除了未反应的酚化合物之外的整个图案区域的20%,醌二叠氮化合物和下式的多酚化合物:其中R 1和R 2独立地为氢原子,卤素原子 ,烷基,烷氧基或基团:其中R 3为烷基或苯基的-OCOR 3,x和y独立地为1〜3的整数,m为0〜4的整数,其中, 所述多酚化合物(I)与所述碱溶性树脂的重量比为3:10〜5:10,耐热性,灵敏度,分辨率和焦深均优异,显影后无浮渣。
    • 8. 发明申请
    • Chemically amplified resist composition
    • 化学放大抗蚀剂组合物
    • US20060073411A1
    • 2006-04-06
    • US11233130
    • 2005-09-23
    • Satoshi YamamotoYukio HanamotoKoji Kuwana
    • Satoshi YamamotoYukio HanamotoKoji Kuwana
    • G03C1/76
    • G03F7/0397G03F7/0392
    • The present invention provides a chemically amplified resist composition comprising a treated resin (1), an acid generator and a solvent, wherein resin (1) is (a) a (meth)acrylic resin which is insoluble or poorly soluble in an alkali aqueous solution and becomes soluble in an alkali aqueous solution by the action of an acid, and which comprises a repeating unit having an alicyclic hydrocarbon group in its side chain or (b) a styrenic resin which is insoluble or poorly soluble in an alkali aqueous solution and becomes soluble in an alkali aqueous solution by the action of an acid, and which comprises a repeating unit derived from hydroxystyrene, and wherein the treated resin (1) is obtained by (A) contacting crude resin (1) with activated carbon at 40 to 90° C. to obtain hemi-treated crude resin (1) and contacting the hemi-treated resin (1) with at least one member selected from the group consisting of kieselguhr and silica gel, or (B) contacting crude resin (1) with activated carbon and at least one member selected from the group consisting of kieselguhr and silica gel at 40 to 90 ° C.
    • 本发明提供一种化学增幅抗蚀剂组合物,其包含处理过的树脂(1),酸产生剂和溶剂,其中树脂(1)是(a)在碱水溶液中不溶或难溶的(甲基)丙烯酸树脂 并且通过酸的作用而溶于碱性水溶液中,并且其侧链含有具有脂环族烃基的重复单元或(b)在碱性水溶液中不溶或难溶于苯乙烯树脂,成为 通过酸的作用可溶于碱性水溶液,其中含有由羟基苯乙烯衍生的重复单元,其中,(A)将粗树脂(1)与40〜90的活性炭接触而得到 得到半经处理的粗树脂(1),并将半经处理的树脂(1)与选自硅藻土和硅胶的至少一种物质接触,或(B)使粗树脂(1)与 活性炭 和选自硅藻土和硅胶中的至少一种在40至90℃。
    • 9. 发明授权
    • Secondary battery with a spirally-rolled electrode group
    • 具有螺旋卷绕电极组的二次电池
    • US08557410B2
    • 2013-10-15
    • US12550637
    • 2009-08-31
    • Isao MatsumotoHua ZhouKoji Kuwana
    • Isao MatsumotoHua ZhouKoji Kuwana
    • H01M10/00H01M10/02H01M10/04
    • H01M2/18H01M2/0413H01M2/263H01M10/0413H01M10/0431H01M10/0468
    • An electrode group E in which a positive electrode 1 and a negative electrode 2 are spirally-rolled interposing a separator 3 is contained in a bottomed cylindrical can 4. A metal exposure portion 1a provided on an end surface of the positive electrode 1 of the electrode group E or a metal-made current collecting plate 9 electrically connected to the metal exposure portion 1a (called a current collecting portion of a positive electrode) and a cover body 8 also functioning as a positive electrode terminal are electrically connected by a metal lead plate 5. One or more electrolyte resistant metal pressers 10 are arranged and electrically connected between the current collecting portion of the positive electrode and the cover body 8. The electrode group E is applied pressure by the cover body 8 and the bottom portion 4a of the bottomed cylindrical can 4.
    • 其中正极1和负极2螺旋卷绕插入隔板3的电极组E包含在有底圆筒形罐4中。设置在电极的正极1的端面上的金属曝光部分1a 电气连接到金属曝光部分1a(称为正电极的集电部分)的组E或金属制集电板9以及也用作正极端子的盖体8通过金属引线板电连接 一个或多个耐电解质的金属按压件10布置并电连接在正电极的集流部分和盖体8之间。电极组件E被盖体8和底部部分4a的底部部分4a施加 圆筒罐4。
    • 10. 发明申请
    • Secondary Battery with a Spirally-Rolled Electrode Group
    • 带有螺旋状电极组的二次电池
    • US20100055548A1
    • 2010-03-04
    • US12550637
    • 2009-08-31
    • Isao MatsumotoHua ZhouKoji Kuwana
    • Isao MatsumotoHua ZhouKoji Kuwana
    • H01M6/10
    • H01M2/18H01M2/0413H01M2/263H01M10/0413H01M10/0431H01M10/0468
    • An electrode group E in which a positive electrode 1 and a negative electrode 2 are spirally-rolled interposing a separator 3 is contained in a bottomed cylindrical can 4. A metal exposure portion 1a provided on an end surface of the positive electrode 1 of the electrode group E or a metal-made current collecting plate 9 electrically connected to the metal exposure portion 1a (called a current collecting portion of a positive electrode) and a cover body 8 also functioning as a positive electrode terminal are electrically connected by a metal lead plate 5. One or more electrolyte resistant metal pressers 10 are arranged and electrically connected between the current collecting portion of the positive electrode and the cover body 8. The electrode group E is applied pressure by the cover body 8 and the bottom portion 4a of the bottomed cylindrical can 4.
    • 其中正极1和负极2螺旋卷绕插入隔板3的电极组E包含在有底圆筒形罐4中。设置在电极的正极1的端面上的金属曝光部分1a 电气连接到金属曝光部分1a(称为正电极的集电部分)的组E或金属制集电板9以及也用作正极端子的盖体8通过金属引线板电连接 一个或多个耐电解质的金属按压件10布置并电连接在正电极的集流部分和盖体8之间。电极组件E被盖体8和底部部分4a的底部部分4a施加 圆筒罐4。