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    • 3. 发明授权
    • Heterodyne scatterometer for detecting and analyzing wafer surface
defects
    • 用于检测和分析晶圆表面缺陷的异步散射仪
    • US5923423A
    • 1999-07-13
    • US923453
    • 1997-09-04
    • Takeo SawatariPhilip A. GaubisAlex KloosterJames M. Marks
    • Takeo SawatariPhilip A. GaubisAlex KloosterJames M. Marks
    • G01N21/94G01B9/02
    • G01N21/94
    • A scatterometer for detecting and analyzing wafer surface defects includes a light source generating a beam of light and a photodetector. Optics are used for splitting the beam of light into a reference beam and a detection beam. Optics also direct the reference beam and the detection beam to the photodetector through different optical paths. The optics direct the detection beam to the surface of the wafer and when incident upon a defect creates a scattered beam. The optics direct the scattered beam to the photodetector. A driver moves the surface of the wafer with respect to the detection beam. A computer coupled to the photodetector determines the presence of a defect on the surface by analyzing an interference pattern from the superposition of the reference beam and the scattered beam.
    • 用于检测和分析晶片表面缺陷的散射仪包括产生光束的光源和光电检测器。 光学用于将光束分成参考光束和检测光束。 光学器件还通过不同的光路将参考光束和检测光束引导到光电检测器。 光学器件将检测光束引导到晶片的表面,并且当入射到缺陷时产生散射光束。 光学器件将散射光束引导到光电检测器。 驱动器相对于检测光束移动晶片的表面。 耦合到光电检测器的计算机通过分析来自参考光束和散射光束的叠加的干涉图案来确定表面上存在缺陷。
    • 5. 发明授权
    • Fiber optic pressure catheter
    • 光纤压力导管
    • US5987995A
    • 1999-11-23
    • US895727
    • 1997-07-17
    • Takeo SawatariYuping LinPhilip A. Gaubis
    • Takeo SawatariYuping LinPhilip A. Gaubis
    • A61B5/0215A61B5/03G01L9/00A61B5/02G01L7/08
    • A61B5/031A61B5/0215G01L9/0077
    • A fiber optic pressure catheter includes a light source, an optical fiber coupled to receive light from the light source and a sensor head that is optically coupled to the optical fiber. The sensor head has a housing defining a chamber coupled to an end of the optical fiber opposite the light source. The housing has an opening which is enclosed by a membrane. The membrane is responsive to pressure differentials between the chamber and outside the sensor head. A resilient ribbon is coupled within the chamber and has a first end fixedly coupled to a support. The ribbon has a second end that is movable in front of the optical fiber. The ribbon is mounted so that the middle portion of the ribbon touches the membrane and is biased by the membrane in response to various pressure differentials. Thus, various amounts of light are reflected back into the optical fiber based on the amount of pressure at the membrane. A detection system is optically coupled to the optical fiber which determines the pressure at the sensor head from the contrast of spectral fringes of light created by an optical coating on the end of the optical fiber and the light reflecting from the ribbon.
    • 光纤压力导管包括光源,耦合以接收来自光源的光的光纤和光学耦合到光纤的传感器头。 传感器头具有限定耦合到与光源相对的光纤的端部的腔室的壳体。 壳体具有由膜包围的开口。 膜对腔室和传感头之间的压差有反应。 弹性带连接在腔室内并且具有固定地联接到支撑件的第一端。 带状物具有可在光纤前方移动的第二端。 色带被安装成使得色带的中间部分接触膜并且响应于各种压力差被膜偏压。 因此,基于膜上的压力量,各种量的光被反射回到光纤中。 检测系统光学耦合到光纤,其根据由光纤端部上的光学涂层产生的光的光谱条纹和从带反射的光线的对比度来确定传感器头部处的压力。
    • 9. 发明授权
    • Underwater viewing system
    • 水下观景系统
    • US4119940A
    • 1978-10-10
    • US733509
    • 1976-10-18
    • Patrick N. KeatingRoger F. KoppelmanTakeo Sawatari
    • Patrick N. KeatingRoger F. KoppelmanTakeo Sawatari
    • G01S7/521G01S15/00G01S15/89G03H3/00G01S9/66
    • G03H3/00G01S15/89G01S15/8952G01S15/8977
    • An underwater viewing system described herein substantially reduces the number of hydrophones in the receiving array and associated circuitry by providing a plurality of transmitting transducers spaced apart by a known distance, each emitting a coded output which is normally a separate frequency. The receiving array, which is preferably square or rectangular, includes a substantial number of receiving hydrophones.A synthetic aperture technique is applied in which the reflected signal arriving at each individual hydrophone is amplified, modulated with a lower frequency reference signal, filtered, digitized and stored in a memory, preferably as part of a computer. The computer also compares each digitized hydrophone signal against sine and cosine reference signals at each frequency and performs a Fourier analysis of each row and column to reconstruct a primary image. It also computes spatial modulation through complex multiplication, addition and subtraction and, through this, reconstructs adjacent images for each transducer frequency such that the ultimate image synthesized and displayed is one in which the effective number of image points is like that of a system in which the number of hydrophones is the actual number multiplied by the number of different transmitted frequencies.
    • 本文描述的水下观察系统通过提供间隔开已知距离的多个发射换能器,大大减少了接收阵列和相关电路中的水听器的数量,每个发射换能器发射通常为单独频率的编码输出。 接收阵列(其优选地是正方形或矩形)包括大量的接收水听器。
    • 10. 发明授权
    • Surface profile measuring device and method
    • 表面轮廓测量装置及方法
    • US4017188A
    • 1977-04-12
    • US553332
    • 1975-02-26
    • Takeo Sawatari
    • Takeo Sawatari
    • G01B11/00G01B11/24G01B11/245G01B11/30
    • G01B11/303
    • An arrangement for measuring the profile of surfaces having a characteristic one-directional lay with sufficient resolution to determine the surface roughness thereof is disclosed, comprising a device for illuminating a small spot on the surface, with an image of the spot projected through an objective lens onto a large area light detector positioned to generate a signal corresponding to the total illumination produced by the image. The device also includes a second light detector which views a second image of the spot focused by the objective lens through a slit disposed perpendicularly to the direction of the surface lay. The respective detector signals are divided to produce signals corresponding to the ratio thereof, which, according to the present invention, correspond to the variations of the surface height occuring as the illuminated spot is scanned across the surface. A graphical profile of the surface may be obtained by recording these signals as a function of the scanned distance.
    • 公开了一种用于测量具有足够分辨率以确定其表面粗糙度的特征性单向布置的表面的轮廓的布置,其包括用于照射表面上的小斑点的装置,其中通过物镜投射的斑点的图像 定位成产生对应于由图像产生的总照明的信号的大面积光检测器。 该装置还包括第二光检测器,其通过垂直于表面铺设方向设置的狭缝来观察由物镜聚焦的光斑的第二图像。 相应的检测器信号被分割以产生对应于其比例的信号,根据本发明,这些信号对应于当照射的点扫过表面时发生的表面高度的变化。 可以通过将这些信号记录为扫描距离的函数来获得表面的图形轮廓。